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Title: Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope

Abstract

A confocal scanning transmission electron microscope which includes an electron illumination device providing an incident electron beam propagating in a direction defining a propagation axis, and a precision specimen scanning stage positioned along the propagation axis and movable in at least one direction transverse to the propagation axis. The precision specimen scanning stage is configured for positioning a specimen relative to the incident electron beam. A projector lens receives a transmitted electron beam transmitted through at least part of the specimen and focuses this transmitted beam onto an image plane, where the transmitted beam results from the specimen being illuminated by the incident electron beam. A detection system is placed approximately in the image plane.

Inventors:
 [1]
  1. Oak Ridge, TN
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1013816
Patent Number(s):
7,777,185
Application Number:
11/860,760
Assignee:
UT-Battelle, LLC (Oak Ridge, TN) ORO
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Patent
Country of Publication:
United States
Language:
English

Citation Formats

de Jonge, Niels. Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope. United States: N. p., 2010. Web.
de Jonge, Niels. Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope. United States.
de Jonge, Niels. Tue . "Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope". United States. https://www.osti.gov/servlets/purl/1013816.
@article{osti_1013816,
title = {Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope},
author = {de Jonge, Niels},
abstractNote = {A confocal scanning transmission electron microscope which includes an electron illumination device providing an incident electron beam propagating in a direction defining a propagation axis, and a precision specimen scanning stage positioned along the propagation axis and movable in at least one direction transverse to the propagation axis. The precision specimen scanning stage is configured for positioning a specimen relative to the incident electron beam. A projector lens receives a transmitted electron beam transmitted through at least part of the specimen and focuses this transmitted beam onto an image plane, where the transmitted beam results from the specimen being illuminated by the incident electron beam. A detection system is placed approximately in the image plane.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 17 00:00:00 EDT 2010},
month = {Tue Aug 17 00:00:00 EDT 2010}
}

Patent:

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