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Title: Transients using low-high pulsed power in inductively coupled plasmas

Abstract

Pulsed inductively coupled plasmas (ICPs) are widely deployed in the fabrication of semi-conductor devices. Pulse repetition frequencies (PRFs) of up to tens of kHz are commonly used during plasma etching for the high power densities they generate during the pulse-on period, and for their unique chemistries during the pulse-off period. The use of highly attaching halogen gases produces low electron densities during the pulse-off period, and these low density can result in instabilities, E-H transitions and ignition delays when applying power on the next pulse. To mitigate these possibilities, a low-level power environment could be maintained during “pulse-off” to moderate the minimum plasma density, therefore reducing ignition delays and enhancing plasma stability. In this work, ICPs sustained by 5 kHz pulsed power using Ar/Cl2 mixtures at 20 mTorr were computationally investigated. For these conditions, the computed electron temperature (Te) reaches a quasi-steady state during both the high- and low-power excitation. The model predicts that within the electromagnetic skin-depth, Te spikes to a high value during a low-to-high power modulation, and to a low value during a high-to-low power modulation. At the same time, a few cm above the substrate, there is little modulation in Te, as electron power convected frommore » the skin depth disperses in traversing the reactor. Finally, the positive and negative spikes, and convection of transients across the reactors, are functions of power ramping time and gas mixtures.« less

Authors:
 [1];  [2]; ORCiD logo [1]
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  1. Univ. of Michigan, Ann Arbor, MI (United States)
  2. Samsung Electronics Company, Ltd., Suwon (Korea, Republic of)
Publication Date:
Research Org.:
Univ. of Michigan, Ann Arbor, MI (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Fusion Energy Sciences (FES)
OSTI Identifier:
2331468
Grant/Contract Number:  
SC0020232
Resource Type:
Accepted Manuscript
Journal Name:
Plasma Sources Science and Technology
Additional Journal Information:
Journal Volume: 29; Journal Issue: 8; Journal ID: ISSN 1361-6595
Publisher:
IOP Publishing
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Citation Formats

Qu, Chenhui, Nam, Sang Ki, and Kushner, Mark J. Transients using low-high pulsed power in inductively coupled plasmas. United States: N. p., 2020. Web. doi:10.1088/1361-6595/aba113.
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Qu, Chenhui, Nam, Sang Ki, & Kushner, Mark J. Transients using low-high pulsed power in inductively coupled plasmas. United States. https://doi.org/10.1088/1361-6595/aba113
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Qu, Chenhui, Nam, Sang Ki, and Kushner, Mark J. Tue . "Transients using low-high pulsed power in inductively coupled plasmas". United States. https://doi.org/10.1088/1361-6595/aba113. https://www.osti.gov/servlets/purl/2331468.
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@article{osti_2331468,
title = {Transients using low-high pulsed power in inductively coupled plasmas},
author = {Qu, Chenhui and Nam, Sang Ki and Kushner, Mark J.},
abstractNote = {Pulsed inductively coupled plasmas (ICPs) are widely deployed in the fabrication of semi-conductor devices. Pulse repetition frequencies (PRFs) of up to tens of kHz are commonly used during plasma etching for the high power densities they generate during the pulse-on period, and for their unique chemistries during the pulse-off period. The use of highly attaching halogen gases produces low electron densities during the pulse-off period, and these low density can result in instabilities, E-H transitions and ignition delays when applying power on the next pulse. To mitigate these possibilities, a low-level power environment could be maintained during “pulse-off” to moderate the minimum plasma density, therefore reducing ignition delays and enhancing plasma stability. In this work, ICPs sustained by 5 kHz pulsed power using Ar/Cl2 mixtures at 20 mTorr were computationally investigated. For these conditions, the computed electron temperature (Te) reaches a quasi-steady state during both the high- and low-power excitation. The model predicts that within the electromagnetic skin-depth, Te spikes to a high value during a low-to-high power modulation, and to a low value during a high-to-low power modulation. At the same time, a few cm above the substrate, there is little modulation in Te, as electron power convected from the skin depth disperses in traversing the reactor. Finally, the positive and negative spikes, and convection of transients across the reactors, are functions of power ramping time and gas mixtures.},
doi = {10.1088/1361-6595/aba113},
journal = {Plasma Sources Science and Technology},
number = 8,
volume = 29,
place = {United States},
year = {Tue Aug 11 00:00:00 EDT 2020},
month = {Tue Aug 11 00:00:00 EDT 2020}
}
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https://doi.org/10.1088/1361-6595/aba113
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