Effect of post-deposition annealing on structure and chemistry of the TiN film/steel substrate interfaces

Journal Article · Wed May 01 04:00:00 EDT 1991 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.577429· OSTI ID:5623826

Erdemir, A ^[1]; Cheng, C C ^[2]

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1. Materials and Components Technology Division, Argonne National Laboratory, Argonne, Illinois 60439 (USA)
2. Inland Steel Company, East Chicago, Indiana 46213 (USA)

This study deals with solid-state phase transformations occurring at interfaces between a TiN film and an AISI M50 steel substrate during postdeposition annealing at 500 and 1000 {degree}C. Cross-sectional transmission electron microscopy (XTEM) was used to investigate the nature of phase transformations at these interfaces. The TiN films were ion plated onto M50 steel with an initial Ti underlayer at 100 {degree}C. XTEM and electron energy loss spectroscopy of the interfaces indicated that the ion-plated Ti underlayers transformed into a TiC phase during annealing at 500 {degree}C and into a Ti(C,N) phase during annealing at 1000 {degree}C. In addition, the density of defects within grains was significantly reduced during annealing and the grains themselves became larger.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 5623826
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 9:3; ISSN JVTAD; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360102 -- Metals & Alloys-- Structure & Phase Studies
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ALLOYS
ANNEALING
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
ELECTRON MICROSCOPY
FILMS
HEAT TREATMENTS
HIGH TEMPERATURE
INTERFACES
IRON ALLOYS
IRON BASE ALLOYS
MICROSCOPY
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
STEELS
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TRANSITION ELEMENT COMPOUNDS
TRANSMISSION ELECTRON MICROSCOPY
VERY HIGH TEMPERATURE