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Title: Molded transparent photopolymers and phase shift optics for fabricating three dimensional nanostructures

Journal Article · · Optics Express
DOI:https://doi.org/10.1364/OE.15.006358· OSTI ID:1426957
 [1];  [1];  [1];  [1];  [1];  [1];  [1];  [2];  [3];  [2];  [4]
  1. Univ. of Illinois, Urbana, IL (United States). Department of Materials Science and Engineering, Electrical and Computer Engineering, and Chemistry, Beckman Institute and Seitz Materials Research Laboratory
  2. Univ. of New Mexico, Albuquerque, NM (United States). Department of Electrical and Computer Engineering
  3. Univ. of New Mexico, Albuquerque, NM (United States). Department of Electrical and Computer Engineering ; Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
  4. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
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This paper introduces approaches that combine micro/nanomolding, or nanoimprinting, techniques with proximity optical phase mask lithographic methods to form three dimensional (3D) nanostructures in thick, transparent layers of photopolymers. The results demonstrate three strategies of this type, where molded relief structures in these photopolymers represent (i) fine (<1 μm) features that serve as the phase masks for their own exposure, (ii) coarse features (>1 μm) that are used with phase masks to provide access to large structure dimensions, and (iii) fine structures that are used together phase masks to achieve large, multilevel phase modulations. Several examples are provided, together with optical modeling of the fabrication process and the transmission properties of certain of the fabricated structures. Lastly, these approaches provide capabilities in 3D fabrication that complement those of other techniques, with potential applications in photonics, microfluidics, drug delivery and other areas.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA); USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
AC04-94AL85000; FG02-91ER45439
OSTI ID:
1426957
Report Number(s):
SAND-2007-1409J; OPEXFF; 526802
Journal Information:
Optics Express, Vol. 15, Issue 10; ISSN 1094-4087
Publisher:
Optical Society of America (OSA)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 31 works
Citation information provided by
Web of Science

Cited By (7)

Mechanical Metamaterials and Their Engineering Applications journal December 2018
Conformable Solid-Index Phase Masks Composed of High-Aspect-Ratio Micropillar Arrays and Their Application to 3D Nanopatterning journal January 2011
Micro-/Nanostructured Mechanical Metamaterials journal August 2012
25th Anniversary Article: Ordered Polymer Structures for the Engineering of Photons and Phonons journal December 2013
Three-dimensional nanonetworks for giant stretchability in dielectrics and conductors journal January 2012
Laser Scanning Holographic Lithography for Flexible 3D Fabrication of Multi-Scale Integrated Nano-structures and Optical Biosensors journal February 2016
Recent advances in lithographic fabrication of micro-/nanostructured polydimethylsiloxanes and their soft electronic applications journal November 2019

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