Optimizing disk registration algorithms for nanobeam electron diffraction strain mapping

Pekin, Thomas C.; Gammer, Christoph; Ciston, Jim; Minor, Andrew M.; Ophus, Colin

doi:10.1016/j.ultramic.2016.12.021

Title: Optimizing disk registration algorithms for nanobeam electron diffraction strain mapping

Journal Article · Sat Jan 28 00:00:00 EST 2017 · Ultramicroscopy

DOI:https://doi.org/10.1016/j.ultramic.2016.12.021· OSTI ID:1379825

Pekin, Thomas C. ^[1]; Gammer, Christoph ^[2]; Ciston, Jim ^[3]; Minor, Andrew M. ^[1]; Ophus, Colin ^[3]

Univ. of California, Berkeley, CA (United States). Dept. of Materials Science and Engineering; Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). National Center for Electron Microscopy, Molecular Foundry
Erich Schmid Inst. of Materials Science, Leoben (Austria)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). National Center for Electron Microscopy, Molecular Foundry

Scanning nanobeam electron diffraction strain mapping is a technique by which the positions of diffracted disks sampled at the nanoscale over a crystalline sample can be used to reconstruct a strain map over a large area. However, it is important that the disk positions are measured accurately, as their positions relative to a reference are directly used to calculate strain. Here in this study, we compare several correlation methods using both simulated and experimental data in order to directly probe susceptibility to measurement error due to non-uniform diffracted disk illumination structure. We found that prefiltering the diffraction patterns with a Sobel filter before performing cross correlation or performing a square-root magnitude weighted phase correlation returned the best results when inner disk structure was present. Lastly, we have tested these methods both on simulated datasets, and experimental data from unstrained silicon as well as a twin grain boundary in 304 stainless steel.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); Austrian Science Fund (FWF)

Grant/Contract Number:: AC02-05CH11231; AC02-05-CH11231

OSTI ID:: 1379825

Alternate ID(s):: OSTI ID: 1416658

Journal Information:: Ultramicroscopy, Vol. 176, Issue C; ISSN 0304-3991

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 51 works

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References (58)

