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Cantilevered probe detector with piezoelectric element

Patent ·
OSTI ID:1083267

A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-00OR22725
Assignee:
Board of Regents of the Nevada System of Higher Education, on behalf of the University of Nevada (Reno, NV)
Patent Number(s):
8,434,160
Application Number:
13/539,604
OSTI ID:
1083267
Country of Publication:
United States
Language:
English

References (117)

Suspended microchannel resonators for biomolecular detection journal September 2003
Modeling and optimal design of piezoelectric cantilever microactuators journal January 1997
Self-oscillating tapping mode atomic force microscopy journal September 2003
Hybrid Organic/Inorganic Copolymers with Strongly Hydrogen-Bond Acidic Properties for Acoustic Wave and Optical Sensors journal May 1997
Thermal and ambient‐induced deflections of scanning force microscope cantilevers journal May 1994
Single virus particle mass detection using microresonators with nanoscale thickness journal March 2004
Complementary Metal Oxide Semiconductor Cantilever Arrays on a Single Chip:  Mass-Sensitive Detection of Volatile Organic Compounds journal July 2002
Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators journal December 1995
Frequency-tuning for control of parametrically resonant mass sensors journal July 2005
Improving tapping mode atomic force microscopy with piezoelectric cantilevers journal August 2004
Effect of length, width, and mode on the mass detection sensitivity of piezoelectric unimorph cantilevers journal February 2002
Adsorption of Trinitrotoluene on Uncoated Silicon Microcantilever Surfaces journal March 2004
Nanoscale, Phonon-Coupled Calorimetry with Sub-Attojoule/Kelvin Resolution journal October 2005
Moore's law in homeland defense: an integrated sensor platform based on silicon microcantilevers journal August 2005
Detection of 2,4-dinitrotoluene using microcantilever sensors journal May 2004
Development of a piezoelectric self-excitation and self-detection mechanism in PZT microcantilevers for dynamic scanning force microscopy in liquid journal July 1997
Detection of mercury vapor using resonating microcantilevers journal March 1995
Multichannel Quartz Crystal Microbalance journal September 1999
Surface micromachined piezoelectric resonant beam filters journal July 2001
Frequency Encoding of Resonant Mass Sensors for Chemical Vapor Detection journal September 2003
Nanostructured silicon for studying fundamental aspects of nanomechanics journal August 2002
Microcantilever resonance-based DNA detection with nanoparticle probes journal May 2003
Mechanical behavior of ultrathin microcantilever journal May 2000
Deflection detection and feedback actuation using a self‐excited piezoelectric Pb(Zr,Ti)O 3 microcantilever for dynamic scanning force microscopy journal September 1996
Characterization of sputtered ZnO thin film as sensor and actuator for diamond AFM probe journal December 2002
Multiple-input microcantilever sensors journal February 2000
Frequency shifts of cantilevers vibrating in various media journal November 1996
Theoretical analysis of the sensor effect of cantilever piezoelectric benders journal February 1999
Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities journal January 1999
Attogram detection using nanoelectromechanical oscillators journal April 2004
Dynamics of self-driven microcantilevers journal April 2002
Piezoelectric cantilever array for multiprobe scanning force microscopy conference January 1996
Characterization of application-specific probes for SPMs conference April 1997
Chemical sensors and biosensors in liquid environment based on microcantilevers with amplified quality factor journal January 2001
Demonstration of Thermomechanical Recording at 641 Gbit/in$^2$ journal July 2004
Feedback positioning cantilever using lead zirconate titanate thin film for force microscopy observation of micropattern journal January 1996
Novel high vacuum scanning force microscope using a piezoelectric cantilever and the phase detection method journal July 1997
Nanoelectromechanical systems journal June 2005
Piezoelectric chemical sensors (IUPAC Technical Report) journal January 2004
Surface micromachining for microelectromechanical systems journal January 1998
Quality factors in micron- and submicron-thick cantilevers journal March 2000
Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons journal August 2005
Parallel frequency readout of an array of mass-sensitive transducers for sensor applications journal June 2000
Micromechanical thermogravimetry journal September 1998
Micromachined inertial sensors journal January 1998
Integrated multisensor chip journal April 1986
Development of a force sensor for atomic force microscopy using piezoelectric thin films journal October 1993
Design and Characterization of a Micromachined Piezoelectric Microphone conference November 2012
A microsensor for trinitrotoluene vapour journal October 2003
Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing journal March 1993
Manipulation and controlled amplification of Brownian motion of microcantilever sensors journal March 2001
Processing and Characterization of Piezoelectric Materials and Integration into Microelectromechanical Systems journal August 1998
Development of low temperature ultrahigh vacuum noncontact atomic force microscope with PZT cantilever journal April 2000
CMOS single-chip multisensor gas detection system
  • Hagleitner, C.; Lange, D.; Kerness, N.
  • Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) https://doi.org/10.1109/MEMSYS.2002.984248
conference January 2002
Piezoelectric cantilever acoustic transducer journal September 1998
Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection journal January 2001
A femtojoule calorimeter using micromechanical sensors journal December 1994
Self-sharpening tip integrated on micro cantilevers with self-exciting piezoelectric sensor for parallel atomic force microscopy journal April 1997
Dual integrated actuators for extended range high speed atomic force microscopy journal September 1999
Nanowatt chemical vapor detection with a self-sensing, piezoelectric microcantilever array journal October 2003
Enhanced mass sensing using torsional and lateral resonances in microcantilevers journal June 2004
Nanomechanics from atomic resolution to molecular recognition based on atomic force microscopy technology journal September 2002
Application of fuzzy clustering and piezoelectric chemical sensor array for investigation on organic compounds journal October 1999
Non-contact atomic force microscope with a PZT cantilever used for deflection sensing, direct oscillation and feedback actuation journal March 2002
Tuning forks as micromechanical mass sensitive sensors for bio- or liquid detection journal August 2003
Single-crystal aluminum nitride nanomechanical resonators journal September 2001
VHF, UHF and microwave frequency nanomechanical resonators journal January 2005
Sensor based on piezoresistive microcantilever technology journal January 2001
Ultrahigh-density atomic force microscopy data storage with erase capability journal March 1999
Optimization of temperature programmed sensing for gas identification using micro-hotplate sensors journal November 1998
Detection and quantification of proteins using self-excited PZT-glass millimeter-sized cantilever journal October 2005
Temperature dependence of elastic, dielectric, and piezoelectric properties of “single crystalline’’ films of vinylidene fluoride trifluoroethylene copolymer journal March 1997
Nanocantilever Signal Transduction by Electron Transfer journal July 2002
Characterization of micromachined piezoelectric PZT force sensors for dynamic scanning force microscopy journal May 1997
Biosensor based on force microscope technology journal March 1996
Temperature dependence of the piezoelectric response in lead zirconate titanate films journal February 2004
Lead zirconate titanate cantilever for noncontact atomic force microscopy journal February 1999
Hydrogen Bond Acidic Polymers for Surface Acoustic Wave Vapor Sensors and Arrays journal March 1999
Enhanced functionality of cantilever based mass sensors using higher modes journal June 2005
Sensitive detection of plastic explosives with self-assembled monolayer-coated microcantilevers journal August 2003
Self-excited piezoelectric microcantilever for gas detection journal August 2003
Self-sensing tapping mode atomic force microscopy journal May 2005
Determination of adsorption-induced variation in the spring constant of a microcantilever journal March 2002
CMOS resonant beam gas sensing system with on-chip self excitation
  • Lange, D.; Hagleitner, C.; Brand, O.
  • Technical Digest MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) https://doi.org/10.1109/MEMSYS.2001.906600
conference January 2001
Gravimetric sensing of metallic deposits using an end-loaded microfabricated beam structure journal December 1998
A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout journal June 2001
CMOS monolithic mechatronic microsystem for surface imaging and force response studies journal April 2005
Dynamic range of nanotube- and nanowire-based electromechanical systems journal May 2005
Force sensing microcantilever using sputtered zinc oxide thin film journal January 1994
Microhotplate platforms for chemical sensor research journal June 2001
Taking atomic force microscope advances to the university classroom conference January 2001
Multicomponent analysis and prediction with a cantilever array based gas sensor journal August 2001
Signal-to-noise ratio of resonant microcantilever type chemical sensors as a function of resonant frequency and quality factor journal September 2004
Self-excited force-sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy journal June 1996
Electromechanical Behavior of PZT-Brass Unimorphs journal July 1999
Fabrication and characterization of a micromechanical sensor for differential detection of nanoscale motions journal December 2002
Piezoresistive Signal Down Mixing for Parallel Detection of Si-Based Microcantilevers Resonant Frequencies conference January 2005
A Behavioural Model of Resonant Cantilevers for Chemical Sensing journal August 2005
Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems journal March 2004
In situ cell detection using piezoelectric lead zirconate titanate-stainless steel cantilevers journal January 2003
Contact imaging in the atomic force microscope using a higher order flexural mode combined with a new sensor journal March 1996
Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application journal December 2003
Adsorption–desorption characteristics of explosive vapors investigated with microcantilevers journal October 2003
Simultaneous liquid viscosity and density determination with piezoelectric unimorph cantilevers journal January 2001
Micromechanics: A toolbox for femtoscale science: “Towards a laboratory on a tip” journal February 1997
Frequency modulation detection high vacuum scanning force microscope with a self-oscillating piezoelectric cantilever journal September 1997
Self-excited piezoelectric cantilever oscillators journal March 1996
Temperature and pressure dependence of resonance in multi-layer microcantilevers journal June 2005
Mercury vapor detection with a self-sensing, resonating piezoelectric cantilever journal November 2003
Fabrication and characterization of nanoresonating devices for mass detection
  • Davis, Z. J.; Abadal, G.; Kuhn, O.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 2 https://doi.org/10.1116/1.591247
journal January 2000
Adsorption‐induced surface stress and its effects on resonance frequency of microcantilevers journal April 1995
On the modes and loss mechanisms of a high Q mechanical oscillator journal March 2001
Processing of novel SiC and group III-nitride based micro- and nanomechanical devices journal March 2005
Adsorption kinetics and mechanical properties of thiol-modified DNA-oligos on gold investigated by microcantilever sensors journal May 2002
Cantilever transducers as a platform for chemical and biological sensors journal July 2004
Isothermal Measurements and Thermal Desorption of Organic Vapors Using SAW Devices journal March 1987
Resonance response of scanning force microscopy cantilevers journal August 1994

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