Effects of Residual Solvent Molecules Facilitating the Infiltration Synthesis of ZnO in a Nonreactive Polymer
Abstract
Infiltration synthesis, the atomic-layer-deposition-based organic–inorganic material hybridization technique that enables unique hybrid composites with improved material properties and inorganic nanostructures replicated from polymer templates, is shown to be driven by the binding reaction between reactive chemical groups of polymers and perfusing vapor-phase material precursors. Here in this paper, we discover that residual solvent molecules from polymer processing can react with infiltrating material precursors to enable the infiltration synthesis of metal oxides in a nonreactive polymer. The systematic study, which combines in situ quartz crystal microgravimetry, polarization-modulated infrared reflection–absorption spectroscopy, X-ray photoelectron spectroscopy, and transmission electron microscopy, shows that the ZnO infiltration synthesis in nominally nonreactive SU-8 polymer is mediated by residual processing solvent cyclopentanone, a cyclic ketone whose Lewis-basic terminal carbonyl group can react with the infiltrating Lewis-acidic Zn precursor diethylzinc (DEZ). In addition, we find favorable roles of residual epoxy rings in the SU-8 film in further assisting the infiltration synthesis of ZnO. Lastly, the discovered rationale not only improves the understanding of infiltration synthesis mechanism, but also potentially expands its application to more diverse polymer systems for the generation of unique functional organic–inorganic hybrids and inorganic nanostructures.
- Authors:
-
- Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials (CFN)
- Stony Brook Univ., NY (United States). Dept. of Chemistry
- Publication Date:
- Research Org.:
- Brookhaven National Laboratory (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1376164
- Report Number(s):
- BNL-114135-2017-JA
Journal ID: ISSN 0897-4756
- Grant/Contract Number:
- SC0012704
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Chemistry of Materials
- Additional Journal Information:
- Journal Volume: 29; Journal Issue: 10; Journal ID: ISSN 0897-4756
- Publisher:
- American Chemical Society (ACS)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Ye, Xinyi, Kestell, John, Kisslinger, Kim, Liu, Mingzhao, Grubbs, Robert B., Boscoboinik, J. Anibal, and Nam, Chang-Yong. Effects of Residual Solvent Molecules Facilitating the Infiltration Synthesis of ZnO in a Nonreactive Polymer. United States: N. p., 2017.
Web. doi:10.1021/acs.chemmater.7b01222.
Ye, Xinyi, Kestell, John, Kisslinger, Kim, Liu, Mingzhao, Grubbs, Robert B., Boscoboinik, J. Anibal, & Nam, Chang-Yong. Effects of Residual Solvent Molecules Facilitating the Infiltration Synthesis of ZnO in a Nonreactive Polymer. United States. https://doi.org/10.1021/acs.chemmater.7b01222
Ye, Xinyi, Kestell, John, Kisslinger, Kim, Liu, Mingzhao, Grubbs, Robert B., Boscoboinik, J. Anibal, and Nam, Chang-Yong. Thu .
"Effects of Residual Solvent Molecules Facilitating the Infiltration Synthesis of ZnO in a Nonreactive Polymer". United States. https://doi.org/10.1021/acs.chemmater.7b01222. https://www.osti.gov/servlets/purl/1376164.
