Coated Piezoelectric Analyzers
|
patent
|
January 1965 |
Piezo Crystal Fluid Analyzer
|
patent
|
August 1966 |
Integral Heater Piezoelectric Devices
|
patent
|
November 1969 |
Apparatus gpt Sensing Air-Borne Particulate Matter
|
patent
|
February 1973 |
Floating structure for effecting energy transformation from sea water
|
patent
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January 1982 |
Electronic nerve agent detector
|
patent
|
October 1985 |
Gas monitoring device and method
|
patent
|
January 1987 |
Integrated circuit sensor
|
patent
|
June 1987 |
Scanning thermal profiler
|
patent
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May 1988 |
Atomic force microscope with optional replaceable fluid cell
|
patent
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June 1990 |
Films of dithiolene complexes in gas-detecting microsensors
|
patent
|
February 1991 |
Cantilever type probe, scanning tunneling microscope and information processing device equipped with said probe
|
patent
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February 1993 |
Jumping probe microscope
|
patent
|
November 1993 |
Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation
|
patent
|
September 1994 |
Application of microsubstrates for materials processing
|
patent
|
October 1994 |
Gas detector
|
patent
|
May 1995 |
Tapping atomic force microscope
|
patent
|
May 1995 |
Microbar sensor
|
patent
|
August 1995 |
Smart sensor system and method using a surface acoustic wave vapor sensor array and pattern recognition for selective trace organic vapor detection
|
patent
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November 1995 |
Tapping atomic force microscope with phase or frequency detection
|
patent
|
May 1996 |
Microcantilever sensor
|
patent
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February 1998 |
Cantilever for scanning probe microscope including piezoelectric element and method of using the same
|
patent
|
April 1998 |
Scanning probe microscope for use in fluids
|
patent
|
May 1998 |
Magnetically-oscillated probe microscope for operation in liquids
|
patent
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May 1998 |
Siloxanes with strong hydrogen bond donating functionalities
|
patent
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May 1998 |
Chemical and biological sensor using an ultra-sensitive force transducer
|
patent
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September 1998 |
Atomic force microscope for biological specimens
|
patent
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February 1999 |
Atomic force microscope for high speed imaging including integral actuator and sensor
|
patent
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March 1999 |
Microcantilever detector for explosives
|
patent
|
June 1999 |
Multiplexed active biologic array
|
patent
|
October 1999 |
High resolution three-dimensional doping profiler
|
patent
|
December 1999 |
Strongly hydrogen-bond acidic polymer and methods of making and using
|
patent
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January 2000 |
Micromechanical potentiometric sensors
|
patent
|
January 2000 |
Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same
|
patent
|
February 2000 |
Scanning stylus atomic force microscope with cantilever tracking and optical access
|
patent
|
March 2000 |
Method and apparatus for sensing the natural frequency of a cantilevered body
|
patent
|
March 2000 |
Non-contact passive temperature measuring system and method of operation using micro-mechanical sensors
|
patent
|
April 2000 |
Vibrating probe for a scanning probe microscope
|
patent
|
June 2000 |
Micromechanical calorimetric sensor
|
patent
|
August 2000 |
Electromagnetic and nuclear radiation detector using micromechanical sensors
|
patent
|
September 2000 |
Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream
|
patent
|
December 2000 |
Capacitively readout multi-element sensor array with common-mode cancellation
|
patent
|
January 2001 |
Systems and methods for characterization of materials and combinatorial libraries with mechanical oscillators
|
patent
|
February 2001 |
Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample
|
patent
|
February 2001 |
Active probe for an atomic force microscope and method of use thereof
|
patent
|
February 2001 |
Uncoated microcantilevers as chemical sensors
|
patent
|
April 2001 |
Method of identifying features in indexed data
|
patent
|
June 2001 |
Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film
|
patent
|
July 2001 |
Viscosity measuring using microcantilevers
|
patent
|
August 2001 |
Method and apparatus for DNA sequencing using a local sensitive force detector
|
patent
|
August 2001 |
Micromechanical antibody sensor
|
patent
|
September 2001 |
Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same
|
patent
|
October 2001 |
Micromechanical transient sensor for measuring viscosity and density of a fluid
|
patent
|
November 2001 |
Magnetically tunable resonance frequency beam utilizing a stress-sensitive film
|
patent
|
November 2001 |
Method using photo-induced and thermal bending of MEMS sensors
|
patent
|
November 2001 |
Method and apparatus for characterizing materials by using a mechanical resonator
|
patent
|
January 2002 |
Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film
|
patent
|
January 2002 |
Mass sensor and mass detection method
|
patent
|
May 2002 |
Method and apparatus for characterizing materials by using a mechanical resonator
|
patent
|
May 2002 |
Systems and methods for characterization of materials and combinatorial libraries with mechanical oscillators
|
patent
|
June 2002 |
Methods for characterizing, classifying, and identifying unknowns in samples
|
patent
|
June 2002 |
Electronic frequency measuring device and its use
|
patent
|
June 2002 |
Micro-machined calorimetric biosensors
|
patent
|
August 2002 |
Hyperbaric hydrothermal atomic force microscope
|
patent
|
August 2002 |
Use of spatiotemporal response behavior in sensor arrays to detect analytes in fluids
|
patent
|
September 2002 |
High-precision integrated semiconductor peizoresistive detector devices and methods using the same
|
patent
|
October 2002 |
Multiprobe and scanning probe microscope
|
patent
|
October 2002 |
Sensor array for rapid materials characterization
|
patent
|
November 2002 |
Model for spectral and chromatographic data
|
patent
|
November 2002 |
Method and apparatus for characterizing materials by using a mechanical resonator
|
patent
|
December 2002 |
Microcantilever sensor
|
patent
|
February 2003 |
Active probe for an atomic force microscope and method of use thereof
|
patent
|
March 2003 |
Sensor array for rapid materials characterization
|
patent
|
March 2003 |
Sensor array-based system and method for rapid materials characterization
|
patent
|
March 2003 |
Method and apparatus for self-calibration of capacitive sensors
|
patent
|
April 2003 |
Transducer for microfluid handling system
|
patent
|
June 2003 |
Artificial olfactory system
|
patent
|
July 2003 |
Methods for characterizing, classifying, and identifying unknowns in samples
|
patent
|
August 2003 |
High throughput mechanical property testing of materials libraries using a piezoelectric
|
patent
|
November 2003 |
Sensor apparatus with magnetically deflected cantilever
|
patent
|
December 2003 |
Dynamic activation for an atomic force microscope and method of use thereof
|
patent
|
January 2004 |
High throughput microcantilever detector
|
patent
|
July 2004 |
High sensitive micro-cantilever sensor and fabricating method thereof
|
patent
|
September 2004 |
Active probe for an atomic force microscope and method of use thereof
|
patent
|
November 2004 |
Hydraulically amplified PZT mems actuator
|
patent
|
November 2004 |
Cantilever having step-up structure and method for manufacturing the same
|
patent
|
November 2004 |
Hybrid microcantilever sensors
|
patent
|
November 2004 |
Embedded piezoelectric microcantilever sensors
|
patent
|
February 2005 |
Sensor for detecting small concentrations of a target matter
|
patent
|
March 2005 |
Method and apparatus for characterizing materials by using a mechanical resonator
|
patent
|
June 2005 |
High throughput microbalance and methods of using same
|
patent
|
August 2005 |
Microscale sensor element and related device and method of use
|
patent
|
August 2005 |
Micromechanical piezoelectric device
|
patent
|
October 2005 |
Integrated biological and chemical sensors
|
patent
|
October 2005 |
Method and apparatus for characterizing materials by using a mechanical resonator
|
patent
|
October 2005 |
Liquid cell and passivated probe for atomic force microscopy and chemical sensing
|
patent
|
August 2007 |
Dynamics bionems sensors and arrays of bionems sensor immersed in fluids
|
patent
|
May 2008 |
Chemical sensor with oscillating cantilevered probe and mechanical stop
|
patent
|
April 2009 |
Cantilever sensors and transducers
|
patent
|
July 2009 |
Cantilevered probe detector with piezoelectric element
|
patent
|
April 2010 |
Cantilevered probe detector with piezoelectric element
|
patent
|
July 2012 |
CMOS monolithic mechatronic microsystem for surface imaging and force response studies
|
journal
|
April 2005 |
Ultrahigh-density atomic force microscopy data storage with erase capability
|
journal
|
March 1999 |
Surface micromachining for microelectromechanical systems
|
journal
|
January 1998 |
Piezoelectric cantilever array for multiprobe scanning force microscopy
|
conference
|
January 1996 |
Parallel frequency readout of an array of mass-sensitive transducers for sensor applications
|
journal
|
June 2000 |
On the modes and loss mechanisms of a high Q mechanical oscillator
|
journal
|
March 2001 |
Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators
|
journal
|
December 1995 |
Temperature dependence of elastic, dielectric, and piezoelectric properties of “single crystalline’’ films of vinylidene fluoride trifluoroethylene copolymer
|
journal
|
March 1997 |
Fabrication and characterization of a micromechanical sensor for differential detection of nanoscale motions
|
journal
|
December 2002 |
Dual integrated actuators for extended range high speed atomic force microscopy
|
journal
|
September 1999 |
Characterization of application-specific probes for SPMs
|
conference
|
April 1997 |
Temperature dependence of the piezoelectric response in lead zirconate titanate films
|
journal
|
February 2004 |
Quality factors in micron- and submicron-thick cantilevers
|
journal
|
March 2000 |
Micromachined inertial sensors
|
journal
|
January 1998 |
Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection
|
journal
|
January 2001 |
Nanowatt chemical vapor detection with a self-sensing, piezoelectric microcantilever array
|
journal
|
October 2003 |
Application of fuzzy clustering and piezoelectric chemical sensor array for investigation on organic compounds
|
journal
|
October 1999 |
A femtojoule calorimeter using micromechanical sensors
|
journal
|
December 1994 |
Biosensor based on force microscope technology
|
journal
|
March 1996 |
A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout
|
journal
|
June 2001 |
Micromechanical thermogravimetry
|
journal
|
September 1998 |
Micromechanics: A toolbox for femtoscale science: “Towards a laboratory on a tip”
|
journal
|
February 1997 |
Nanostructured silicon for studying fundamental aspects of nanomechanics
|
journal
|
August 2002 |
Multiple-input microcantilever sensors
|
journal
|
February 2000 |
Piezoelectric chemical sensors (IUPAC Technical Report)
|
journal
|
January 2004 |
Suspended microchannel resonators for biomolecular detection
|
journal
|
September 2003 |
Detection and quantification of proteins using self-excited PZT-glass millimeter-sized cantilever
|
journal
|
October 2005 |
Resonance response of scanning force microscopy cantilevers
|
journal
|
August 1994 |
Adsorption‐induced surface stress and its effects on resonance frequency of microcantilevers
|
journal
|
April 1995 |
Determination of adsorption-induced variation in the spring constant of a microcantilever
|
journal
|
March 2002 |
Novel high vacuum scanning force microscope using a piezoelectric cantilever and the phase detection method
|
journal
|
July 1997 |
Frequency modulation detection high vacuum scanning force microscope with a self-oscillating piezoelectric cantilever
|
journal
|
September 1997 |
Single-crystal aluminum nitride nanomechanical resonators
|
journal
|
September 2001 |
Nanocantilever Signal Transduction by Electron Transfer
|
journal
|
July 2002 |
Fabrication and characterization of nanoresonating devices for mass detection
- Davis, Z. J.; Abadal, G.; Kuhn, O.
-
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 2
https://doi.org/10.1116/1.591247
|
journal
|
January 2000 |
Modeling and optimal design of piezoelectric cantilever microactuators
|
journal
|
January 1997 |
Enhanced functionality of cantilever based mass sensors using higher modes
|
journal
|
June 2005 |
Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems
|
journal
|
March 2004 |
Nanoelectromechanical systems
|
journal
|
June 2005 |
Signal-to-noise ratio of resonant microcantilever type chemical sensors as a function of resonant frequency and quality factor
|
journal
|
September 2004 |
Processing of novel SiC and group III-nitride based micro- and nanomechanical devices
|
journal
|
March 2005 |
Nanoscale, Phonon-Coupled Calorimetry with Sub-Attojoule/Kelvin Resolution
|
journal
|
October 2005 |
Feedback positioning cantilever using lead zirconate titanate thin film for force microscopy observation of micropattern
|
journal
|
January 1996 |
Hybrid Organic/Inorganic Copolymers with Strongly Hydrogen-Bond Acidic Properties for Acoustic Wave and Optical Sensors
|
journal
|
May 1997 |
Hydrogen Bond Acidic Polymers for Surface Acoustic Wave Vapor Sensors and Arrays
|
journal
|
March 1999 |
Frequency Encoding of Resonant Mass Sensors for Chemical Vapor Detection
|
journal
|
September 2003 |
Single virus particle mass detection using microresonators with nanoscale thickness
|
journal
|
March 2004 |
Design and Characterization of a Micromachined Piezoelectric Microphone
|
conference
|
November 2012 |
VHF, UHF and microwave frequency nanomechanical resonators
|
journal
|
January 2005 |
Self-sharpening tip integrated on micro cantilevers with self-exciting piezoelectric sensor for parallel atomic force microscopy
|
journal
|
April 1997 |
Development of a force sensor for atomic force microscopy using piezoelectric thin films
|
journal
|
October 1993 |
Force sensing microcantilever using sputtered zinc oxide thin film
|
journal
|
January 1994 |
Deflection detection and feedback actuation using a self‐excited piezoelectric Pb(Zr,Ti)O 3 microcantilever for dynamic scanning force microscopy
|
journal
|
September 1996 |
Self-excited force-sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy
|
journal
|
June 1996 |
Multicomponent analysis and prediction with a cantilever array based gas sensor
|
journal
|
August 2001 |
Optimization of temperature programmed sensing for gas identification using micro-hotplate sensors
|
journal
|
November 1998 |
Complementary Metal Oxide Semiconductor Cantilever Arrays on a Single Chip: Mass-Sensitive Detection of Volatile Organic Compounds
|
journal
|
July 2002 |
Nanomechanics from atomic resolution to molecular recognition based on atomic force microscopy technology
|
journal
|
September 2002 |
CMOS resonant beam gas sensing system with on-chip self excitation
- Lange, D.; Hagleitner, C.; Brand, O.
-
Technical Digest MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
https://doi.org/10.1109/MEMSYS.2001.906600
|
conference
|
January 2001 |
Cantilever transducers as a platform for chemical and biological sensors
|
journal
|
July 2004 |
Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application
|
journal
|
December 2003 |
Self-excited piezoelectric cantilever oscillators
|
journal
|
March 1996 |
Characterization of micromachined piezoelectric PZT force sensors for dynamic scanning force microscopy
|
journal
|
May 1997 |
Development of a piezoelectric self-excitation and self-detection mechanism in PZT microcantilevers for dynamic scanning force microscopy in liquid
|
journal
|
July 1997 |
Piezoelectric cantilever acoustic transducer
|
journal
|
September 1998 |
Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities
|
journal
|
January 1999 |
Electromechanical Behavior of PZT-Brass Unimorphs
|
journal
|
July 1999 |
Attogram detection using nanoelectromechanical oscillators
|
journal
|
April 2004 |
Self-oscillating tapping mode atomic force microscopy
|
journal
|
September 2003 |
Adsorption kinetics and mechanical properties of thiol-modified DNA-oligos on gold investigated by microcantilever sensors
|
journal
|
May 2002 |
Isothermal Measurements and Thermal Desorption of Organic Vapors Using SAW Devices
|
journal
|
March 1987 |
Manipulation and controlled amplification of Brownian motion of microcantilever sensors
|
journal
|
March 2001 |
Contact imaging in the atomic force microscope using a higher order flexural mode combined with a new sensor
|
journal
|
March 1996 |
Lead zirconate titanate cantilever for noncontact atomic force microscopy
|
journal
|
February 1999 |
Non-contact atomic force microscope with a PZT cantilever used for deflection sensing, direct oscillation and feedback actuation
|
journal
|
March 2002 |
Adsorption–desorption characteristics of explosive vapors investigated with microcantilevers
|
journal
|
October 2003 |
Gravimetric sensing of metallic deposits using an end-loaded microfabricated beam structure
|
journal
|
December 1998 |
A Behavioural Model of Resonant Cantilevers for Chemical Sensing
|
journal
|
August 2005 |
Dynamics of self-driven microcantilevers
|
journal
|
April 2002 |
Surface micromachined piezoelectric resonant beam filters
|
journal
|
July 2001 |
A microsensor for trinitrotoluene vapour
|
journal
|
October 2003 |
Sensitive detection of plastic explosives with self-assembled monolayer-coated microcantilevers
|
journal
|
August 2003 |
Adsorption of Trinitrotoluene on Uncoated Silicon Microcantilever Surfaces
|
journal
|
March 2004 |
Detection of 2,4-dinitrotoluene using microcantilever sensors
|
journal
|
May 2004 |
Moore's law in homeland defense: an integrated sensor platform based on silicon microcantilevers
|
journal
|
August 2005 |
Processing and Characterization of Piezoelectric Materials and Integration into Microelectromechanical Systems
|
journal
|
August 1998 |
Integrated multisensor chip
|
journal
|
April 1986 |
Sensor based on piezoresistive microcantilever technology
|
journal
|
January 2001 |
Dynamic range of nanotube- and nanowire-based electromechanical systems
|
journal
|
May 2005 |
Demonstration of Thermomechanical Recording at 641 Gbit/in<tex>$^2$</tex>
|
journal
|
July 2004 |
Mercury vapor detection with a self-sensing, resonating piezoelectric cantilever
|
journal
|
November 2003 |
Improving tapping mode atomic force microscopy with piezoelectric cantilevers
|
journal
|
August 2004 |
Temperature and pressure dependence of resonance in multi-layer microcantilevers
|
journal
|
June 2005 |
Microhotplate platforms for chemical sensor research
|
journal
|
June 2001 |
Enhanced mass sensing using torsional and lateral resonances in microcantilevers
|
journal
|
June 2004 |
Characterization of sputtered ZnO thin film as sensor and actuator for diamond AFM probe
|
journal
|
December 2002 |
Simultaneous liquid viscosity and density determination with piezoelectric unimorph cantilevers
|
journal
|
January 2001 |
Microcantilever resonance-based DNA detection with nanoparticle probes
|
journal
|
May 2003 |
Development of low temperature ultrahigh vacuum noncontact atomic force microscope with PZT cantilever
|
journal
|
April 2000 |
Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing
|
journal
|
March 1993 |
Chemical sensors and biosensors in liquid environment based on microcantilevers with amplified quality factor
|
journal
|
January 2001 |
Multichannel Quartz Crystal Microbalance
|
journal
|
September 1999 |
Thermal and ambient‐induced deflections of scanning force microscope cantilevers
|
journal
|
May 1994 |
Detection of mercury vapor using resonating microcantilevers
|
journal
|
March 1995 |
Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons
|
journal
|
August 2005 |
Theoretical analysis of the sensor effect of cantilever piezoelectric benders
|
journal
|
February 1999 |
Micro‐fabricated piezoelectric cantilever for atomic force microscopy
|
journal
|
November 1996 |
Frequency shifts of cantilevers vibrating in various media
|
journal
|
November 1996 |
Mechanical behavior of ultrathin microcantilever
|
journal
|
May 2000 |
In situ cell detection using piezoelectric lead zirconate titanate-stainless steel cantilevers
|
journal
|
January 2003 |
Effect of length, width, and mode on the mass detection sensitivity of piezoelectric unimorph cantilevers
|
journal
|
February 2002 |
Tuning forks as micromechanical mass sensitive sensors for bio- or liquid detection
|
journal
|
August 2003 |
Frequency-tuning for control of parametrically resonant mass sensors
|
journal
|
July 2005 |
Self-excited piezoelectric microcantilever for gas detection
|
journal
|
August 2003 |
CMOS single-chip multisensor gas detection system
- Hagleitner, C.; Lange, D.; Kerness, N.
-
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)
https://doi.org/10.1109/MEMSYS.2002.984248
|
conference
|
January 2002 |