skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Multilayer diffraction grating

Abstract

This invention is for a reflection diffraction grating that functions at X-ray to VUV wavelengths and at normal angles of incidence. The novel grating is comprised of a laminar grating of period D with flat-topped grating bars. A multiplicity of layered synthetic microstructures, of period d and comprised of alternating flat layers of two different materials, are disposed on the tops of the grating bars of the laminar grating. In another embodiment of the grating, a second multiplicity of layered synthetic microstructures are also disposed on the flat faces, of the base of the grating, between the bars. D is in the approximate range from 3,000 to 50,000 Angstroms, but d is in the approximate range from 10 to 400 Angstroms. The laminar grating and the layered microstructures cooperatively interact to provide many novel and beneficial instrumentational advantages. 2 figs.

Inventors:
Publication Date:
OSTI Identifier:
7266486
Patent Number(s):
US 4915463; A
Application Number:
PPN: US 7-259564
Assignee:
Dept. of Energy, Washington, DC (United States) PTO; EDB-94-118184
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Patent File Date: 18 Oct 1988
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; DIFFRACTION GRATINGS; DESIGN; MEASURING INSTRUMENTS; FAR ULTRAVIOLET RADIATION; LAYERS; X RADIATION; ELECTROMAGNETIC RADIATION; GRATINGS; IONIZING RADIATIONS; RADIATIONS; ULTRAVIOLET RADIATION; 440000* - Instrumentation

Citation Formats

Barbee, T.W. Jr. Multilayer diffraction grating. United States: N. p., 1990. Web.
Barbee, T.W. Jr. Multilayer diffraction grating. United States.
Barbee, T.W. Jr. Tue . "Multilayer diffraction grating". United States.
@article{osti_7266486,
title = {Multilayer diffraction grating},
author = {Barbee, T.W. Jr.},
abstractNote = {This invention is for a reflection diffraction grating that functions at X-ray to VUV wavelengths and at normal angles of incidence. The novel grating is comprised of a laminar grating of period D with flat-topped grating bars. A multiplicity of layered synthetic microstructures, of period d and comprised of alternating flat layers of two different materials, are disposed on the tops of the grating bars of the laminar grating. In another embodiment of the grating, a second multiplicity of layered synthetic microstructures are also disposed on the flat faces, of the base of the grating, between the bars. D is in the approximate range from 3,000 to 50,000 Angstroms, but d is in the approximate range from 10 to 400 Angstroms. The laminar grating and the layered microstructures cooperatively interact to provide many novel and beneficial instrumentational advantages. 2 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 10 00:00:00 EDT 1990},
month = {Tue Apr 10 00:00:00 EDT 1990}
}