Single atom visibility in STEM optical depth sectioning

Ishikawa, Ryo; Pennycook, Stephen J.; Lupini, Andrew R.; Findlay, Scott D.; Shibata, Naoya; Ikuhara, Yuichi

doi:10.1063/1.4965709

Title: Single atom visibility in STEM optical depth sectioning

Journal Article · Wed Oct 19 00:00:00 EDT 2016 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4965709· OSTI ID:1338557

^[1]; Pennycook, Stephen J. ^[2]; Lupini, Andrew R. ^[3];

^[4]; Shibata, Naoya ^[1]; Ikuhara, Yuichi ^[5]

Univ. of Tokyo (Japan). Inst. of Engineering Innovation
National Univ. of Singapore (Singapore). Dept. of Materials Science and Engineering
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Materials Science and Technology Division
Monash Univ., Melbourne, VIC (Australia). School of Physics and Astronomy
Univ. of Tokyo (Japan). Inst. of Engineering Innovation; Japan Fine Ceramics Center, Nagoya (Japan). Nanostructures Research Lab.

The continuing development of aberration correctors for the scanning transmission electron microscope (STEM) offers the possibility of locating single atoms in crystals in 3D via optical depth sectioning. The main factors that determine the feasibility of such an approach are visibility and dose requirements. In this paper, we show how Poisson's statistics can be quantitatively incorporated into STEM image simulations and demonstrate that the 3D location of single cerium atoms in wurtzite-type aluminum nitride is indeed feasible under large-angle illumination conditions with a relatively low dose. We also show that chromatic aberration does not presently represent a limitation provided a cold field emission source is used. Finally, these results suggest efforts into improved aberration corrector designs for larger illumination angles that offer significant potential for 3D structure determination of materials.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); New Energy and Industrial Technology Development Organization (NEDO) (Japan); Australian Research Council (Australia)

Grant/Contract Number:: AC05-00OR22725; AC02-05CH11231; DP110102228

OSTI ID:: 1338557

Alternate ID(s):: OSTI ID: 1329329

Journal Information:: Applied Physics Letters, Vol. 109, Issue 16; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 33 works

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References (30)

