Probing Light Atoms at Subnanometer Resolution: Realization of Scanning Transmission Electron Microscope Holography

Yasin, Fehmi S.; Harvey, Tyler R.; Chess, Jordan J.; Pierce, Jordan S.; Ophus, Colin; Ercius, Peter; McMorran, Benjamin J.

doi:10.1021/acs.nanolett.8b03166

Title: Probing Light Atoms at Subnanometer Resolution: Realization of Scanning Transmission Electron Microscope Holography

Journal Article · Fri Sep 28 00:00:00 EDT 2018 · Nano Letters

DOI:https://doi.org/10.1021/acs.nanolett.8b03166· OSTI ID:1510749

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^[2]; Chess, Jordan J. ^[1]; Pierce, Jordan S. ^[1]; Ophus, Colin ^[3]; Ercius, Peter ^[3];

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Univ. of Oregon, Eugene, OR (United States)
Univ. of Oregon, Eugene, OR (United States); Georg-August-Univ. Gottingen, Gottingen (Germany)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Atomic resolution imaging of light elements in electron-transparent materials has long been a challenge. Biomolecular materials, for example, are rapidly altered by incident electrons. We demonstrate a scanning transmission electron microscopy (STEM) technique, called STEM holography, capable of efficient structural analysis of beam-sensitive nanomaterials. STEM holography measures the absolute phase and amplitude of electrons passed through a specimen via interference with a vacuum reference wave. We use an amplitude-dividing nanofabricated grating to prepare multiple beams focused at the sample. We configure the postspecimen microscope imaging system to overlap the beams, forming an interference pattern. We record and analyze the pattern at each 2D-raster-scan-position, reconstructing the complex object wave. As a demonstration, we image gold nanoparticles on an amorphous carbon substrate at 2.4 Å resolution. In conclusion STEM holography offers higher contrast of the carbon while maintaining gold atomic lattice resolution compared to high angle annular dark field STEM.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1510749

Journal Information:: Nano Letters, Vol. 18, Issue 11; ISSN 1530-6984

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 15 works

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References (42)

