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Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope

Patent ·
OSTI ID:1013816
 [1]
  1. Oak Ridge, TN
+ Show Author Affiliations
A confocal scanning transmission electron microscope which includes an electron illumination device providing an incident electron beam propagating in a direction defining a propagation axis, and a precision specimen scanning stage positioned along the propagation axis and movable in at least one direction transverse to the propagation axis. The precision specimen scanning stage is configured for positioning a specimen relative to the incident electron beam. A projector lens receives a transmitted electron beam transmitted through at least part of the specimen and focuses this transmitted beam onto an image plane, where the transmitted beam results from the specimen being illuminated by the incident electron beam. A detection system is placed approximately in the image plane.
Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-00OR22725
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Number(s):
7,777,185
Application Number:
11/860,760
OSTI ID:
1013816
Country of Publication:
United States
Language:
English

References (3)

Memoir on inventing the confocal scanning microscope journal January 1988
Three-dimensional imaging of individual hafnium atoms inside a semiconductor device journal July 2005
Direct Sub-Angstrom Imaging of a Crystal Lattice journal September 2004

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