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Title: Unitary lens semiconductor device

A unitary lens semiconductor device and method are disclosed. The unitary lens semiconductor device is provided with at least one semiconductor layer having a composition varying in the growth direction for unitarily forming one or more lenses in the semiconductor layer. Unitary lens semiconductor devices may be formed as light-processing devices such as microlenses, and as light-active devices such as light-emitting diodes, photodetectors, resonant-cavity light-emitting diodes, vertical-cavity surface-emitting lasers, and resonant cavity photodetectors. 9 figs.
Authors:
Publication Date:
OSTI Identifier:
489103
Report Number(s):
US 5,633,527/A/
PAN: US patent application 8-384,089
DOE Contract Number:
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 27 May 1997
Research Org:
Sandia Corporation
Sponsoring Org:
USDOE, Washington, DC (United States)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; SEMICONDUCTOR DEVICES; LAYERS; DESIGN; SEMICONDUCTOR LASERS; LIGHT EMITTING DIODES; PHOTODETECTORS; SEMICONDUCTOR MATERIALS