Soft X-Ray Lens Development For Point Sources 0.25 (mu)m X-RAY LITHOGRAPHY Final Report CRADA No. TSB-0992-94
- JMAT Technology Co., San Diego, CA (United States)
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
The purpose of the project was to validate a compact, low -cost, soft x-ray lens design that can provide significant product enhancement to the JTC point x-ray source for submicron lithography. There
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC52-07NA27344
- OSTI ID:
- 1424643
- Report Number(s):
- LLNL-TR-746154; UCRL-ID-141202
- Country of Publication:
- United States
- Language:
- English
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