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Title: Multilayer diffraction grating

This invention is for a reflection diffraction grating that functions at x-ray to VUV wavelengths and at normal angles of incidence. The novel grating is comprised of a laminar grating of period D with flat-topped grating bars. A multiplicity of layered synthetic microstructures, of period d and comprised of alternating flat layers of two different materials, are disposed on the tops of the grating bars of the laminar grating. In another embodiment of the grating, a second multiplicity of layered synthetic microstructures are also disposed on the flat faces, of the base of the grating, between the bars. D is in the approximate range from 3000 to 50,000 Angstroms, but d is in the approximate range from 10 to 400 Angstroms. The laminar grating and the layered microstructures cooperatively interact to provide many novel and beneficial instrumentational advantages. 2 figs.
Authors:
Publication Date:
OSTI Identifier:
5482154
Report Number(s):
PATENTS-US-A7259564
ON: DE91016976; PPN: US 7-259564
DOE Contract Number:
W-7405-ENG-48
Resource Type:
Patent Application
Research Org:
Lawrence Livermore National Lab., CA (United States)
Sponsoring Org:
DOE; USDOE, Washington, DC (United States)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 47 OTHER INSTRUMENTATION; DIFFRACTION GRATINGS; DESIGN; CARBON; DEPOSITION; FAR ULTRAVIOLET RADIATION; INVENTIONS; LAYERS; MOLYBDENUM; MOLYBDENUM SILICIDES; OPTICAL REFLECTION; RESOLUTION; RHODIUM; SILICON; STAINLESS STEELS; TUNGSTEN; TUNGSTEN CARBIDES; X RADIATION; ALLOYS; CARBIDES; CARBON COMPOUNDS; ELECTROMAGNETIC RADIATION; ELEMENTS; GRATINGS; HIGH ALLOY STEELS; IONIZING RADIATIONS; IRON ALLOYS; IRON BASE ALLOYS; METALS; MOLYBDENUM COMPOUNDS; NONMETALS; PLATINUM METALS; RADIATIONS; REFLECTION; REFRACTORY METAL COMPOUNDS; SEMIMETALS; SILICIDES; SILICON COMPOUNDS; STEELS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS; TUNGSTEN COMPOUNDS; ULTRAVIOLET RADIATION 360101* -- Metals & Alloys-- Preparation & Fabrication; 440600 -- Optical Instrumentation-- (1990-); 360601 -- Other Materials-- Preparation & Manufacture; 360104 -- Metals & Alloys-- Physical Properties; 360603 -- Materials-- Properties