Multilayer diffraction grating
This invention is for a reflection diffraction grating that functions at x-ray to VUV wavelengths and at normal angles of incidence. The novel grating is comprised of a laminar grating of period D with flat-topped grating bars. A multiplicity of layered synthetic microstructures, of period d and comprised of alternating flat layers of two different materials, are disposed on the tops of the grating bars of the laminar grating. In another embodiment of the grating, a second multiplicity of layered synthetic microstructures are also disposed on the flat faces, of the base of the grating, between the bars. D is in the approximate range from 3000 to 50,000 Angstroms, but d is in the approximate range from 10 to 400 Angstroms. The laminar grating and the layered microstructures cooperatively interact to provide many novel and beneficial instrumentational advantages. 2 figs.
- Research Organization:
- Lawrence Livermore National Lab., CA (United States)
- Sponsoring Organization:
- USDOE; USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Dept. of Energy
- Patent Number(s):
- PATENTS-US-A7259564
- Application Number:
- ON: DE91016976; PPN: US 7-259564
- OSTI ID:
- 5482154
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
47 OTHER INSTRUMENTATION
DIFFRACTION GRATINGS
DESIGN
CARBON
DEPOSITION
FAR ULTRAVIOLET RADIATION
INVENTIONS
LAYERS
MOLYBDENUM
MOLYBDENUM SILICIDES
OPTICAL REFLECTION
RESOLUTION
RHODIUM
SILICON
STAINLESS STEELS
TUNGSTEN
TUNGSTEN CARBIDES
X RADIATION
ALLOYS
CARBIDES
CARBON COMPOUNDS
ELECTROMAGNETIC RADIATION
ELEMENTS
GRATINGS
HIGH ALLOY STEELS
IONIZING RADIATIONS
IRON ALLOYS
IRON BASE ALLOYS
METALS
MOLYBDENUM COMPOUNDS
NONMETALS
PLATINUM METALS
RADIATIONS
REFLECTION
REFRACTORY METAL COMPOUNDS
SEMIMETALS
SILICIDES
SILICON COMPOUNDS
STEELS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TUNGSTEN COMPOUNDS
ULTRAVIOLET RADIATION
360101* - Metals & Alloys- Preparation & Fabrication
440600 - Optical Instrumentation- (1990-)
360601 - Other Materials- Preparation & Manufacture
360104 - Metals & Alloys- Physical Properties
360603 - Materials- Properties