skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Multilayer diffraction grating

Abstract

This invention is for a reflection diffraction grating that functions at X-ray to VUV wavelengths and at normal angles of incidence. The novel grating is comprised of a laminar grating of period D with flat-topped grating bars. A multiplicity of layered synthetic microstructures, of period d and comprised of alternating flat layers of two different materials, are disposed on the tops of the grating bars of the laminar grating. In another embodiment of the grating, a second multiplicity of layered synthetic microstructures are also disposed on the flat faces, of the base of the grating, between the bars. D is in the approximate range from 3,000 to 50,000 Angstroms, but d is in the approximate range from 10 to 400 Angstroms. The laminar grating and the layered microstructures cooperatively interact to provide many novel and beneficial instrumentational advantages.

Inventors:
 [1]
  1. (Palo Alto, CA)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
867329
Patent Number(s):
US 4915463
Assignee:
United States of America as represented by Department of Energy (Washington, DC) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
multilayer; diffraction; grating; reflection; functions; x-ray; vuv; wavelengths; normal; angles; incidence; novel; comprised; laminar; period; flat-topped; bars; multiplicity; layered; synthetic; microstructures; alternating; flat; layers; materials; disposed; tops; embodiment; base; approximate; range; 000; 50; angstroms; 10; 400; cooperatively; interact; provide; beneficial; instrumentational; advantages; approximate range; diffraction grating; reflection diffraction; /359/

Citation Formats

Barbee, Jr., Troy W.. Multilayer diffraction grating. United States: N. p., 1990. Web.
Barbee, Jr., Troy W.. Multilayer diffraction grating. United States.
Barbee, Jr., Troy W.. Mon . "Multilayer diffraction grating". United States. https://www.osti.gov/servlets/purl/867329.
@article{osti_867329,
title = {Multilayer diffraction grating},
author = {Barbee, Jr., Troy W.},
abstractNote = {This invention is for a reflection diffraction grating that functions at X-ray to VUV wavelengths and at normal angles of incidence. The novel grating is comprised of a laminar grating of period D with flat-topped grating bars. A multiplicity of layered synthetic microstructures, of period d and comprised of alternating flat layers of two different materials, are disposed on the tops of the grating bars of the laminar grating. In another embodiment of the grating, a second multiplicity of layered synthetic microstructures are also disposed on the flat faces, of the base of the grating, between the bars. D is in the approximate range from 3,000 to 50,000 Angstroms, but d is in the approximate range from 10 to 400 Angstroms. The laminar grating and the layered microstructures cooperatively interact to provide many novel and beneficial instrumentational advantages.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 1990},
month = {Mon Jan 01 00:00:00 EST 1990}
}

Patent:

Save / Share: