Two-dimensional stitching interferometry based on tilt measurement

Huang, Lei; Idir, Mourad; Zuo, Chao; Wang, Tianyi; Tayabaly, Kashmira; Lippmann, Erich

doi:10.1364/OE.26.023278

Title: Two-dimensional stitching interferometry based on tilt measurement

Journal Article · Mon Aug 27 00:00:00 EDT 2018 · Optics Express

DOI:https://doi.org/10.1364/OE.26.023278· OSTI ID:1467135

; Idir, Mourad;

; Wang, Tianyi; Tayabaly, Kashmira; Lippmann, Erich

In this study, a two-dimensional stitching interferometry system using two tiltmeters is proposed. During the scanning and the measurement, one tiltmeter stays with the interferometer and the other one is attached to the translation stage where the surface under test is placed. The differences of the x- and y-tilt readings between these two tiltmeters are recorded as the relative tilt between interferometer and surface under test. The relative tilt in both x- and y-directions are used to correct the surface tip/tilt of each subset, and then the piston is adjusted to get the final stitching surface map. As an example, a stitching result of a 125mm-long mirror surface is presented. The repeatability of our current stitching system is about 1.48 nm RMS. The stitching result is compared to the result of a one-dimensional angular-measurement-based stitching method to discuss the merits and limitation of the proposed method.

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Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0012704

OSTI ID:: 1467135

Alternate ID(s):: OSTI ID: 1478495

Report Number(s):: BNL-209305-2018-JAAM; OPEXFF

Journal Information:: Optics Express, Journal Name: Optics Express Vol. 26 Journal Issue: 18; ISSN 1094-4087

Publisher:: Optical Society of America (OSA)Copyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 13 works

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