Highly efficient electron vortex beams generated by nanofabricated phase holograms Grillo, Vincenzo; Carlo Gazzadi, Gian; Karimi, Ebrahim Applied Physics Letters, Vol. 104, Issue 4 https://doi.org/10.1063/1.4863564	journal	January 2014
Electron Interferometer Marton, L. Physical Review, Vol. 85, Issue 6 https://doi.org/10.1103/PhysRev.85.1057	journal	March 1952
The Formation of the Diffraction Image with Electrons in the Gabor Diffraction Microscope Haine, M. E.; Mulvey, T. Journal of the Optical Society of America, Vol. 42, Issue 10 https://doi.org/10.1364/JOSA.42.000763	journal	January 1952
Sculpturing the electron wave function using nanoscale phase masks Shiloh, Roy; Lereah, Yossi; Lilach, Yigal Ultramicroscopy, Vol. 144 https://doi.org/10.1016/j.ultramic.2014.04.007	journal	September 2014
Path-separated electron interferometry in a scanning transmission electron microscope Yasin, Fehmi S.; Harvey, Tyler R.; Chess, Jordan J. Journal of Physics D: Applied Physics, Vol. 51, Issue 20 https://doi.org/10.1088/1361-6463/aabc47	journal	April 2018
A New Microscopic Principle Gabor, D. Nature, Vol. 161, Issue 4098 https://doi.org/10.1038/161777a0	journal	May 1948
Ultra-high resolution with off-axis STEM holography Cowley, J. M. Ultramicroscopy, Vol. 96, Issue 2 https://doi.org/10.1016/S0304-3991(03)00003-2	journal	August 2003
Observation of Magnetic Induction Distribution by Scanning Interference Electron Microscopy Takahashi, Yoshio; Yajima, Yusuke; Ichikawa, Masakazu Japanese Journal of Applied Physics, Vol. 33, Issue Part 2, No. 9B https://doi.org/10.1143/JJAP.33.L1352	journal	September 1994
Electron tomography and holography in materials science Midgley, Paul A.; Dunin-Borkowski, Rafal E. Nature Materials, Vol. 8, Issue 4 https://doi.org/10.1038/nmat2406	journal	April 2009
Experimental study of amplitude and phase detection limits in electron holography Harscher, Alex; Lichte, Hannes Ultramicroscopy, Vol. 64, Issue 1-4 https://doi.org/10.1016/0304-3991(96)00019-8	journal	August 1996
Differential phase contrast in TEM McCartney, M. R.; Kruit, P.; Buist, A. H. Ultramicroscopy, Vol. 65, Issue 3-4 https://doi.org/10.1016/S0304-3991(96)00068-X	journal	October 1996
Random vs realistic amorphous carbon models for high resolution microscopy and electron diffraction Ricolleau, C.; Le Bouar, Y.; Amara, H. Journal of Applied Physics, Vol. 114, Issue 21 https://doi.org/10.1063/1.4831669	journal	December 2013
Quantitative characterization of electron detectors for transmission electron microscopy Ruskin, Rachel S.; Yu, Zhiheng; Grigorieff, Nikolaus Journal of Structural Biology, Vol. 184, Issue 3 https://doi.org/10.1016/j.jsb.2013.10.016	journal	December 2013
Electron counting and beam-induced motion correction enable near-atomic-resolution single-particle cryo-EM Li, Xueming; Mooney, Paul; Zheng, Shawn Nature Methods, Vol. 10, Issue 6 https://doi.org/10.1038/nmeth.2472	journal	May 2013
Simultaneous atomic-resolution electron ptychography and Z-contrast imaging of light and heavy elements in complex nanostructures Yang, H.; Rutte, R. N.; Jones, L. Nature Communications, Vol. 7, Issue 1 https://doi.org/10.1038/ncomms12532	journal	August 2016
Evaluation of residual aberration in fifth-order geometrical aberration correctors Morishita, Shigeyuki; Kohno, Yuji; Hosokawa, Fumio Microscopy, Vol. 67, Issue 3 https://doi.org/10.1093/jmicro/dfy009	journal	February 2018
Electron holography available in a non-biprism transmission electron microscope Ru, Q.; Osakabe, N.; Endo, J. Ultramicroscopy, Vol. 53, Issue 1 https://doi.org/10.1016/0304-3991(94)90098-1	journal	January 1994
Cryo-scanning transmission electron tomography of biological cells Elbaum, Michael; Wolf, Sharon G.; Houben, Lothar MRS Bulletin, Vol. 41, Issue 07 https://doi.org/10.1557/mrs.2016.136	journal	July 2016
Efficient phase contrast imaging in STEM using a pixelated detector. Part 1: Experimental demonstration at atomic resolution Pennycook, Timothy J.; Lupini, Andrew R.; Yang, Hao Ultramicroscopy, Vol. 151, p. 160-167 https://doi.org/10.1016/j.ultramic.2014.09.013	journal	April 2015
Efficient linear phase contrast in scanning transmission electron microscopy with matched illumination and detector interferometry Ophus, Colin; Ciston, Jim; Pierce, Jordan Nature Communications, Vol. 7, Issue 1 https://doi.org/10.1038/ncomms10719	journal	February 2016
Split-illumination electron holography Tanigaki, Toshiaki; Inada, Yoshikatsu; Aizawa, Shinji Applied Physics Letters, Vol. 101, Issue 4 https://doi.org/10.1063/1.4737152	journal	July 2012
Amplitude division electron interferometry Matteucci, G.; Missiroli, G. F.; Pozzi, G. Ultramicroscopy, Vol. 6, Issue 2 https://doi.org/10.1016/0304-3991(81)90050-4	journal	January 1981
Detection limits in quantitative off-axis electron holography de Ruijter, W. J.; Weiss, J. K. Ultramicroscopy, Vol. 50, Issue 3 https://doi.org/10.1016/0304-3991(93)90196-5	journal	August 1993
Aberration corrected STEM by means of diffraction gratings Linck, Martin; Ercius, Peter A.; Pierce, Jordan S. Ultramicroscopy, Vol. 182 https://doi.org/10.1016/j.ultramic.2017.06.008	journal	November 2017
Spherical aberration correction in a scanning transmission electron microscope using a sculpted thin film Shiloh, Roy; Remez, Roei; Lu, Peng-Han Ultramicroscopy, Vol. 189 https://doi.org/10.1016/j.ultramic.2018.03.016	journal	June 2018
An Electron Interferometer Marton, L.; Simpson, J. Arol; Suddeth, J. A. Review of Scientific Instruments, Vol. 25, Issue 11 https://doi.org/10.1063/1.1770945	journal	November 1954
Efficient diffractive phase optics for electrons R. Harvey, Tyler; S. Pierce, Jordan; K. Agrawal, Amit New Journal of Physics, Vol. 16, Issue 9 https://doi.org/10.1088/1367-2630/16/9/093039	journal	September 2014
Low-dose cryo electron ptychography via non-convex Bayesian optimization Pelz, Philipp Michael; Qiu, Wen Xuan; Bücker, Robert Scientific Reports, Vol. 7, Issue 1 https://doi.org/10.1038/s41598-017-07488-y	journal	August 2017
STEM-holography using the electron biprism Leuthner, Th.; Lichte, H.; Herrmann, K. -H. Physica Status Solidi (a), Vol. 116, Issue 1 https://doi.org/10.1002/pssa.2211160111	journal	November 1989
Experimental tests on double-resolution coherent imaging via STEM Rodenburg, J. M.; McCallum, B. C.; Nellist, P. D. Ultramicroscopy, Vol. 48, Issue 3 https://doi.org/10.1016/0304-3991(93)90105-7	journal	March 1993
Aberration corrected 1.2-MV cold field-emission transmission electron microscope with a sub-50-pm resolution Akashi, Tetsuya; Takahashi, Yoshio; Tanigaki, Toshiaki Applied Physics Letters, Vol. 106, Issue 7 https://doi.org/10.1063/1.4908175	journal	February 2015
The principle of a double crystal electron interferometer Zhou, F. Journal of Electron Microscopy, Vol. 50, Issue 5 https://doi.org/10.1093/jmicro/50.5.371	journal	September 2001
High resolution side-band holography with a STEM instrument Cowley, J. M. Ultramicroscopy, Vol. 34, Issue 4 https://doi.org/10.1016/0304-3991(90)90023-F	journal	December 1990
Differential phase-contrast dark-field electron holography for strain mapping Denneulin, Thibaud; Houdellier, Florent; Hÿtch, Martin Ultramicroscopy, Vol. 160 https://doi.org/10.1016/j.ultramic.2015.10.002	journal	January 2016
Production and application of electron vortex beams Verbeeck, J.; Tian, H.; Schattschneider, P. Nature, Vol. 467, Issue 7313 https://doi.org/10.1038/nature09366	journal	September 2010
Electron Vortex Beams with High Quanta of Orbital Angular Momentum McMorran, B. J.; Agrawal, A.; Anderson, I. M. Science, Vol. 331, Issue 6014, p. 192-195 https://doi.org/10.1126/science.1198804	journal	January 2011
Enhanced phase contrast transfer using ptychography combined with a pre-specimen phase plate in a scanning transmission electron microscope Yang, Hao; Ercius, Peter; Nellist, Peter D. Ultramicroscopy, Vol. 171 https://doi.org/10.1016/j.ultramic.2016.09.002	journal	December 2016
Nanoscale holographic interferometry for strain measurements in electronic devices Hÿtch, Martin; Houdellier, Florent; Hüe, Florian Nature, Vol. 453, Issue 7198 https://doi.org/10.1038/nature07049	journal	June 2008
Atomic resolution electrostatic potential mapping of graphene sheets by off-axis electron holography Cooper, David; Pan, Cheng-Ta; Haigh, Sarah Journal of Applied Physics, Vol. 115, Issue 23 https://doi.org/10.1063/1.4883192	journal	June 2014
Electron Beam Interferometer Marton, L.; Simpson, J. Arol; Suddeth, J. A. Physical Review, Vol. 90, Issue 3 https://doi.org/10.1103/PhysRev.90.490	journal	May 1953
Attainment of 40.5 pm spatial resolution using 300 kV scanning transmission electron microscope equipped with fifth-order aberration corrector Morishita, Shigeyuki; Ishikawa, Ryo; Kohno, Yuji Microscopy, Vol. 67, Issue 1 https://doi.org/10.1093/jmicro/dfx122	journal	December 2017
Electron Holography and Its Applications to the Observation of the Microscopic World Tonomura, A. Nanostructures and Quantum Effects https://doi.org/10.1007/978-3-642-79232-8_1	book	January 1994

Cited By (5)

A tunable path-separated electron interferometer with an amplitude-dividing grating beamsplitter Yasin, Fehmi S.; Harada, Ken; Shindo, Daisuke Applied Physics Letters, Vol. 113, Issue 23 https://doi.org/10.1063/1.5051380	journal	December 2018
Laser phase plate for transmission electron microscopy Schwartz, Osip; Axelrod, Jeremy J.; Campbell, Sara L. Nature Methods, Vol. 16, Issue 10 https://doi.org/10.1038/s41592-019-0552-2	journal	September 2019
Electrons see the light Danev, Radostin Nature Methods, Vol. 16, Issue 10 https://doi.org/10.1038/s41592-019-0577-6	journal	September 2019
Nanostructured-membrane electron phase plates Yang, Yujia; Kim, Chung-Soo; Hobbs, Richard G. arXiv https://doi.org/10.48550/arxiv.2001.01144	text	January 2020
Multibeam Electron Diffraction Hong, Xuhao; Zeltmann, Steven E.; Savitzky, Benjamin H. arXiv https://doi.org/10.48550/arxiv.2009.09134	text	January 2020

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Title: Probing Light Atoms at Subnanometer Resolution: Realization of Scanning Transmission Electron Microscope Holography

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