@article{osti_1376164,
title = {Effects of Residual Solvent Molecules Facilitating the Infiltration Synthesis of ZnO in a Nonreactive Polymer},
author = {Ye, Xinyi and Kestell, John and Kisslinger, Kim and Liu, Mingzhao and Grubbs, Robert B. and Boscoboinik, J. Anibal and Nam, Chang-Yong},
abstractNote = {Infiltration synthesis, the atomic-layer-deposition-based organic–inorganic material hybridization technique that enables unique hybrid composites with improved material properties and inorganic nanostructures replicated from polymer templates, is shown to be driven by the binding reaction between reactive chemical groups of polymers and perfusing vapor-phase material precursors. Here in this paper, we discover that residual solvent molecules from polymer processing can react with infiltrating material precursors to enable the infiltration synthesis of metal oxides in a nonreactive polymer. The systematic study, which combines in situ quartz crystal microgravimetry, polarization-modulated infrared reflection–absorption spectroscopy, X-ray photoelectron spectroscopy, and transmission electron microscopy, shows that the ZnO infiltration synthesis in nominally nonreactive SU-8 polymer is mediated by residual processing solvent cyclopentanone, a cyclic ketone whose Lewis-basic terminal carbonyl group can react with the infiltrating Lewis-acidic Zn precursor diethylzinc (DEZ). In addition, we find favorable roles of residual epoxy rings in the SU-8 film in further assisting the infiltration synthesis of ZnO. Lastly, the discovered rationale not only improves the understanding of infiltration synthesis mechanism, but also potentially expands its application to more diverse polymer systems for the generation of unique functional organic–inorganic hybrids and inorganic nanostructures.},
doi = {10.1021/acs.chemmater.7b01222},
journal = {Chemistry of Materials},
number = 10,
volume = 29,
place = {United States},
year = {Thu May 04 00:00:00 EDT 2017},
month = {Thu May 04 00:00:00 EDT 2017}
}
Web of Science
Works referenced in this record:
Insight on the SU-8 resist as passivation layer for transparent Ga2O3–In2O3–ZnO thin-film transistors
journal, September 2010
- Olziersky, Antonis; Barquinha, Pedro; Vilà, Anna
- Journal of Applied Physics, Vol. 108, Issue 6
Systematic study of trimethyl aluminum infiltration in polyethylene terephthalate and its effect on the mechanical properties of polyethylene terephthalate fibers
journal, January 2015
- Padbury, Richard P.; Jur, Jesse S.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 1
Sequential Vapor Infiltration of Metal Oxides into Sacrificial Polyester Fibers: Shape Replication and Controlled Porosity of Microporous/Mesoporous Oxide Monoliths
journal, August 2011
- Gong, Bo; Peng, Qing; Jur, Jesse S.
- Chemistry of Materials, Vol. 23, Issue 15
Temperature-dependent reaction between trimethylaluminum and poly(methyl methacrylate) during sequential vapor infiltration: experimental and ab initio analysis
journal, January 2014
- Dandley, Erinn C.; Needham, Craig D.; Williams, Philip S.
- J. Mater. Chem. C, Vol. 2, Issue 44
Strategies for Inorganic Incorporation using Neat Block Copolymer Thin Films for Etch Mask Function and Nanotechnological Application
journal, January 2016
- Cummins, Cian; Ghoshal, Tandra; Holmes, Justin D.
- Advanced Materials, Vol. 28, Issue 27
General Introduction To Plastics Analysis
book, June 2003
- Lobo, Hubert; Bonilla, Jose
- Handbook of Plastics Analysis
Emerging trends in metal-containing block copolymers: synthesis, self-assembly, and nanomanufacturing applications
journal, January 2013
- Ramanathan, Muruganathan; Tseng, Yu-Chih; Ariga, Katsuhiko
- Journal of Materials Chemistry C, Vol. 1, Issue 11
Sequential Infiltration Synthesis of Doped Polymer Films with Tunable Electrical Properties for Efficient Triboelectric Nanogenerator Development
journal, July 2015
- Yu, Yanhao; Li, Zhaodong; Wang, Yunming
- Advanced Materials, Vol. 27, Issue 33
In Situ Raman Spectroscopic Study of Al-Infiltrated Spider Dragline Silk under Tensile Deformation
journal, September 2014
- Lee, Seung-Mo; Pippel, Eckhard; Moutanabbir, Oussama
- ACS Applied Materials & Interfaces, Vol. 6, Issue 19
Tuning the Tensile Strength of Cellulose through Vapor-Phase Metalation
journal, December 2014
- Gregorczyk, Keith E.; Pickup, David F.; Sanz, Miren Garcia
- Chemistry of Materials, Vol. 27, Issue 1
Mechanism of Metal Oxide Deposition from Atomic Layer Deposition inside Nonreactive Polymer Matrices: Effects of Polymer Crystallinity and Temperature
journal, April 2016
- Obuchovsky, Stas; Frankenstein, Hadar; