Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation
Patent
·
OSTI ID:1175560
A microelectromechanical (MEM) device for redirecting incident light is disclosed. The MEM device utilizes a pair of electrostatic actuators formed one above the other from different stacked and interconnected layers of polysilicon to move or tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected component of the incident light which can be shifted in phase or propagation angle. The MEM device, which utilizes leveraged bending to provide a relatively-large vertical displacement up to several microns for the light-reflective plate, has applications for forming an electrically-programmable diffraction grating (i.e. a polychromator) or a micromirror array.
- Research Organization:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation
- Patent Number(s):
- 6,967,757
- Application Number:
- 10/722,237
- OSTI ID:
- 1175560
- Country of Publication:
- United States
- Language:
- English
| MEMS Adaptive Optics Devices: LDRD No. 02-1385 Summary Report | report | December 2002 |
Extending the travel range of analog-tuned electrostatic actuators
|
journal | January 1999 |
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