Fundamentals of silicon material properties for successful exploitation of strain engineering in modern CMOS manufacturing Chidambaram, P. R.; Bowen, C.; Chakravarthi, S. IEEE Transactions on Electron Devices, Vol. 53, Issue 5 https://doi.org/10.1109/TED.2006.872912	journal	May 2006
Strain measurement at the nanoscale: Comparison between convergent beam electron diffraction, nano-beam electron diffraction, high resolution imaging and dark field electron holography Béché, A.; Rouvière, J. L.; Barnes, J. P. Ultramicroscopy, Vol. 131 https://doi.org/10.1016/j.ultramic.2013.03.014	journal	August 2013
Direct measurement of local lattice distortions in strained layer structures by HREM Bierwolf, R.; Hohenstein, M.; Phillipp, F. Ultramicroscopy, Vol. 49, Issue 1-4 https://doi.org/10.1016/0304-3991(93)90234-O	journal	February 1993
Scanning X-ray microdiffraction with submicrometer white beam for strain/stress and orientation mapping in thin films Tamura, N.; MacDowell, A. A.; Spolenak, R. Journal of Synchrotron Radiation, Vol. 10, Issue 2 https://doi.org/10.1107/S0909049502021362	journal	February 2003
Plastic Strain Mapping with Sub-micron Resolution Using Digital Image Correlation Di Gioacchino, F.; Quinta da Fonseca, J. Experimental Mechanics, Vol. 53, Issue 5 https://doi.org/10.1007/s11340-012-9685-2	journal	October 2012
Residual stress. Part 1 – Measurement techniques Withers, P. J.; Bhadeshia, H. K. D. H. Materials Science and Technology, Vol. 17, Issue 4 https://doi.org/10.1179/026708301101509980	journal	April 2001
An efficient, simple, and precise way to map strain with nanometer resolution in semiconductor devices Koch, Christoph T.; Özdöl, V. Burak; van Aken, Peter A. Applied Physics Letters, Vol. 96, Issue 9 https://doi.org/10.1063/1.3337090	journal	March 2010
Strain Measurement in Semiconductor Heterostructures by Scanning Transmission Electron Microscopy Müller, Knut; Rosenauer, Andreas; Schowalter, Marco Microscopy and Microanalysis, Vol. 18, Issue 5 https://doi.org/10.1017/S1431927612001274	journal	October 2012
Evaluation of two-dimensional strain distribution by STEM/NBD Uesugi, Fumihiko; Hokazono, Akira; Takeno, Shiro Ultramicroscopy, Vol. 111, Issue 8 https://doi.org/10.1016/j.ultramic.2011.01.035	journal	July 2011
Improved precision in strain measurement using nanobeam electron diffraction Béché, A.; Rouvière, J. L.; Clément, L. Applied Physics Letters, Vol. 95, Issue 12 https://doi.org/10.1063/1.3224886	journal	September 2009
Strain mapping at nanometer resolution using advanced nano-beam electron diffraction Ozdol, V. B.; Gammer, C.; Jin, X. G. Applied Physics Letters, Vol. 106, Issue 25 https://doi.org/10.1063/1.4922994	journal	June 2015
Strain mapping of semiconductor specimens with nm-scale resolution in a transmission electron microscope Cooper, David; Denneulin, Thibaud; Bernier, Nicolas Micron, Vol. 80 https://doi.org/10.1016/j.micron.2015.09.001	journal	January 2016
Strain mapping at the nanoscale using precession electron diffraction in transmission electron microscope with off axis camera Vigouroux, M. P.; Delaye, V.; Bernier, N. Applied Physics Letters, Vol. 105, Issue 19 https://doi.org/10.1063/1.4901435	journal	November 2014
Improved strain precision with high spatial resolution using nanobeam precession electron diffraction Rouviere, Jean-Luc; Béché, Armand; Martin, Yannick Applied Physics Letters, Vol. 103, Issue 24 https://doi.org/10.1063/1.4829154	journal	December 2013
Algorithms for subpixel registration Tian, Qi; Huhns, Michael N. Computer Vision, Graphics, and Image Processing, Vol. 35, Issue 2 https://doi.org/10.1016/0734-189X(86)90028-9	journal	August 1986
Efficient subpixel image registration algorithms Guizar-Sicairos, Manuel; Thurman, Samuel T.; Fienup, James R. Optics Letters, Vol. 33, Issue 2 https://doi.org/10.1364/OL.33.000156	journal	January 2008
A rapid and automatic image registration algorithm with subpixel accuracy Althof, R. J.; Wind, M. G. J.; Dobbins, J. T. IEEE Transactions on Medical Imaging, Vol. 16, Issue 3 https://doi.org/10.1109/42.585765	journal	June 1997
Scanning transmission electron microscopy strain measurement from millisecond frames of a direct electron charge coupled device Müller, Knut; Ryll, Henning; Ordavo, Ivan Applied Physics Letters, Vol. 101, Issue 21 https://doi.org/10.1063/1.4767655	journal	November 2012
Theoretical study of precision and accuracy of strain analysis by nano-beam electron diffraction Mahr, Christoph; Müller-Caspary, Knut; Grieb, Tim Ultramicroscopy, Vol. 158 https://doi.org/10.1016/j.ultramic.2015.06.011	journal	November 2015
Sub-pixel precision image matching for measuring surface displacements on mass movements using normalized cross-correlation Debella-Gilo, Misganu; Kääb, Andreas Remote Sensing of Environment, Vol. 115, Issue 1 https://doi.org/10.1016/j.rse.2010.08.012	journal	January 2011
Subpixel measurement of image features based on paraboloid surface fit Gleason, Shaun S.; Hunt, Martin A.; Jatko, William B. Fibers '91, Boston, MA, SPIE Proceedings https://doi.org/10.1117/12.25387	conference	March 1991
Local Upsampling Fourier Transform for accurate 2D/3D image registration Wang, Cailing; Jing, Xiaoyuan; Zhao, Chunxia Computers & Electrical Engineering, Vol. 38, Issue 5 https://doi.org/10.1016/j.compeleceng.2012.04.005	journal	September 2012
Pixelated detectors and improved efficiency for magnetic imaging in STEM differential phase contrast Krajnak, Matus; McGrouther, Damien; Maneuski, Dzmitry Ultramicroscopy, Vol. 165 https://doi.org/10.1016/j.ultramic.2016.03.006	journal	June 2016
Optimization and Analysis of Conjugated Polymer Side Chains for High-Performance Organic Photovoltaic Cells Kim, Ji-Hoon; Wood, Sebastian; Park, Jong Baek Advanced Functional Materials, Vol. 26, Issue 10 https://doi.org/10.1002/adfm.201504093	journal	February 2016
Crystalline Organization of a Methanofullerene as Used for Plastic Solar-Cell Applications Yang, X.; van Duren, J. K. J.; Rispens, M. T. Advanced Materials, Vol. 16, Issue 910 https://doi.org/10.1002/adma.200306372	journal	May 2004
Polymer-Fullerene Bulk-Heterojunction Solar Cells Dennler, Gilles; Scharber, Markus C.; Brabec, Christoph J. Advanced Materials, Vol. 21, Issue 13, p. 1323-1338 https://doi.org/10.1002/adma.200801283	journal	April 2009
Charge-Transport Anisotropy Due to Grain Boundaries in Directionally Crystallized Thin Films of Regioregular Poly(3-hexylthiophene) Jimison, Leslie H.; Toney, Michael F.; McCulloch, Iain Advanced Materials, Vol. 21, Issue 16 https://doi.org/10.1002/adma.200802722	journal	April 2009
Non-Basic High-Performance Molecules for Solution-Processed Organic Solar Cells van der Poll, Thomas S.; Love, John A.; Nguyen, Thuc-Quyen Advanced Materials, Vol. 24, Issue 27 https://doi.org/10.1002/adma.201201127	journal	June 2012
Toward Additive-Free Small-Molecule Organic Solar Cells: Roles of the Donor Crystallization Pathway and Dynamics Abdelsamie, Maged; Treat, Neil D.; Zhao, Kui Advanced Materials, Vol. 27, Issue 45 https://doi.org/10.1002/adma.201503395	journal	September 2015
Fullerene-Free Polymer Solar Cells with over 11% Efficiency and Excellent Thermal Stability Zhao, Wenchao; Qian, Deping; Zhang, Shaoqing Advanced Materials, Vol. 28, Issue 23 https://doi.org/10.1002/adma.201600281	journal	April 2016
Ternary Polymer Solar Cells based on Two Acceptors and One Donor for Achieving 12.2% Efficiency Zhao, Wenchao; Li, Sunsun; Zhang, Shaoqing Advanced Materials, Vol. 29, Issue 2 https://doi.org/10.1002/adma.201604059	journal	November 2016
Efficient Triplet Exciton Fusion in Molecularly Doped Polymer Light-Emitting Diodes Di, Dawei; Yang, Le; Richter, Johannes M. Advanced Materials, Vol. 29, Issue 13 https://doi.org/10.1002/adma.201605987	journal	February 2017
Orientation mapping of semicrystalline polymers using scanning electron nanobeam diffraction Panova, Ouliana; Chen, X. Chelsea; Bustillo, Karen C. Micron, Vol. 88 https://doi.org/10.1016/j.micron.2016.05.008	journal	September 2016
Electronic structure of conjugated polymers: consequences of electron–lattice coupling Salaneck, W. R.; Friend, R. H.; Brédas, J. L. Physics Reports, Vol. 319, Issue 6 https://doi.org/10.1016/s0370-1573(99)00052-6	journal	October 1999
Four-Dimensional Scanning Transmission Electron Microscopy (4D-STEM): From Scanning Nanodiffraction to Ptychography and Beyond Ophus, Colin Microscopy and Microanalysis, Vol. 25, Issue 3 https://doi.org/10.1017/S1431927619000497	journal	May 2019
Poly(3-butylthiophene) Inducing Crystallization of Small Molecule Donor for Enhanced Photovoltaic Performance Zhang, Lin; Pu, Meilin; Zhou, Weihua The Journal of Physical Chemistry C, Vol. 119, Issue 41 https://doi.org/10.1021/acs.jpcc.5b04850	journal	September 2015
Watching Paint Dry: The Impact of Diiodooctane on the Kinetics of Aggregate Formation in Thin Films of Poly(3-hexylthiophene) Reichenberger, Markus; Baderschneider, Sebastian; Kroh, Daniel Macromolecules, Vol. 49, Issue 17 https://doi.org/10.1021/acs.macromol.6b01257	journal	August 2016
Enhancing Organic Semiconductor–Surface Plasmon Polariton Coupling with Molecular Orientation Brown, Steven J.; DeCrescent, Ryan A.; Nakazono, David M. Nano Letters, Vol. 17, Issue 10 https://doi.org/10.1021/acs.nanolett.7b02767	journal	September 2017
Unraveling the Fundamental Mechanisms of Solvent-Additive-Induced Optimization of Power Conversion Efficiencies in Organic Photovoltaic Devices Herath, Nuradhika; Das, Sanjib; Zhu, Jiahua ACS Applied Materials & Interfaces, Vol. 8, Issue 31 https://doi.org/10.1021/acsami.6b04622	journal	July 2016
