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Title: Polymer-assisted deposition of films

Abstract

A polymer assisted deposition process for deposition of metal nitride films and the like is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures under a suitable atmosphere to yield metal nitride films and the like. Such films can be conformal on a variety of substrates including non-planar substrates. In some instances, the films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.

Inventors:
 [1];  [1];  [1];  [2]
  1. Los Alamos, NM
  2. Chandler, AZ
Publication Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1036116
Patent Number(s):
8,124,176
Application Number:
11/804,472
Assignee:
Los Alamos National Security, LLC (Los Alamos, NM)
DOE Contract Number:  
AC52-06NA25396
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

McCleskey, Thomas M, Burrell, Anthony K, Jia, Quanxi, and Lin, Yuan. Polymer-assisted deposition of films. United States: N. p., 2012. Web.
McCleskey, Thomas M, Burrell, Anthony K, Jia, Quanxi, & Lin, Yuan. Polymer-assisted deposition of films. United States.
McCleskey, Thomas M, Burrell, Anthony K, Jia, Quanxi, and Lin, Yuan. Tue . "Polymer-assisted deposition of films". United States. https://www.osti.gov/servlets/purl/1036116.
@article{osti_1036116,
title = {Polymer-assisted deposition of films},
author = {McCleskey, Thomas M and Burrell, Anthony K and Jia, Quanxi and Lin, Yuan},
abstractNote = {A polymer assisted deposition process for deposition of metal nitride films and the like is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures under a suitable atmosphere to yield metal nitride films and the like. Such films can be conformal on a variety of substrates including non-planar substrates. In some instances, the films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2012},
month = {2}
}

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