Fabrication of compound refractive lens using soft and deep X-ray lithography beamline on Indus-2
Journal Article
·
· AIP Conference Proceedings
- Indus Synchrotrons Utilisation Division, Raja Ramanna Centre for Advanced Technology, Indore (India)
X-ray compound refractive lenses (CRL) have been fabricated using Soft and Deep X-ray lithography (SDXRL) beamline on Indus-2. Upto 50 parabolic lenses are fabricated in PMMA using 1X X-ray mask. The mask contains of 20 micron thick gold absorbing pattern on polyimide membrane. The lens fabrication is done by exposing 500 {mu}m thick PMMA sheets to 5-12keV X-rays from Indus-2. The fabricated CRL will be suitable for generating focused X-ray beam of Indus-2 bending magnet source.
- OSTI ID:
- 22004108
- Journal Information:
- AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1447; ISSN APCPCS; ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
Similar Records
Indus-2 X-ray lithography beamline for X-ray optics and material science applications
Fabrication of Compound Refractive X-ray Lenses Using LIGA Process and Performance Tests
Microfocused X-rays Beams Using Compound Refractive Lenses: Possibilities for Indus-2
Journal Article
·
Thu Apr 24 00:00:00 EDT 2014
· AIP Conference Proceedings
·
OSTI ID:22271033
Fabrication of Compound Refractive X-ray Lenses Using LIGA Process and Performance Tests
Journal Article
·
Thu Jan 18 23:00:00 EST 2007
· AIP Conference Proceedings
·
OSTI ID:21052686
Microfocused X-rays Beams Using Compound Refractive Lenses: Possibilities for Indus-2
Journal Article
·
Fri Jul 15 00:00:00 EDT 2011
· AIP Conference Proceedings
·
OSTI ID:21608156