One-dimensional stitching interferometry assisted by a triple-beam interferometer

Journal Article · Thu Apr 13 00:00:00 EDT 2017 · Optics Express

DOI:https://doi.org/10.1364/OE.25.009393· OSTI ID:1354698

Xue, Junpeng ^[1]; Huang, Lei ^[2]; Gao, Bo ^[3]; Kaznatcheev, Konstantine ^[2]; Idir, Mourad ^[2]

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1. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II); Sichuan Univ., Chengdu (China). School of Aeronautics and Astronautics
2. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
3. Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II); Chinese Academy of Sciences (CAS), Shanghai (China). Shanghai Inst. of Applied Physics; Univ. of Chinese Academy of Sciences, Beijing (China)

In this work, we proposed for stitching interferometry to use a triple-beam interferometer to measure both the distance and the tilt for all sub-apertures before the stitching process. The relative piston between two neighboring sub-apertures is then calculated by using the data in the overlapping area. Comparisons are made between our method, and the classical least-squares principle stitching method. Our method can improve the accuracy and repeatability of the classical stitching method when a large number of sub-aperture topographies are taken into account. Our simulations and experiments on flat and spherical mirrors indicate that our proposed method can decrease the influence of the interferometer error from the stitched result. The comparison of stitching system with Fizeau interferometry data is about 2 nm root mean squares and the repeatability is within ± 2.5 nm peak to valley.

• Research Organization: Brookhaven National Laboratory (BNL), Upton, NY (United States); Chinese Academy of Sciences (CAS), Shanghai (China)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES); Chinese Scholarship Council; China Central Universities (China)
• Contributing Organization: Sichuan Univ., Chengdu (China); Univ. of Chinese Academy of Sciences, Beijing (China)
• Grant/Contract Number: AC02-98CH10886; SCU2015D014
• OSTI ID: 1354698
• Report Number(s): BNL-113801-2017-JA
• Journal Information: Optics Express, Vol. 25, Issue 8; ISSN 1094-4087
• Publisher: Optical Society of America (OSA)
• Country of Publication: United States
• Language: English

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Fizeau interferometry
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X-ray mirrors