Characterization of ceramic films and interfaces by electron microscopic and spectroscopic techniques

Conference · Fri Jan 01 04:00:00 EST 1988

OSTI ID:6911026

Erdemir, A; Cheng, C C

In this study, Auger electron spectroscopy (AES) in combination with inert gas ion milling and cross-sectional transmission electron microscopy (XTEM) were employed to investigate the chemical and microstructural characteristics of a TiN film on a M50 steel and the film-substrate interfaces formed during ion plating at 100 C and 500 C deposition temperatures. The results of both analytical techniques indicated that the coating produced at 100 C was composed of a thin Ti layer (approximately 1000 A) and a thick TiN layer. Upon vacuum annealing at 500 C for 45 minutes, it was found that the Ti rich interlayer was transformed into a TiC phase. The coating produced at 500 C consisted of a thin TiC and a relatively thick TiN layers. Ion plating as well as post vacuum annealing at 500 C resulted in grain growth and reduced defect density. 11 refs., 8 figs.

• Research Organization: Argonne National Lab., IL (USA)
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 6911026
• Report Number(s): CONF-8805152-1; ON: DE88011957
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ALLOYS
ANNEALING
AUGER ELECTRON SPECTROSCOPY
CARBIDES
CARBON COMPOUNDS
CERAMICS
CRYSTAL STRUCTURE
DEPOSITION
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
FILMS
GRAIN GROWTH
GRAIN SIZE
HEAT TREATMENTS
INTERFACES
IRON ALLOYS
IRON BASE ALLOYS
LAYERS
MEDIUM TEMPERATURE
MICROSCOPY
MICROSTRUCTURE
NITRIDES
NITROGEN COMPOUNDS
PHASE TRANSFORMATIONS
PLATING
PNICTIDES
SIZE
SPECTROSCOPY
STEELS
SURFACE COATING
TITANIUM CARBIDES
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TRANSITION ELEMENT COMPOUNDS
TRANSMISSION ELECTRON MICROSCOPY