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Title: Method for fabricating a microelectromechanical resonator

Patent ·
OSTI ID:1083225
;

A method is disclosed which calculates dimensions for a MEM resonator in terms of integer multiples of a grid width G for reticles used to fabricate the resonator, including an actual sub-width L.sub.a=NG and an effective electrode width W.sub.e=MG where N and M are integers which minimize a frequency error f.sub.e=f.sub.d-f.sub.a between a desired resonant frequency f.sub.d and an actual resonant frequency f.sub.a. The method can also be used to calculate an overall width W.sub.o for the MEM resonator, and an effective electrode length L.sub.e which provides a desired motional impedance for the MEM resonator. The MEM resonator can then be fabricated using these values for L.sub.a, W.sub.e, W.sub.o and L.sub.e. The method can also be applied to a number j of MEM resonators formed on a common substrate.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
8,367,305
Application Number:
12/884,237
OSTI ID:
1083225
Country of Publication:
United States
Language:
English

References (13)

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  • Olsson, Roy H.; Fleming, James G.; Wojciechowski, Kenneth E.
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conference May 2007

Cited By (2)

Method for fabricating a microelectromechanical resonator patent February 2013
Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus patent January 2004

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