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Title: Methods and devices for fabricating and assembling printable semiconductor elements

Patent ·
OSTI ID:1084062
; ; ; ; ; ; ;

The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.

Research Organization:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-91ER45439
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Number(s):
8,440,546
Application Number:
13/113,504
OSTI ID:
1084062
Resource Relation:
Patent File Date: 2011 May 23
Country of Publication:
United States
Language:
English

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Field-Effect Mobility of Organic Polymer Thin-Film Transistors journal October 2004
Lattice-Oriented Growth of Single-Walled Carbon Nanotubes journal July 2000
Electrospinning of Nanofibers: Reinventing the Wheel? journal July 2004
Dissolvable films of silk fibroin for ultrathin conformal bio-integrated electronics journal April 2010
Light redirecting films and film systems patent-application October 2008
Mold release layer transferring film and laminate film patent August 2007
Flexible Carbon-Nanofiber Connectors with Anisotropic Adhesion Properties journal January 2010
Thermal conductivity of PET/(LDPE/AI) composites determined by MDSC journal September 2004
An improved GaAs device model for the simulation of analog integrated circuit journal May 2003
Nanowire heterostructures for encoding information patent-application February 2004
Towards woven logic from organic electronic fibres journal April 2007
Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser journal June 2002
Diazonium Salt Modification of Silk Polymer patent-application September 2009
Extending the 3ω-method to the MHz range for thermal conductivity measurements of diamond thin films journal February 2006
Double-metal background driven displays patent July 2003
An elastomeric conductor based on polyaniline prepared by mechanical mixing journal September 1999
A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires journal January 1998
Printing Patterns of Proteins journal April 1998
Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates journal July 2003
Silicon Nanowires:  Preparation, Device Fabrication, and Transport Properties journal December 2000
Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants journal January 1989
Amorphous Si TFTs on plastically deformed spherical domes journal April 2002
Thermally transferable image protective sheet, method for protective layer formation, and record produced by said method patent January 2007
Field-Effect Transistors Based on Single Semiconducting Oxide Nanobelts journal January 2003
Flexible Nanotube Electronics journal October 2003
Electro-optic displays, and methods for driving same patent September 2005
Printable semiconductor structures and related methods of making and assembling patent September 2010
Mesoscale organization of metal nanocrystals journal January 2002
Single-crystal metallic nanowires and metal/semiconductor nanowire heterostructures journal July 2004
Novel Nanostructures of Functional Oxides Synthesized by Thermal Evaporation journal January 2003
Methods for patterning using liquid embossing patent August 2005
Methods and devices for fabricating and assembling printable semiconductor elements patent July 2011
Light therapy bandage with imbedded emitters patent-application October 2007
Invention of the integrated circuit journal July 1976
Herringbone Buckling Patterns of Compressed Thin Films on Compliant Substrates journal November 2004
Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts journal February 2004
Method of fabricating micron-and submicron-scale elastomeric templates for surface patterning patent-application January 2003
Introduction to Organic Thin Film Transistors and Design of n-Channel Organic Semiconductors journal August 2004
Laser-lithography on non-planar surfaces journal January 2007
Apparatus for forming thin-film heterojunction solar cells employing materials selected from the class of I-III-VI.sub.2 chalcopyrite compounds patent July 1983
Thin-Film Transistors book February 2003
Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths journal October 1998
A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems journal October 2005
Direct Observation of Vapor−Liquid−Solid Nanowire Growth journal April 2001
Imprint lithography utilizing room temperature embossing patent November 2004
Controlled Synthesis and Photoluminescence Properties of ZnS Nanowires and Nanoribbons journal March 2005
The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives journal July 1998
Functional Pixel Circuits for Elastic AMOLED Displays journal July 2005
Low-Temperature Deposition of Hydrogenated Amorphous Silicon in an Electron Cyclotron Resonance Reactor for Flexible Displays journal July 2005
Contact Electrification and Adhesion Between Dissimilar Materials journal April 1992
Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE) journal June 2002
Finer features for functional microdevices journal August 2001
Methods fro Stepwise Deposition of Silk Fibroin Coatings patent-application August 2009
Highly Emissive Self-assembled Organic Nanoparticles having Dual Color Capacity for Targeted Immunofluorescence Labeling journal March 2008
Shaped Films of Ionotropic Hydrogels Fabricated Using Templates of Patterned Paper journal January 2009
Anodization and Microcontact Printing on Electroless Silver: Solution-Based Fabrication Procedures for Low-Voltage Electronic Systems with Organic Active Components journal July 2000
Nanocomposites patent-application May 2004
Decal transfer lithography patent-application April 2006
Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species journal August 2001
Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates journal October 2005
Multiple-mode planar-waveguide sensor, fabrication materials and techniques patent-application April 2004
Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane) journal October 1998
Deformable organic devices patent-application October 2005
High-Efficiency Multijunction Solar Cells journal March 2007
Electronic materials: Buckling down for flexible electronics journal December 2006
Universal description of channel conductivity for nanotube and nanowire transistors journal August 2003
Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers journal November 2000
In vivo degradation of three-dimensional silk fibroin scaffolds journal August 2008
Optical Systems Fabricated by Printing-based Assembly patent-application November 2010
Apparatus relating to block configurations and fluidic self-assembly processes patent December 2003
Elastically relaxed free-standing strained-silicon nanomembranes journal April 2006
The rise of graphene journal March 2007
Amorphous silicon technology for large area digital X-ray and optical imaging journal April 2002
Erratum: “Silicon electronics on silk as a path to bioresorbable, implantable devices” [Appl. Phys. Lett. 95, 133701 (2009)] journal December 2009
Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks journal August 2004
Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing journal February 2003
Polysilicon pillar heat sinks for semiconductor on insulator circuits patent June 2000
Photobiomodulation on the Angiogenesis of Skin Wounds in Rats Using Different Light Sources journal April 2007
Implantable electrode manufactured with flexible printed circuit patent February 2000
Increased fibroblast proliferation induced by light emitting diode and low power laser irradiation journal May 2003
InGaAs metal-semiconductor-metal photodetectors for long wavelength optical communications journal March 1991
Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates journal June 1994
Steps and the structure of the (0001) α-alumina surface journal January 1997
PhotoPoint Photodynamic Therapy Promotes Stabilization of Atherosclerotic Plaques and Inhibits Plaque Progression journal September 2008
Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry journal April 2002
Mechanics of rollable and foldable film-on-foil electronics journal February 1999
Unconventional Methods for Fabricating and Patterning Nanostructures journal May 1999
Magnetic trapping and self-assembly of multicomponent nanowires journal May 2002
Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates journal April 2005
Molecule-Mimetic Chemistry and Mesoscale Self-Assembly journal December 2000
GaN: Processing, defects, and devices journal July 1999
Reworkable high density interconnect structure incorporating a release layer patent July 1995
Compliant substrate technology: Integration of mismatched materials for opto-electronic applications journal January 2000
High-Performance Semiconducting Polythiophenes for Organic Thin-Film Transistors journal March 2004
High-Mobility Poly-Si Thin Film Transistors Fabricated on Stainless-Steel Foils by Low-Temperature Processes Using Sputter-Depositions journal May 2000
Template Synthesis of Electronically Conductive Polymer Nanostructures journal February 1995
Free standing single-crystal silicon microstructures journal March 1995
Computerized three-dimensional cardiac mapping with interactive visual displays patent November 1997
Carbon Nanotube Inter- and Intramolecular Logic Gates journal September 2001
Conversion of Some Siloxane Polymers to Silicon Oxide by UV/Ozone Photochemical Processes journal June 2000
Macroelectronics journal June 2006
Disposing method for semiconductor elements patent April 2004
Organic single-crystal field-effect transistors journal May 2004
Apparatuses and methods for flexible displays patent February 2005
Lateral growth of aligned mutilwalled carbon nanotubes under electric field journal May 2003
Correlation of buffer strain relaxation modes with transport properties of two‐dimensional electron gases journal December 1996
Protective diamond-like carbon coatings for future optical storage disks journal March 2005
Fabrication of Stable Metallic Patterns Embedded in Poly(dimethylsiloxane) and Model Applications in Non-Planar Electronic and Lab-on-a-Chip Device Patterning journal April 2005
Single-crystalline gallium nitride nanobelts journal July 2002
Stretchable, Porous, and Conductive Energy Textiles journal February 2010
Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing journal October 2004
Method for forming inorganic coatings patent June 2010
Integrated wireless neural interface based on the Utah electrode array journal December 2008
Luminescence Photophysics in Semiconductor Nanocrystals journal November 1998
Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions journal March 1994
Semiconductor nanotube formation by a two-step template process journal October 1996
Highly conductive paper for energy-storage devices journal December 2009
Nanodevices, microdevices and sensors on in-vivo structures and method for the same patent-application February 2003
High-resolution transfer printing on GaAs surfaces using alkane dithiol monolayers
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  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2853-2856 https://doi.org/10.1116/1.1523405
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Systems and methods for transporting particles patent-application May 2006
Temperature coefficient of the surface resistivity of two-dimensional island gold films journal September 2000
Thermal management of electronic components using synthetic diamond patent July 1997
Mechanical properties of silicones for MEMS journal April 2008
High Resolution Electrohydrodynamic Jet Printing for Manufacturing Systems patent-application August 2011
A Rubberlike Stretchable Active Matrix Using Elastic Conductors journal September 2008
Stretchable Electronics: Materials Strategies and Devices journal December 2008
Methods and devices for fabricating three-dimensional nanoscale structures patent April 2010
Curvilinear Electronics Formed Using Silicon Membrane Circuits and Elastomeric Transfer Elements journal October 2009
Method for Forming Inorganic Coatings patent-application August 2010
Silk biomaterials and methods of use thereof patent-application November 2005
Nanotube Molecular Wires as Chemical Sensors journal January 2000
Dual plate holographic imaging technique and masks patent April 1997
Heat-transfer-stamp process for thermal imprint lithography patent September 2005
Diamond heat spreading and cooling technique for integrated circuits patent November 2006
Architectonic Quantum Dot Solids journal January 1999
Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping journal March 2000
Modification of silk fibroin using diazonium coupling chemistry and the effects on hMSC proliferation and differentiation journal July 2008
The formation of controlled-porosity membranes from anodically oxidized aluminium journal January 1989
High electron mobility transistor based on a GaN‐AlxGa 1−xN heterojunction journal August 1993
Electro-optical response of a single-crystal diamond ultraviolet photoconductor in transverse configuration journal May 2005
A hemispherical electronic eye camera based on compressible silicon optoelectronics journal August 2008
Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher journal January 1999
Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems journal March 2007
Pattern transfer printing by kinetic control of adhesion to an elastomeric stamp patent May 2011
Disposable pulse oximeter sensor patent November 1995
Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements patent-application September 2011
Self-Catalysis and Phase Transformation in the Formation of CdSe Nanosaws journal October 2004
Thermal oxide of polycrystalline silicon on steel foil as a thin-film transistor gate dielectric journal June 2001
Multiwalled carbon nanotube AFM probes for surface characterization of micro/nanostructures journal November 2004
Release strategies for making transferable semiconductor structures, devices and device components patent April 2011
Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes journal August 2005
From Si Source Gas Directly to Positioned, Electrically Contacted Si Nanowires: The Self-Assembling “Grow-in-Place” Approach journal November 2004
Medium-scale carbon nanotube thin-film integrated circuits on flexible plastic substrates journal July 2008
Selecting the signals for a brain–machine interface journal December 2004
Colloidal Two-Dimensional Systems: CdSe Quantum Shells and Wells journal October 2003
Organic electronics on paper journal April 2004
Magnetic self-assembly of three-dimensional surfaces from planar sheets journal March 2005
Finite deformation mechanics in buckled thin films on compliant supports journal September 2007
Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
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  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 2, p. 683-689 https://doi.org/10.1116/1.591259
journal April 2000
The Chemistry and Physics of Semiconductor Nanowires journal February 2005
A MEMS fabricated flexible electrode array for recording surface field potentials journal May 2006
Stretchable semiconductor elements and stretchable electrical circuits patent-application February 2006
Aligned Arrays of Single-Walled Carbon Nanotubes Generated from Random Networks by Orientationally Selective Laser Ablation journal December 2004
Magnetoplasmadynamic apparatus and process for the separation and deposition of materials patent September 1984
Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates journal March 2005
Method for fabricating self-assembling microstructures patent August 1996
Microporous materials: Electrochemically grown photonic crystals journal December 1999
Gallium Oxide Nanoribbons and Nanosheets journal February 2002
Design of High-Performance Regioregular Polythiophenes for Organic Thin-Film Transistors journal August 2005
Surface mount and flip chip technology for total integrated circuit isolation patent May 1998
Chip level hermetic and biocompatible electronics package using SOI wafers patent-application August 2004
Chemical Etching Characteristics of (001)GaAs journal January 1983
Ordering of microwrinkle patterns by compressive strain journal April 2004
Challenging Cognitive and Moral Imperialism journal December 2004
Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics journal July 2002
Displays combining active and non-active inks patent October 2002
High-frequency ultrasound array element using thermoelastic expansion in an elastomeric film journal July 2001
Single crystal silicon arrayed devices with optical shield between transistor and substrate patent November 2001
Detection, Stimulation, and Inhibition of Neuronal Signals with High-Density Nanowire Transistor Arrays journal August 2006
Implantable microelectronic device and method of manufacture patent May 2010
Chemistry and Physics in One Dimension: Synthesis and Properties of Nanowires and Nanotubes journal February 1999
Characterization of Pd–GaAs Schottky diodes prepared by the electroless plating technique journal May 2003
Low-Temperature Materials and Thin Film Transistors for Flexible Electronics journal August 2005
Optical systems fabricated by printing-based assembly patent July 2011
Creating micro- and nanostructures on tubular and spherical surfaces
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  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6, p. 2412-2418 https://doi.org/10.1116/1.2804428
journal December 2007
Structures, systems and methods for joining articles and materials and uses therefor patent-application December 2004
Mixed Mode Cracking in Layered Materials book January 1991
Biocompatible Silk Printed Optical Waveguides journal June 2009
Growth and properties of nanocrystalline diamond films journal October 2006
High-performance organic thin-film transistors with metal oxide/metal bilayer electrode journal November 2005
Inference of hand movements from local field potentials in monkey motor cortex journal November 2003
High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes journal March 2007
Nano- and Micropatterning of Optically Transparent, Mechanically Robust, Biocompatible Silk Fibroin Films journal August 2008
Wafer-level in-registry microstamping journal March 1999
Looking at Rubber Adhesion journal March 1979
Surface plasmon polariton band gap structures patent-application February 2002
Stretchable semiconductor elements and stretchable electrical circuits patent July 2009
Single Etch Patterning of Stacked Silver and Molybdenum Alloy Layers on Glass Using Microcontact Wave Printing
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  • Journal of the American Chemical Society, Vol. 127, Issue 31, p. 10786-10787 https://doi.org/10.1021/ja0523791
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Aluminum metallization—Advantages and limitations for integrated circuit applications journal January 1969
Catheter Technique for Recording His Bundle Activity in Man journal January 1969
Direct synthesis and characterization of CdS nanobelts journal July 2006
High-mobility thin-film transistors based on aligned carbon nanotubes journal July 2003
Bonded intermediate substrate and method of making same patent-application November 2006
Printing meets lithography: Soft approaches to high-resolution patterning journal September 2001
Preparation of Ceramic Inks for Solid Freeforming Using a Continuous Jet Printer journal November 1999
Curved CCD detector devices and arrays for multispectral astrophysical applications and terrestrial stereo panoramic cameras conference September 2004
Molecular control over Au/GaAs diodes journal March 2000
Thermal transport and grain boundary conductance in ultrananocrystalline diamond thin films journal June 2006
On the relationship between the temperature coefficient of resistance and the thermal conductance of integrated metal resistors journal May 2004
Electronic paper: Flexible active-matrix electronic ink display journal May 2003
Method of selective removal of SiGe alloys patent May 2005
Polarized Raman Spectroscopy on Isolated Single-Wall Carbon Nanotubes journal December 2000
High-Performance Flexible Hybrid Field-Effect Transistors Based on Cellulose Fiber Paper journal September 2008
Diamond-structured photonic crystals journal September 2004
Ambipolar Pentacene Field-Effect Transistors and Inverters journal February 2000
Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates journal June 1998
Active matrix substrate, method of manufacturing the same, and display device patent May 2007
Flexible membrane pressure sensor journal April 2005
p-Channel, n-Channel Thin Film Transistors and p−n Diodes Based on Single Wall Carbon Nanotube Networks journal October 2004
RFID Tag and RF Structures on a Paper Substrate Using Inkjet-Printing Technology journal December 2007
Stamp for a lithographic process patent October 1998
Cooling system for a semiconductor device and method of fabricating same patent April 2006
Structural and Mechanical Properties of Woven Fabrics Employing Peirce's Model journal October 2003
Lateral polysilicon p+–p–n+ and p+–n–n+ diodes journal April 2003
Microelectrodes, Microelectronics, and Implantable Neural Microsystems journal July 2008
Concentrated aqueous silk fibroin solution and use thereof patent December 2009
Printable semiconductor structures and related methods of making and assembling patent October 2011
Method and apparatus for fabricating self-assembling microstructures patent March 2005
Implantable electrode array patent-application February 2007
Structural forms of single crystal semiconductor nanoribbons for high-performance stretchable electronics journal January 2007
Organic Transistors: Two-Dimensional Transport and Improved Electrical Characteristics journal April 1995
Organic light-emitting diodes formed by soft contact lamination journal January 2004
Over 30% efficient InGaP/GaAs tandem solar cells journal January 1997
Low-Voltage Organic Field-Effect Transistors and Inverters Enabled by Ultrathin Cross-Linked Polymers as Gate Dielectrics journal July 2005
Batch manufacturing method for photovoltaic cells patent November 2001
Directional assembly of carbon nanotube strings patent May 2005
Gallium Arsenide Transistors: Realization Through a Molecularly Designed Insulator journal March 1994
Active matrix substrate, method of manufacturing the same, and display device patent April 2005
A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications journal June 2004
Growth, branching, and kinking of molecular-beam epitaxial <110> GaAs nanowires journal October 2003
From Micro- to Nanofabrication with Soft Materials journal November 2000
Semiconductor Wires and Ribbons for High‐ Performance Flexible Electronics journal July 2008
High-Current Nanotube Transistors journal May 2004
Strained semiconductor by full wafer bonding patent-application January 2005
The Characteristic Improvement of Si(111) Metal–Oxide–Semiconductor Field-Effect Transistor by Long-Time Hydrogen Annealing journal October 2004
Step and flash imprint lithography patent January 2002
Polymer-Polymer Phase Behavior journal February 1991
Water-insoluble silk films with silk I structure journal April 2010
Bendable GaAs metal-semiconductor field-effect transistors formed with printed GaAs wire arrays on plastic substrates journal August 2005
Nanotube Optoelectronic Memory Devices journal September 2004
Silk Biomaterials and Methods of Use Thereof patent-application August 2010
Adherence, friction and wear of rubber-like materials journal October 1992
Apparatuses and methods for forming electronic assemblies patent March 2005
Directional differences of impulse spread in trabecular muscle from mammalian heart. journal February 1976
Nature of multilayer steps on the {100} cleavage planes of MgO single crystals journal July 1997
Individually Suspended Single-Walled Carbon Nanotubes in Various Surfactants journal October 2003
Controlled growth of tetrapod-branched inorganic nanocrystals journal May 2003
Toward the Ultimate Tribological Interface: Surface Chemistry and Nanotribology of Ultrananocrystalline Diamond journal April 2005
High-Performance n- and p-Type Single-Crystal Organic Transistors with Free-Space Gate Dielectrics journal December 2004
Biopolymer Optofluidic Device and Method of Manufacturing the Same patent-application April 2010
Diffusion of Alkanethiols in PDMS and Its Implications on Microcontact Printing (μCP) journal January 2005
Silicon nanowire devices journal April 2000
Tetherless thermobiochemically actuated microgrippers journal January 2009
Quantifying distortions in soft lithography
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  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 88-97 https://doi.org/10.1116/1.589841
journal June 1998
High efficiency GaAs thin film solar cells by peeled film technology journal December 1978
Direct printing of polymer microstructures on flat and spherical surfaces using a letterpress technique
  • Miller, Scott M.; Troian, Sandra M.; Wagner, Sigurd
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2320-2327 https://doi.org/10.1116/1.1520554
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Method for fabricating self-assembling microstructures patent July 1998
Surface mount and flip chip technology for total integrated circuit isolation patent May 1998
Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices patent-application January 2004
Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing journal August 2004
Closure and Repropagation of Healed Cracks in Silicate Glass journal November 1985
Plastic transistors in active-matrix displays journal December 2001
Low-Temperature Polycrystalline Silicon Thin-Film Transist or Technologies for System-on-Glass Displays journal November 2002
Ink jet printhead and method of making patent August 1998
High-Resolution Inkjet Printing of All-Polymer Transistor Circuits journal December 2000
Hole mobility in organic single crystals measured by a “flip-crystal” field-effect technique journal August 2004
Generating ∼90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask
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  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 59-68 https://doi.org/10.1116/1.589836
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Method of forming an implantable electronic device chip level hermetic and biocompatible electronics package using SOI wafers patent November 2007
Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements patent-application March 2010
High-Field Electrical Transport in Single-Wall Carbon Nanotubes journal March 2000
Nanotechnology: Thin solid films roll up into nanotubes journal March 2001
Stretchable wavy metal interconnects
  • Jones, Joyelle; Lacour, Stephanie P.; Wagner, Sigurd
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 22, Issue 4, p. 1723-1725 https://doi.org/10.1116/1.1756879
journal July 2004
Radio frequency analog electronics based on carbon nanotube transistors journal January 2008
Supercritical Fluid–Liquid–Solid Synthesis of Gallium Arsenide Nanowires Seeded by Alkanethiol-Stabilized Gold Nanocrystals journal April 2004
Patterning of Thin-Film Microstructures on Non-Planar Substrate Surfaces Using Decal Transfer Lithography journal August 2004
Anomalous Coiling of SiGe/Si and SiGe/Si/Cr Helical Nanobelts journal July 2006
Semiconductor wafer having a thin die and tethers and methods of making the same patent August 2003
Three-Dimensional Nanofabrication with Rubber Stamps and Conformable Photomasks journal August 2004
Surface Modification of Sylgard-184 Poly(dimethyl siloxane) Networks by Ultraviolet and Ultraviolet/Ozone Treatment journal October 2002
Synthesis of horizontally-aligned single-walled carbon nanotubes with controllable density on sapphire surface and polarized Raman spectroscopy journal April 2006
Structure and photoluminescence of ZnSe nanoribbons grown by metal organic chemical vapor deposition journal April 2004
Nanomaterial transfer using hot embossing for flexible electronic devices journal February 2006
Physical Aspects of the Internal Water Relations of Plant Leaves journal July 1965
Method for forming inorganic coatings patent-application July 2006
Ultrathin Films of Single-Walled Carbon Nanotubes for Electronics and Sensors: A Review of Fundamental and Applied Aspects journal January 2009
Cardiac mapping system simulator patent August 1991
Alpha-particle protection of semiconductor devices patent August 1988
Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substrates journal February 2002
Method of fabrication of stacked semiconductor devices patent January 2006
Flexible electrical recording from cells using nanowire transistor arrays journal April 2009
Fabrication of Metal Nanowires Using Microcontact Printing journal July 2003
Biodegradable luminescent porous silicon nanoparticles for in vivo applications journal February 2009
Nonlinear analyses of wrinkles in a film bonded to a compliant substrate journal September 2005
Flexible active-matrix displays and shift registers based on solution-processed organic transistors journal January 2004
Self-aligned self-assembly process for fabricating organic thin-film transistors journal September 2004
Jet nozzle structure for electrohydrodynamic droplet formation and ink jet printing system therewith patent April 1976
Microcontact Printing of Alkanephosphonic Acids on Aluminum: Pattern Transfer by Wet Chemical Etching journal February 1999
Method for Producing Biomaterial Scaffolds patent-application November 2008
Medium Scale Carbon Nanotube Thin Film Integrated Circuits on Flexible Plastic Substrates patent-application June 2011
Heterogeneous materials integration: compliant substrates to active device and materials packaging journal December 2001
All-Polymer Field-Effect Transistor Realized by Printing Techniques journal September 1994
New Realization Method for Three-Dimensional Photonic Crystal in Optical Wavelength Region journal July 1996
AlGaN/GaN HEMTs-an overview of device operation and applications journal June 2002
Methods for fabricating a multiple modular assembly patent November 2001
Two-versus three-dimensional quantum confinement in indium phosphide wires and dots journal July 2003
Fabrication of solid-state nanopores with single-nanometre precision journal July 2003
Silk-Based Drug Delivery System patent-application April 2008
PDMS-based micro PCR chip with Parylene coating journal June 2003
Printable, Flexible and Stretchable Diamond for Thermal Management patent-application March 2010
Foldable Printed Circuit Boards on Paper Substrates journal January 2010
A flexible and wearable glucose sensor based on functional polymers with Soft-MEMS techniques journal October 2006
Silk Fibroin Materials and Use Thereof patent-application November 2010
Mechanically Strained Strained-Si NMOSFETs journal January 2004
Nanoscale Hydrophobic Recovery: A Chemical Force Microscopy Study of UV/Ozone-Treated Cross-Linked Poly(dimethylsiloxane) journal February 2004
A Stretchable Form of Single Crystal Silicon for High Performance Electronics on Rubber Substrates patent-application December 2006
Air-Stable All-Inorganic Nanocrystal Solar Cells Processed from Solution journal October 2005
Thin, lightweight, foldable thermochromic displays on paper journal January 2009
Using soft lithography to fabricate GaAs/AlGaAs heterostructure field effect transistors journal October 1997
Electric Field Effect in Atomically Thin Carbon Films journal October 2004
Silk fibroin materials and use thereof patent November 2010
GaAs Readied for High-Speed Microcircuits journal January 1983
Fully elastic interconnects on nanopatterned elastomeric substrates journal August 2006
Nanoscale Science and Technology: Building a Big Future from Small Things journal July 2003
Stars and stripes. Nanoscale misfit dislocation patterns on surfaces journal January 2002
Full panel electronic packaging structure and method of making same patent August 1988
Electronically Selective Chemical Functionalization of Carbon Nanotubes: Correlation between Raman Spectral and Electrical Responses journal August 2005
Stretchable interconnects using stress gradient films patent June 2004
One-chip micro-integrated optoelectronic sensor patent April 2005
Patterning Spherical Surfaces at the Two-Hundred-Nanometer Scale Using Soft Lithography journal April 2003
Method and apparatus for fabricating self-assembling microstructures patent October 1998
A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates journal January 2006
Block-by-Block Growth of Single-Crystalline Si/SiGe Superlattice Nanowires journal February 2002
Colloidal Inks for Directed Assembly of 3-D Periodic Structures journal July 2002
Catalyst-Assisted Formation of Nanocantilever Arrays on ZnS Nanoribbons by Post-Annealing Treatment journal April 2006
A Solution-Phase, Precursor Route to Polycrystalline SnO2 Nanowires That Can Be Used for Gas Sensing under Ambient Conditions journal December 2003
Structures of indium oxide nanobelts journal October 2003
Large Photoresponsivity in High-Mobility Single-Crystal Organic Field-Effect Phototransistors journal November 2005
Implantable, tissue conforming drug delivery device patent-application August 2006
Low-temperature single-crystal Si TFTs fabricated on Si films processed via sequential lateral solidification journal August 1998
Amorphous silicon crystallization and polysilicon thin film transistors on SiO2 passivated steel foil substrates journal May 2001
Film based addressable programmable electronic matrix articles and methods of manufacturing and using the same patent September 2002
Tailored Micropatterns through Weak Polyelectrolyte Stamping journal March 2003
Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter journal May 1997
Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps journal October 2004
Patterning of diamond microstructures on Si substrate by bulk and surface micromachining journal January 2003
Exposure method and exposure apparatus patent January 2001
Ink-Jet Printing of Binders for Ceramic Components journal April 2002
Electrocorticography telemitter patent-application June 2006
Atomic Force Microscopy of Atomic-Scale Ledges and Etch Pits Formed During Dissolution of Quartz journal March 1991
Release Strategies for Making Transferable Semiconductor Structures, Devices and Device Components patent-application July 2011
An Elastically Stretchable TFT Circuit journal December 2004
Integrated circuit packages assembled utilizing fluidic self-assembly patent July 2002
Hall Effect in the Accumulation Layers on the Surface of Organic Semiconductors journal November 2005
Thermal interface material with carbon nanotubes patent August 2007
A MEMS-based flexible multichannel ECoG-electrode array journal May 2009
Web process interconnect in electronic assemblies patent October 2002
Nanotube-based sensors for biomolecules patent-application October 2004
Electrical imaging of neuronal activity by multi-transistor-array (MTA) recording at 7.8 μm resolution journal August 2004
Patterned Growth and Transfer of ZnO Micro and Nanocrystals with Size and Location Control journal April 2008
Nanotube electronics: Large-scale assembly of carbon nanotubes journal September 2003
GaN-based nitric oxide sensors and methods of making and using the same patent-application August 2008
Spectral analysis of induced color change on periodically nanopatterned silk films journal January 2009
Mechanism for stamp collapse in soft lithography journal December 2005
Nonequilibrium processes for generating silicon nanostructures in single-crystalline silicon journal January 2002
Nanotechnology: High-speed integrated nanowire circuits journal April 2005
Free-standing Single Crystal Silicon Nanoribbons journal November 2001
Toward Paperlike Displays journal February 2001
Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination journal July 2002
III–nitrides: Growth, characterization, and properties journal February 2000
Magnetoplasmadynamic apparatus for the separation and deposition of materials patent December 1984
Sequential shape-and-solder-directed self-assembly of functional microsystems journal August 2004
Flexible a-Si:H Position-Sensitive Detectors journal July 2005
Atomic-Step-Templated Formation of Single Wall Carbon Nanotube Patterns journal November 2004
Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography journal April 2000
Interfacial Chemistries for Nanoscale Transfer Printing journal July 2002
Biopolymer Sensor and Method of Manufacturing the Same patent-application March 2010
High-Performance Nanowire Electronics and Photonics and Nanoscale Patterning on Flexible Plastic Substrates journal July 2005
Growth of Millimeter-Long and Horizontally Aligned Single-Walled Carbon Nanotubes on Flat Substrates journal May 2003
Method for production of a film patent April 2010
Controlled Growth of Large-Area, Uniform, Vertically Aligned Arrays of α-Fe2O3 Nanobelts and Nanowires journal January 2005
Photon confinement in high-efficiency, thin-film III–V solar cells obtained by epitaxial lift-off journal July 2006
Surface-functionalized inorganic semiconductor particles as electrical semiconductors for microelectronics applications patent-application December 2003
Holographic photonic crystals with diamond symmetry journal November 2003
High-κ dielectrics for advanced carbon-nanotube transistors and logic gates journal November 2002
A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell journal January 2004
Extraordinary Mobility in Semiconducting Carbon Nanotubes journal January 2004
Submicrometer Patterning of Charge in Thin-Film Electrets journal March 2001
Printed plastic electronics and paperlike displays journal August 2002
Solution-Liquid-Solid Growth of Crystalline III-V Semiconductors: An Analogy to Vapor-Liquid-Solid Growth journal December 1995
Devices and methods for pattern generation by ink lithography patent-application March 2008
Scaling effects of wet adhesion in biological attachment systems journal January 2006
Stretchable and Foldable Silicon Integrated Circuits journal April 2008
Stretchable and Foldable Electronic Devices patent-application July 2010
Low-Temperature Growth and Photoluminescence Property of ZnS Nanoribbons journal October 2005
Spherical deformation of compliant substrates with semiconductor device islands journal January 2004
Photonic Band Gap Architectures for Holographic Lithography journal January 2004
Nature of electrical contacts in a metal–molecule–semiconductor system
  • Hsu, J. W. P.; Loo, Y. L.; Lang, D. V.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 4, p. 1928-1935 https://doi.org/10.1116/1.1588641
journal March 2003
Concentrated Aqueous Silk Fibron Solution and Use Thereof patent-application
Flexible and stretchable micro-electrodes for in vitro and in vivo neural interfaces journal June 2010
Fabrication of thin film solar cells utilizing epitaxial deposition onto a liquid surface to obtain lateral growth patent November 1977
Backplanes for display applications, and components for use therein patent October 2006
High-Resolution Mapping of Bio-Electric Fields patent-application July 2008
Mechanical Properties of Robust Ultrathin Silk Fibroin Films journal September 2007
Tissue-Engineered Silk Organs patent-application July 2010
Influence of hydrogen treatment and annealing processes upon the Schottky barrier height of Au/n-GaAs and Ti/n-GaAs diodes journal October 2004
An Efficient Two-Photon-Generated Photoacid Applied to Positive-Tone 3D Microfabrication journal May 2002
Techniques for layer transfer processing patent-application April 2005
Effects of Mechanical Strain on TFTs on Spherical Domes journal March 2004
High-performance poly-Si TFTs on plastic substrates using a nano-structured separation layer approach journal January 2003
Adhesion enhancement by a dielectric barrier discharge of PDMS used for flexible and stretchable electronics journal November 2007
Improved field emission properties from metal-coated diamond films journal March 2007
Photolithographic Route to the Fabrication of Micro/Nanowires of III-V Semiconductors journal January 2005
Sharp exciton emission from single InAs quantum dots in GaAs nanowires journal September 2003
A review of 3-D packaging technology
  • Al-Sarawi, S. F.; Abbott, D.; Franzon, P. D.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B, Vol. 21, Issue 1, p. 2-14 https://doi.org/10.1109/96.659500
journal February 1998
Methods of forming two-sided HDMI interconnect structures patent November 1997
Probe For Data Transmission Between A Brain And A Data Processing Device patent-application September 2009
Ge/Si nanowire heterostructures as high-performance field-effect transistors journal May 2006
Covalently immobilized protein gradients in three-dimensional porous scaffolds patent-application September 2007
Current–Voltage Characteristics of Long-Channel Nanobundle Thin-Film Transistors: A “Bottom-Up” Perspective journal February 2007
Colloidosomes: Selectively Permeable Capsules Composed of Colloidal Particles journal November 2002
Control of Si Nanowire Growth by Oxygen journal June 2006
Microfludic Device with a Cylindrical Microchannel and a Method for Fabricating Same patent-application March 2010
Electric microcontact printing method and apparatus patent-application September 2003
Photonic crystal biosensor structure and fabrication method patent-application January 2007
Integration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuits journal January 2005
Materials and noncoplanar mesh designs for integrated circuits with linear elastic responses to extreme mechanical deformations journal November 2008
Complementary metal-oxide-semiconductor thin-film transistor circuits from a high-temperature polycrystalline silicon process on steel foil substrates journal November 2002
Methods for forming assemblies patent August 2001
Method and apparatus for coating medical implants patent-application February 2007
Water-Stable Silk Films with Reduced β-Sheet Content journal August 2005
Composite stamper for imprint lithography patent-application June 2005
Trench etch process for a single-wafer RIE dry etch reactor patent August 1989
Nanotransfer printing by use of noncovalent surface forces: Applications to thin-film transistors that use single-walled carbon nanotube networks and semiconducting polymers journal December 2004
Methods and apparatus for fluidic self assembly patent September 2003
Apparatuses and methods used in forming assemblies patent August 2001
Micron and submicron patterning of polydimethylsiloxane resists on electronic materials by decal transfer lithography and reactive ion-beam etching: Application to the fabrication of high-mobility, thin-film transistors journal October 2006
High-mobility ultrathin semiconducting films prepared by spin coating journal March 2004
Diamond semiconductor technology for RF device applications journal July 2005
Testing integrated circuit dice patent April 2002
Flexural rigidity of microtubules measured with the use of optical tweezers journal February 1996
Methods to fabricate thin film transistors and circuits patent May 2001
Polymer-on-Polymer Stamping: Universal Approaches to Chemically Patterned Surfaces journal April 2002
High-mobility carbon-nanotube thin-film transistors on a polymeric substrate journal January 2005
Surface-induced structure formation of polymer blends on patterned substrates journal February 1998
Bipolar transistor with lattice matched base layer patent March 2007
Methods and devices for fabricating three-dimensional nanoscale structures patent-application December 2006
Organic-Inorganic Hybrid Materials as Semiconducting Channels in Thin-Film Field-Effect Transistors journal October 1999
Nanoribbon Waveguides for Subwavelength Photonics Integration journal August 2004
Method and apparatus for transferring blocks patent May 2004
Biomaterial Films of Bombyx Mori Silk Fibroin with Poly(ethylene oxide) journal May 2004
Long and Oriented Single-Walled Carbon Nanotubes Grown by Ethanol Chemical Vapor Deposition journal October 2004
Method for Producing at Least One Multilayer Body, and Multilayer Body patent-application November 2009
Electronic skin: architecture and components journal November 2004
Large area, high resolution, dry printing of conducting polymers for organic electronics journal January 2003
Polarization Dependence of the Optical Absorption of Single-Walled Carbon Nanotubes journal March 2005
Organic and polymer transistors for electronics journal April 2006
Thermal interface with silver-filled carbon nanotubes patent December 2006
Chip level hermetic and biocompatible electronics package using SOI wafers patent March 2007
Light-emitting diode arrays with integrated photodetectors formed as a monolithic device and methods and apparatus for using same patent June 1999
Implantable Biocompatible Component Integrating an Active Sensor for Measurement of a Physiological Parameter, a Micro-Electromechanical System or an Integrated Circuit patent-application May 2008
Field emission from carbon nanotubes for displays journal April 2000
Integration of Organic FETs With Organic Photodiodes for a Large Area, Flexible, and Lightweight Sheet Image Scanners journal November 2005
Fibrous Protein Fusions and Use Thereof in the Formation of Advanced Organic/Inorganic Composite Materials patent-application November 2008
Mesoscopic self‐assembly of gold islands on diblock‐copolymer films journal January 1994
Waterproof AlInGaP optoelectronics on stretchable substrates with applications in biomedicine and robotics journal October 2010
Diamond film structure with high thermal conductivity patent June 1996
Patterning Self-Assembled Monolayers: Applications in Materials Science journal May 1994
Organic Light-Emitting Devices for Solid-State Lighting journal July 2008
Oxidation Resistant Germanium Nanowires: Bulk Synthesis, Long Chain Alkanethiol Functionalization, and Langmuir−Blodgett Assembly journal August 2005
Multispectral plasmonic crystal sensors patent April 2010
Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon journal January 2008
Multispectral Plasmonic Crystal Sensors patent-application September 2008
Evaluation of polydimethylsiloxane scaffolds with physiologically-relevant elastic moduli: interplay of substrate mechanics and surface chemistry effects on vascular smooth muscle cell response journal June 2005
Cell adhesion patent April 2004
Release Strategies For Making Transferable Semiconductor Structures, Devices And Device Components patent-application May 2008
Surface mount and flip chip technology with diamond film passivation for total integated circuit isolation patent June 1998
Ordering of Spontaneously Formed Buckles on Planar Surfaces journal April 2000
Patterning organic–inorganic thin-film transistors using microcontact printed templates journal November 2001
Transfer printing by kinetic control of adhesion to an elastomeric stamp journal December 2005
Adverse Reactions to Virgin Silk Sutures in Cataract Surgery journal May 1984
Small-Angle Neutron Scattering from Surfactant-Assisted Aqueous Dispersions of Carbon Nanotubes
  • Yurekli, Koray; Mitchell, Cynthia A.; Krishnamoorti, Ramanan
  • Journal of the American Chemical Society, Vol. 126, Issue 32, p. 9902-9903 https://doi.org/10.1021/ja047451u
journal August 2004
Methods of positioning and/or orienting nanostructures patent March 2005
Nanowire Arrays Defined by Nanoimprint Lithography journal April 2004
Advertising sheet using micro-prism retroreflective sheet and method for manufacturing the same patent-application March 2007
Large Area Submicrometer Contact Printing Using a Contact Aligner journal June 2000
The mechanics of electronic materials journal September 1999
Flexible displays patent October 2003
Simple Route to Large-Scale Ordered Arrays of Liquid-Deposited Carbon Nanotubes journal April 2004
Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters journal July 1996
Methods for transferring elements from a template to a substrate patent April 2003
Light-coupling masks for lensless, sub-wavelength optical lithography journal May 1998
An analytical back-gate bias effect model for ultrathin SOI CMOS devices journal April 1993
Large-scale complementary integrated circuits based on organic transistors journal February 2000
Nanoimprint lithography patent June 1998
Arrays for multiplexed surface plasmon resonance detection of biological molecules patent May 2007
Chemical Etching of InGaAsP/InP DH Wafer journal January 1982
Micromachining on (111)-oriented silicon journal June 1999
Cheap and cheerful circuits journal September 2000
InGaN nanorings and nanodots by selective area epitaxy journal October 2005
Nanostructured advanced materials. Perspectives and directions journal January 2002
Process and apparatus for continuous production of lightweight arrays of photovoltaic cells patent May 1987
Plastic Electronics and Their Packaging Technologies journal April 2003
Macroelectronics: Perspectives on Technology and Applications journal July 2005
In vitro degradation of silk fibroin journal June 2005
High Frequency Properties of Electro-Textiles for Wearable Antenna Applications journal February 2008
Multi-electrode cardiac lead adapter with multiplexer patent-application August 2003
Low-voltage organic transistors with an amorphous molecular gate dielectric journal October 2004
Bulk Quantities of Single-Crystal Silicon Micro-/Nanoribbons Generated from Bulk Wafers journal October 2006
Method of making thin silicon sheets for solar cells patent January 2007
Screen printing for the fabrication of organic light-emitting devices journal January 2001
Field Configured Assembly: Programmed Manipulation and Self-assembly at the Mesoscale journal May 2004
Nanobelts of Semiconducting Oxides journal March 2001
Silicon motherboards for multichannel optical modules
  • Ambrosy, A.; Richter, H.; Hehmann, J.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A, Vol. 19, Issue 1, p. 34-40 https://doi.org/10.1109/95.486559
journal March 1996
Optimization, Constraint, and History in the Evolution of Eyes journal September 1990
High Resolution Printing of Charge patent-application July 2011
Preparation of Macroporous Metal Films from Colloidal Crystals journal September 1999
Printed Assemblies of Inorganic Light-Emitting Diodes for Deformable and Semitransparent Displays journal August 2009
Microscopic patterning of orientated mesoscopic silica through guided growth journal December 1997
Stretchable gold conductors embedded in PDMS and patterned by photolithography: fabrication and electromechanical characterization journal April 2010
Printed Multilayer Superstructures of Aligned Single-Walled Carbon Nanotubes for Electronic Applications journal November 2007
Directed Assembly of One-Dimensional Nanostructures into Functional Networks journal January 2001
High Performance Electrolyte Gated Carbon Nanotube Transistors journal August 2002
Low-voltage and high-field-effect mobility organic transistors with a polymer insulator journal February 2006
Photodynamic therapy for esophageal cancer using a 180° windowed esophageal balloon journal January 1994
Variation in the effective richardson constant of metal—GaAs and Metal—InP contacts due to the effect of processing parameters journal November 1993
Web fabrication of devices patent January 2004
Degradation mechanism of diethylene glycol units in a terephthalate polymer journal April 2006
Room-temperature deposition of high-purity silicon oxide films by RF plasma-enhanced CVD journal September 2001
Human neocortical electrical activity recorded on nonpenetrating microwire arrays: applicability for neuroprostheses journal July 2009
High-performance all-polymer integrated circuits journal September 2000
Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers journal September 1998
Electronic transport in nanometre-scale silicon-on-insulator membranes journal February 2006
Printable Semiconductor Structures and Related Methods of Making and Assembling patent-application November 2010
Random networks of carbon nanotubes as an electronic material journal March 2003
Free-standing and vertically aligned InP nanowires grown by metalorganic vapor phase epitaxy journal March 2004
High Performance n-Type Carbon Nanotube Field-Effect Transistors with Chemically Doped Contacts journal February 2005
High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes journal January 1995
Engineering Carbon Nanotubes and Nanotube Circuits Using Electrical Breakdown journal April 2001
Band Gap Fluorescence from Individual Single-Walled Carbon Nanotubes journal July 2002
Complementary metal oxide silicon integrated circuits incorporating monolithically integrated stretchable wavy interconnects journal July 2008
Manufacturing method for electric device patent-application April 2004
Self-Assembly of Mesoscale Objects into Ordered Two-Dimensional Arrays journal April 1997
Blood testing and therapeutic compound delivery system patent-application November 2005
Apparatus and Methods for Cooling a Treatment Apparatus Configured to Non-Invasively Deliver Electromagnetic Energy to Patients Tissue patent-application June 2009
Large-Area, Selective Transfer of Microstructured Silicon: A Printing- Based Approach to High-Performance Thin-Film Transistors Supported on Flexible Substrates journal October 2005
Semiconductor nanowires for novel one-dimensional devices journal March 2004
Surface mountable flexible interconnect patent July 1999
Aligned growth of isolated single-walled carbon nanotubes programmed by atomic arrangement of substrate surface journal June 2005
Concentrated Aqueous Silk Fibroin Solution and Use Thereof patent-application September 2009
The Incredible Shrinking Circuit journal September 2001
Method and device for imaging and analysis of biopolymer arrays patent-application June 2001
Semiconductor Clusters, Nanocrystals, and Quantum Dots journal February 1996
Percolating Conduction in Finite Nanotube Networks journal August 2005
Synthetic Chemistry for Ultrapure, Processable, and High-Mobility Organic Transistor Semiconductors journal March 2001
Oriented nanostructures and methods of preparing patent-application July 2004
High-Resolution Contact Printing with Dendrimers journal April 2002
Stress focusing for controlled fracture in microelectromechanical systems journal February 2007
Some properties of spherical and rod-shaped semiconductor and metal nanocrystals journal January 2002
Biological applications of high aspect ratio nanoparticles journal January 2004
Process for producing a semiconductor device having a single thermal oxidizing step patent June 1999
Functional Nanostructured Plasmonic Materials journal January 2010
Photoangioplasty with local motexafin lutetium delivery reduces macrophages in a rabbit post-balloon injury model journal February 2001
In Vivo Validation of a Catheter-Based Near-Infrared Spectroscopy System for Detection of Lipid Core Coronary Plaques journal July 2009
Composite patterning devices for soft lithography patent March 2007
Controlled deposition of individual single-walled carbon nanotubes on chemically functionalized templates journal April 1999
Selective wet-etching of microcontact-printed Cu substrates with control over the etch profile journal June 2003
Variable drop mass inkjet drop generator patent August 2001
Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM journal December 2000
Method of anisotropically etching silicon patent March 1996
Conversion of Zinc Oxide Nanobelts into Superlattice-Structured Nanohelices journal September 2005

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