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Title: A new apparatus for electron tomography in the scanning electron microscope

The three-dimensional reconstruction of a microscopic specimen has been obtained by applying the tomographic algorithm to a set of images acquired in a Scanning Electron Microscope. This result was achieved starting from a series of projections obtained by stepwise rotating the sample under the beam raster. The Scanning Electron Microscope was operated in the scanning-transmission imaging mode, where the intensity of the transmitted electron beam is a monotonic function of the local mass-density and thickness of the specimen. The detection strategy has been implemented and tailored in order to maintain the projection requirement over the large tilt range, as required by the tomographic workflow. A Si-based electron detector and an eucentric-rotation specimen holder have been specifically developed for the purpose.
Authors:
; ; ; ; ;  [1] ; ; ;  [2] ; ;  [3] ;  [4] ;  [5]
  1. CNR-IMM Sezione di Bologna, via Gobetti 101, 40129 Bologna (Italy)
  2. ASSING S.P.A., via E. Amaldi 14, 00016 Monterotondo (Rome) (Italy)
  3. Dip.to di Scienze di Base e Applicate per l’Ingegneria and Centro di Ricerca per le Nanotecnologie Applicate all’Ingegneria (CNIS), Università degli Studi di Roma “Sapienza”, Via A. Scarpa, 00161 Rome (Italy)
  4. SENSOR Lab, Dip.to di Ingegneria dell’Informazione, Università degli Studi di Brescia and CNR-INO, Via Valotti 9, 25123 Brescia (Italy)
  5. Unità Tecnica Tecnologie dei Materiali, ENEA Centro Ricerche Casaccia, Via Anguillarese 301, 00123 S. Maria di Galeria (Rome) (Italy)
Publication Date:
OSTI Identifier:
22490685
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1667; Journal Issue: 1; Conference: Nanoforum 2014, Rome (Italy), 22-25 Sep 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALGORITHMS; BIOMEDICAL RADIOGRAPHY; DENSITY; DETECTION; ELECTRON BEAMS; ELECTRON DETECTION; ELECTRONS; EQUIPMENT; IMAGES; ROTATION; SAMPLE HOLDERS; SCANNING ELECTRON MICROSCOPY; SILICON; THREE-DIMENSIONAL LATTICES; TOMOGRAPHY; TRANSMISSION