Percolation, Tie-Molecules, and the Microstructural Determinants of Charge Transport in Semicrystalline Conjugated Polymers Mollinger, Sonya A.; Krajina, Brad A.; Noriega, Rodrigo ACS Macro Letters, Vol. 4, Issue 7 https://doi.org/10.1021/acsmacrolett.5b00314	journal	June 2015
Quantitative Determination of Organic Semiconductor Microstructure from the Molecular to Device Scale Rivnay, Jonathan; Mannsfeld, Stefan C. B.; Miller, Chad E. Chemical Reviews, Vol. 112, Issue 10 https://doi.org/10.1021/cr3001109	journal	June 2012
Photoinduced Charge Generation and Recombination Dynamics in Model Donor/Acceptor Pairs for Organic Solar Cell Applications: A Full Quantum-Chemical Treatment Lemaur, Vincent; Steel, Michelle; Beljonne, David Journal of the American Chemical Society, Vol. 127, Issue 16 https://doi.org/10.1021/ja042390l	journal	April 2005
Remarkable Order of a High-Performance Polymer Takacs, Christopher J.; Treat, Neil D.; Krämer, Stephan Nano Letters, Vol. 13, Issue 6 https://doi.org/10.1021/nl4005805	journal	May 2013
Mapping Orientational Order in a Bulk Heterojunction Solar Cell with Polarization-Dependent Photoconductive Atomic Force Microscopy Takacs, Christopher J.; Collins, Samuel D.; Love, John A. ACS Nano, Vol. 8, Issue 8 https://doi.org/10.1021/nn502277d	journal	July 2014
Are domains in liquid crystalline polymers arrays of disclinations? Wood, Barbara A.; Thomas, Edwin L. Nature, Vol. 324, Issue 6098 https://doi.org/10.1038/324655a0	journal	December 1986
Two-dimensional charge transport in self-organized, high-mobility conjugated polymers Sirringhaus, H.; Brown, P. J.; Friend, R. H. Nature, Vol. 401, Issue 6754, p. 685-688 https://doi.org/10.1038/44359	journal	October 1999
Bottom-up organic integrated circuits Smits, Edsger C. P.; Mathijssen, Simon G. J.; van Hal, Paul A. Nature, Vol. 455, Issue 7215 https://doi.org/10.1038/nature07320	journal	October 2008
Large-scale screening of hypothetical metal–organic frameworks Wilmer, Christopher E.; Leaf, Michael; Lee, Chang Yeon Nature Chemistry, Vol. 4, Issue 2, p. 83-89 https://doi.org/10.1038/nchem.1192	journal	November 2011
Dynamic-template-directed multiscale assembly for large-area coating of highly-aligned conjugated polymer thin films Mohammadi, Erfan; Zhao, Chuankai; Meng, Yifei Nature Communications, Vol. 8, Issue 1 https://doi.org/10.1038/ncomms16070	journal	July 2017
Liquid-crystalline semiconducting polymers with high charge-carrier mobility McCulloch, Iain; Heeney, Martin; Bailey, Clare Nature Materials, Vol. 5, Issue 4 https://doi.org/10.1038/nmat1612	journal	March 2006
Polarized X-ray scattering reveals non-crystalline orientational ordering in organic films Collins, B. A.; Cochran, J. E.; Yan, H. Nature Materials, Vol. 11, Issue 6 https://doi.org/10.1038/nmat3310	journal	April 2012
A map of high-mobility molecular semiconductors Fratini, S.; Ciuchi, S.; Mayou, D. Nature Materials, Vol. 16, Issue 10 https://doi.org/10.1038/nmat4970	journal	September 2017
I. Liquid crystals. On the theory of liquid crystals Frank, F. C. Discussions of the Faraday Society, Vol. 25 https://doi.org/10.1039/df9582500019	journal	January 1958
On the existence of even indexed disclinations in nematic liquid crystals Meyer, Robert B. The Philosophical Magazine: A Journal of Theoretical Experimental and Applied Physics, Vol. 27, Issue 2 https://doi.org/10.1080/14786437308227417	journal	February 1973
Disclinations and Properties of the Directorfield in Nematic and Cholesteric Liquid Crystals Saupe, Alfred Molecular Crystals and Liquid Crystals, Vol. 21, Issue 3-4 https://doi.org/10.1080/15421407308083320	journal	January 1973
Modeling of the Distinctive Ground-State Atomic Oxygen Density Profile in Plasma Needle Discharge at Atmospheric Pressure Qian, Mu-Yang; Yang, Cong-Ying; Chen, Xiao-Chang Chinese Physics Letters, Vol. 32, Issue 7 https://doi.org/10.1088/0256-307x/32/7/075202	journal	July 2015
Enhancing Efficiency of Organic Bulkheterojunction Solar Cells by Using 1,8-Diiodooctane as Processing Additive Arca, Francesco; Loch, Marius; Lugli, Paolo IEEE Journal of Photovoltaics, Vol. 4, Issue 6 https://doi.org/10.1109/jphotov.2014.2355042	journal	November 2014
Coherent Intrachain Energy Migration in a Conjugated Polymer at Room Temperature Collini, E.; Scholes, G. D. Science, Vol. 323, Issue 5912 https://doi.org/10.1126/science.1164016	journal	January 2009

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Title: Optimizing disk registration algorithms for nanobeam electron diffraction strain mapping

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