Nucleation and growth mechanisms in ion-plated TiN films on steel substrates
Cross-sectional transmission electron microscopy (XTEM) was used to investigate the nucleation and growth characteristics of TiN films, ion plated on tool and stainless steel substrates with and without an {alpha}-Ti underlayer ({approx}100 nm thick). It was found that (1) at lower deposition temperatures, the underlayer {alpha}-Ti remains unchanged and exhibits a layer + island growth mode; (2) at higher deposition temperatures, the underlayer may transform into a TiC phase on M50 steel and into a {delta}{prime}-TiN phase on 316L stainless steel; (3) the growth behavior of TiN films was controlled primarily by the reaction thermodynamics and diffusion kinetics of Ti and N adatoms. Based on microscopic evidence together with the kinetic and thermodynamic considerations a mechanistic model is presented to describe the nucleation and growth mechanisms of ion-plated TiN films under the deposition conditions explored in this study. 20 refs., 4 figs.
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- DOE/ER
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 5650903
- Report Number(s):
- CONF-890468-13; ON: DE90002269
- Resource Relation:
- Journal Volume: 41; Journal Issue: 3; Conference: 16. international conference on metallurgical coatings and equipment exhibit, San Diego, CA (USA), 17-21 Apr 1989
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
STAINLESS STEEL-440
DEPOSITION
STEELS
TITANIUM NITRIDES
NUCLEATION
DIFFUSION
MICROSTRUCTURE
SUBSTRATES
THIN FILMS
TITANIUM CARBIDES
TRANSMISSION ELECTRON MICROSCOPY
ALLOYS
CARBIDES
CARBON COMPOUNDS
CHROMIUM ALLOYS
CHROMIUM STEELS
CORROSION RESISTANT ALLOYS
CRYSTAL STRUCTURE
ELECTRON MICROSCOPY
FILMS
HEAT RESISTANT MATERIALS
HEAT RESISTING ALLOYS
HIGH ALLOY STEELS
IRON ALLOYS
IRON BASE ALLOYS
MARTENSITIC STEELS
MATERIALS
MICROSCOPY
MOLYBDENU
MOLYBDENUM ADDITIONS
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
STAINLESS STEELS
STEEL-CR17MO
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
360202* - Ceramics
Cermets
& Refractories- Structure & Phase Studies
360201 - Ceramics
Cermets
& Refractories- Preparation & Fabrication