Single dopants in semiconductors Koenraad, Paul M.; Flatté, Michael E. Nature Materials, Vol. 10, Issue 2 https://doi.org/10.1038/nmat2940	journal	January 2011
Three-Dimensional Location of a Single Dopant with Atomic Precision by Aberration-Corrected Scanning Transmission Electron Microscopy Ishikawa, Ryo; Lupini, Andrew R.; Findlay, Scott D. Nano Letters, Vol. 14, Issue 4 https://doi.org/10.1021/nl500564b	journal	March 2014
A Bloch wave analysis of optical sectioning in aberration-corrected STEM Cosgriff, E. C.; Nellist, P. D. Ultramicroscopy, Vol. 107, Issue 8 https://doi.org/10.1016/j.ultramic.2006.12.004	journal	August 2007
Development of a monochromator for aberration-corrected scanning transmission electron microscopy Mukai, Masaki; Okunishi, Eiji; Ashino, Masanori Microscopy, Vol. 64, Issue 3 https://doi.org/10.1093/jmicro/dfv001	journal	February 2015
The potential for Bayesian compressive sensing to significantly reduce electron dose in high-resolution STEM images Stevens, Andrew; Yang, Hao; Carin, Lawrence Microscopy, Vol. 63, Issue 1 https://doi.org/10.1093/jmicro/dft042	journal	October 2013
Efficient phase contrast imaging in STEM using a pixelated detector. Part II: Optimisation of imaging conditions Yang, Hao; Pennycook, Timothy J.; Nellist, Peter D. Ultramicroscopy, Vol. 151 https://doi.org/10.1016/j.ultramic.2014.10.013	journal	April 2015
Electron tomography and holography in materials science Midgley, Paul A.; Dunin-Borkowski, Rafal E. Nature Materials, Vol. 8, Issue 4 https://doi.org/10.1038/nmat2406	journal	April 2009
Vibrational spectroscopy in the electron microscope Krivanek, Ondrej L.; Lovejoy, Tracy C.; Dellby, Niklas Nature, Vol. 514, Issue 7521 https://doi.org/10.1038/nature13870	journal	October 2014
Advanced Computing in Electron Microscopy Kirkland, Earl J. https://doi.org/10.1007/978-1-4419-6533-2	book	January 2010
Correction of higher order geometrical aberration by triple 3-fold astigmatism field Sawada, H.; Sasaki, T.; Hosokawa, F. Journal of Electron Microscopy, Vol. 58, Issue 6 https://doi.org/10.1093/jmicro/dfp033	journal	July 2009
Resolving 45-pm-separated Si–Si atomic columns with an aberration-corrected STEM Sawada, Hidetaka; Shimura, Naoki; Hosokawa, Fumio Microscopy, Vol. 64, Issue 3 https://doi.org/10.1093/jmicro/dfv014	journal	March 2015
Large-angle illumination STEM: Toward three-dimensional atom-by-atom imaging Ishikawa, Ryo; Lupini, Andrew R.; Hinuma, Yoyo Ultramicroscopy, Vol. 151 https://doi.org/10.1016/j.ultramic.2014.11.009	journal	April 2015
Three-dimensional imaging of individual hafnium atoms inside a semiconductor device van Benthem, Klaus; Lupini, Andrew R.; Kim, Miyoung Applied Physics Letters, Vol. 87, Issue 3 https://doi.org/10.1063/1.1991989	journal	July 2005
The development of a 200kV monochromated field emission electron source Mukai, Masaki; Kim, Judy S.; Omoto, Kazuya Ultramicroscopy, Vol. 140 https://doi.org/10.1016/j.ultramic.2014.02.004	journal	May 2014
Imaging hits noise barrier Samuel Reich, Eugenie Nature, Vol. 499, Issue 7457 https://doi.org/10.1038/499135a	journal	July 2013
Quantitative Annular Dark Field Electron Microscopy Using Single Electron Signals Ishikawa, Ryo; Lupini, Andrew R.; Findlay, Scott D. Microscopy and Microanalysis, Vol. 20, Issue 1 https://doi.org/10.1017/S1431927613013664	journal	October 2013
Atomic structure from large-area, low-dose exposures of materials: A new route to circumvent radiation damage Meyer, J. C.; Kotakoski, J.; Mangler, C. Ultramicroscopy, Vol. 145 https://doi.org/10.1016/j.ultramic.2013.11.010	journal	October 2014
Depth sectioning in scanning transmission electron microscopy based on core-loss spectroscopy D’Alfonso, A. J.; Findlay, S. D.; Oxley, M. P. Ultramicroscopy, Vol. 108, Issue 1 https://doi.org/10.1016/j.ultramic.2007.02.026	journal	December 2007
Direct Observation of Dopant Atom Diffusion in a Bulk Semiconductor Crystal Enhanced by a Large Size Mismatch Ishikawa, Ryo; Mishra, Rohan; Lupini, Andrew R. Physical Review Letters, Vol. 113, Issue 15 https://doi.org/10.1103/PhysRevLett.113.155501	journal	October 2014
Atomic-scale imaging of individual dopant atoms and clusters in highly n-type bulk Si Voyles, P. M.; Muller, D. A.; Grazul, J. L. Nature, Vol. 416, Issue 6883 https://doi.org/10.1038/416826a	journal	April 2002
Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopy, Part I: Cosgriff, E. C.; D’Alfonso, A. J.; Allen, L. J. Ultramicroscopy, Vol. 108, Issue 12 https://doi.org/10.1016/j.ultramic.2008.05.009	journal	November 2008
The symmetries of image formation by scattering II Applications Schwander, Peter; Giannakis, Dimitrios; Yoon, Chun Hong Optics Express, Vol. 20, Issue 12 https://doi.org/10.1364/OE.20.012827	journal	January 2012
Depth sectioning of individual dopant atoms with aberration-corrected scanning transmission electron microscopy Xin, Huolin L.; Intaraprasonk, Varat; Muller, David A. Applied Physics Letters, Vol. 92, Issue 1 https://doi.org/10.1063/1.2828990	journal	January 2008
Determination of the 3D shape of a nanoscale crystal with atomic resolution from a single image Jia, C. L.; Mi, S. B.; Barthel, J. Nature Materials, Vol. 13, Issue 11 https://doi.org/10.1038/nmat4087	journal	September 2014
Atomic-Resolution STEM Imaging of Graphene at Low Voltage of 30 kV with Resolution Enhancement by Using Large Convergence Angle Sawada, H.; Sasaki, T.; Hosokawa, F. Physical Review Letters, Vol. 114, Issue 16 https://doi.org/10.1103/PhysRevLett.114.166102	journal	April 2015
Aberration-corrected ADF-STEM depth sectioning and prospects for reliable 3D imaging in S/TEM Xin, H. L.; Muller, D. A. Journal of Electron Microscopy, Vol. 58, Issue 3 https://doi.org/10.1093/jmicro/dfn029	journal	January 2009
Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopy, Part II: Inelastic scattering D’Alfonso, A. J.; Cosgriff, E. C.; Findlay, S. D. Ultramicroscopy, Vol. 108, Issue 12 https://doi.org/10.1016/j.ultramic.2008.05.007	journal	November 2008
Advanced Computing in Electron Microscopy Kirkland, Earl J. https://doi.org/10.1007/978-1-4757-4406-4	book	January 1998
Single dopants in semiconductors Schofield, Steven R.; Rogge, Sven Journal of Physics: Condensed Matter, Vol. 27, Issue 15 https://doi.org/10.1088/0953-8984/27/15/150301	journal	March 2015
Advanced Computing in Electron Microscopy Kirkland, Earl J. Springer Cham https://doi.org/10.1007/978-3-030-33260-0	book	January 2020

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Depth sensitive imaging of graphene with an atomic resolution microscope Morishita, Shigeyuki; Senga, Ryosuke; Lin, Yung-Chang Applied Physics Letters, Vol. 113, Issue 23 https://doi.org/10.1063/1.5053926	journal	December 2018
Prospect for detecting magnetism of a single impurity atom using electron magnetic chiral dichroism Negi, Devendra; Zeiger, Paul M.; Jones, Lewys Physical Review B, Vol. 100, Issue 10 https://doi.org/10.1103/physrevb.100.104434	journal	September 2019
Material structure, properties, and dynamics through scanning transmission electron microscopy Pennycook, Stephen J.; Li, Changjian; Li, Mengsha Journal of Analytical Science and Technology, Vol. 9, Issue 1 https://doi.org/10.1186/s40543-018-0142-4	journal	April 2018
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