Rutherford forward scattering and elastic recoil detection (RFSERD) as a method for characterizing ultra-thin films

Journal Article · Thu Apr 03 00:00:00 EDT 2014 · Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms

DOI:https://doi.org/10.1016/j.nimb.2014.02.038· OSTI ID:1106565

Lohn, Andrew J. ^[1]; Doyle, Barney L. ^[1]; Stein, Gregory J. ^[1]; Mickel, Patrick R. ^[1]; Stevens, Jim E. ^[1]; Marinella, Matthew J. ^[1]

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1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

We present a novel ion beam analysis technique combining Rutherford forward scattering and elastic recoil detection (RFSERD) and demonstrate its ability to increase efficiency in determining stoichiometry in ultrathin (5-50 nm) films as compared to Rutherford backscattering. In the conventional forward geometries, scattering from the substrate overwhelms the signal from light atoms but in RFSERD, scattered ions from the substrate are ranged out while forward scattered ions and recoiled atoms from the thin film are simultaneously detected in a single detector. Lastly, the technique is applied to tantalum oxide memristors but can be extended to a wide range of materials systems.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• Grant/Contract Number: AC0494AL85000
• OSTI ID: 1106565
• Report Number(s): SAND2013-5614J; PII: S0168583X1400295X
• Journal Information: Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms, Vol. 332; Related Information: Proposed for publication in Nuclear Instruments and Methods.; ISSN 0168-583X
• Publisher: Elsevier
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
Thin films
Memristor
RRAM
Rutherford forward scattering
Elastic recoil detection