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Self-oscillating tapping mode atomic force microscopy
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Hybrid Organic/Inorganic Copolymers with Strongly Hydrogen-Bond Acidic Properties for Acoustic Wave and Optical Sensors
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Thermal and ambient‐induced deflections of scanning force microscope cantilevers
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Adsorption of Trinitrotoluene on Uncoated Silicon Microcantilever Surfaces
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March 2004
Nanoscale, Phonon-Coupled Calorimetry with Sub-Attojoule/Kelvin Resolution
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July 1997
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March 1995
Multichannel Quartz Crystal Microbalance
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Surface micromachined piezoelectric resonant beam filters
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Frequency Encoding of Resonant Mass Sensors for Chemical Vapor Detection
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Nanostructured silicon for studying fundamental aspects of nanomechanics
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Microcantilever resonance-based DNA detection with nanoparticle probes
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May 2003
Mechanical behavior of ultrathin microcantilever
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May 2000
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September 1996
Characterization of sputtered ZnO thin film as sensor and actuator for diamond AFM probe
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Multiple-input microcantilever sensors
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February 2000
Frequency shifts of cantilevers vibrating in various media
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November 1996
Theoretical analysis of the sensor effect of cantilever piezoelectric benders
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Attogram detection using nanoelectromechanical oscillators
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April 2004
Dynamics of self-driven microcantilevers
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April 2002
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conference
January 1996
Characterization of application-specific probes for SPMs
conference
April 1997
Chemical sensors and biosensors in liquid environment based on microcantilevers with amplified quality factor
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January 2001
Demonstration of Thermomechanical Recording at 641 Gbit/in$^2$
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July 2004
Feedback positioning cantilever using lead zirconate titanate thin film for force microscopy observation of micropattern
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January 1996
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Nanoelectromechanical systems
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Piezoelectric chemical sensors (IUPAC Technical Report)
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Surface micromachining for microelectromechanical systems
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Quality factors in micron- and submicron-thick cantilevers
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March 2000
Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons
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August 2005
Parallel frequency readout of an array of mass-sensitive transducers for sensor applications
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June 2000
Micromechanical thermogravimetry
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September 1998
Micromachined inertial sensors
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January 1998
Integrated multisensor chip
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April 1986
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October 1993
Design and Characterization of a Micromachined Piezoelectric Microphone
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November 2012
A microsensor for trinitrotoluene vapour
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October 2003
Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing
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March 1993
Manipulation and controlled amplification of Brownian motion of microcantilever sensors
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Processing and Characterization of Piezoelectric Materials and Integration into Microelectromechanical Systems
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August 1998
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CMOS single-chip multisensor gas detection system
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Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)
https://doi.org/10.1109/MEMSYS.2002.984248
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January 2002
Piezoelectric cantilever acoustic transducer
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September 1998
Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection
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January 2001
A femtojoule calorimeter using micromechanical sensors
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December 1994
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April 1997
Dual integrated actuators for extended range high speed atomic force microscopy
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September 1999
Nanowatt chemical vapor detection with a self-sensing, piezoelectric microcantilever array
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Enhanced mass sensing using torsional and lateral resonances in microcantilevers
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June 2004
Nanomechanics from atomic resolution to molecular recognition based on atomic force microscopy technology
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Application of fuzzy clustering and piezoelectric chemical sensor array for investigation on organic compounds
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Non-contact atomic force microscope with a PZT cantilever used for deflection sensing, direct oscillation and feedback actuation
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March 2002
Tuning forks as micromechanical mass sensitive sensors for bio- or liquid detection
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Single-crystal aluminum nitride nanomechanical resonators
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VHF, UHF and microwave frequency nanomechanical resonators
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January 2001
Ultrahigh-density atomic force microscopy data storage with erase capability
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Optimization of temperature programmed sensing for gas identification using micro-hotplate sensors
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Detection and quantification of proteins using self-excited PZT-glass millimeter-sized cantilever
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Temperature dependence of elastic, dielectric, and piezoelectric properties of “single crystalline’’ films of vinylidene fluoride trifluoroethylene copolymer
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Nanocantilever Signal Transduction by Electron Transfer
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May 1997
Biosensor based on force microscope technology
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March 1996
Temperature dependence of the piezoelectric response in lead zirconate titanate films
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February 2004
Lead zirconate titanate cantilever for noncontact atomic force microscopy
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February 1999
Hydrogen Bond Acidic Polymers for Surface Acoustic Wave Vapor Sensors and Arrays
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March 1999
Enhanced functionality of cantilever based mass sensors using higher modes
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June 2005
Sensitive detection of plastic explosives with self-assembled monolayer-coated microcantilevers
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Self-excited piezoelectric microcantilever for gas detection
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Self-sensing tapping mode atomic force microscopy
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CMOS resonant beam gas sensing system with on-chip self excitation
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https://doi.org/10.1109/MEMSYS.2001.906600
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January 2001
Gravimetric sensing of metallic deposits using an end-loaded microfabricated beam structure
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June 2001
CMOS monolithic mechatronic microsystem for surface imaging and force response studies
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April 2005
Dynamic range of nanotube- and nanowire-based electromechanical systems
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May 2005
Force sensing microcantilever using sputtered zinc oxide thin film
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January 1994
Microhotplate platforms for chemical sensor research
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June 2001
Taking atomic force microscope advances to the university classroom
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January 2001
Multicomponent analysis and prediction with a cantilever array based gas sensor
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August 2001
Signal-to-noise ratio of resonant microcantilever type chemical sensors as a function of resonant frequency and quality factor
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September 2004
Self-excited force-sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy
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June 1996
Electromechanical Behavior of PZT-Brass Unimorphs
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July 1999
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Piezoresistive Signal Down Mixing for Parallel Detection of Si-Based Microcantilevers Resonant Frequencies
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January 2005
A Behavioural Model of Resonant Cantilevers for Chemical Sensing
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August 2005
Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems
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March 2004
In situ cell detection using piezoelectric lead zirconate titanate-stainless steel cantilevers
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January 2003
Contact imaging in the atomic force microscope using a higher order flexural mode combined with a new sensor
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March 1996
Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application
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Adsorption–desorption characteristics of explosive vapors investigated with microcantilevers
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October 2003
Simultaneous liquid viscosity and density determination with piezoelectric unimorph cantilevers
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January 2001
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February 1997
Frequency modulation detection high vacuum scanning force microscope with a self-oscillating piezoelectric cantilever
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Self-excited piezoelectric cantilever oscillators
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Mercury vapor detection with a self-sensing, resonating piezoelectric cantilever
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 2
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Adsorption‐induced surface stress and its effects on resonance frequency of microcantilevers
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On the modes and loss mechanisms of a high Q mechanical oscillator
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March 2001
Processing of novel SiC and group III-nitride based micro- and nanomechanical devices
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Adsorption kinetics and mechanical properties of thiol-modified DNA-oligos on gold investigated by microcantilever sensors
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Cantilever transducers as a platform for chemical and biological sensors
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Isothermal Measurements and Thermal Desorption of Organic Vapors Using SAW Devices
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Resonance response of scanning force microscopy cantilevers
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