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Title: Method for spatially modulating X-ray pulses using MEMS-based X-ray optics

Patent ·
OSTI ID:1349886
; ; ; ; ;

A method and apparatus are provided for spatially modulating X-rays or X-ray pulses using microelectromechanical systems (MEMS) based X-ray optics. A torsionally-oscillating MEMS micromirror and a method of leveraging the grazing-angle reflection property are provided to modulate X-ray pulses with a high-degree of controllability.

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC02-06CH11357
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Number(s):
8,976,933
Application Number:
13/246,008
OSTI ID:
1349886
Resource Relation:
Patent File Date: 2011 Sep 27
Country of Publication:
United States
Language:
English

References (10)

Combining X-ray fluorescence visualizer, imager, or information provider patent January 2010
Device for imaging scenes with very large ranges of intensity patent November 2011
A MEMS-based high frequency x-ray chopper journal April 2009
Capacitive MEMS microphones journal September 2005
MEMS-Based Channelized Dispersion Compensator With Flat Passbands journal January 2004
A synchronized rotating crystal x-ray beam chopper journal August 2002
Feasibility study into the use of mechanical choppers to alter the natural time structure of the APS journal July 1989
Extraction of single bunches of synchrotron radiation from storage rings with an X-ray chopper based on a rotating mirror journal September 1999
On the design of ultrafast shutters for time-resolved synchrotron experiments journal December 2006
An ultrafast mechanical shutter for X-rays
  • LeGrand, Alan D.; Schildkamp, Wilfried; Blank, Basil
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 275, Issue 2, p. 442-446 https://doi.org/10.1016/0168-9002(89)90722-5
journal February 1989

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