Polymer-assisted deposition of films

Patent · 29 April 2008

OSTI ID:985156

McCleskey, Thomas M ^[1]; Burrell, Anthony K ^[1]; Jia, Quanxi ^[1]; Lin, Yuan ^[1]

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1. Los Alamos, NM

A polymer assisted deposition process for deposition of metal oxide films is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.

• Research Organization: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: W-7405-ENG-36
• Assignee: Los Alamos National Security, LLC (Los Alamos, NM)
• Patent Number(s): 7,365,118
• Application Number: US Patent Application 10/616,479
• OSTI ID: 985156
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE