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Title: Synchrotron radiation photoemission study of interfacial electronic structure of HfO{sub 2} on In{sub 0.53}Ga{sub 0.47}As(001)-4 × 2 from atomic layer deposition

The growth of a passivating layer on a In{sub 0.53}Ga{sub 0.47}As(001)-4 × 2 surface by atomic-layer deposition of tetrakis[ethylmethylamino]Hafnium (TEMAHf)) followed by the water pulse was investigated by synchrotron radiation photoemission. The Hf atoms maintain four-fold coordination, both after the initial TEMAHf deposition and the subsequent water pulse. The Hf atoms initially bond to the As dangling bonds of the surface As atom located on the edges of the raised ridges. One EMA ligand is removed in this process. Subsequent water exposure substitutes OH ligand for one or more remaining EMA ligands. These in turn react with TEMAHf to form Hf-O-Hf bonds allowing the hafnium oxides to grow. The surface In atoms on the terrace of the raised ridges were partially removed, but none bonded of the precursor atoms. Correlations between the interfacial electronic structure and the electric performance are discussed.
Authors:
 [1] ; ; ;  [2] ; ;  [3] ;  [4]
  1. National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan (China)
  2. Graduate Institute of Applied Physics and Department of Physics, National Taiwan University, Taipei 10617, Taiwan (China)
  3. Department of Physics, National Tsing Hua University, Hsinchu 30013, Taiwan (China)
  4. Woodland Consulting, 175 Woodland Ave., Morristown, New Jersey 07960 (United States)
Publication Date:
OSTI Identifier:
22280546
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 4; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ATOMS; CORRELATIONS; CRYSTAL GROWTH; ELECTRONIC STRUCTURE; GALLIUM ARSENIDES; HAFNIUM; HAFNIUM OXIDES; INDIUM COMPOUNDS; LAYERS; LIGANDS; PHOTOEMISSION; SURFACES; SYNCHROTRON RADIATION; WATER