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Title: Precursors for the polymer-assisted deposition of films

A polymer assisted deposition process for deposition of metal oxide films is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.
Authors:
; ; ;
Publication Date:
OSTI Identifier:
1092943
Report Number(s):
8,530,554
12/150,627
DOE Contract Number:
AC52-06NA25396
Resource Type:
Patent
Research Org:
LANL (Los Alamos National Laboratory (LANL), Los Alamos, NM (United States))
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE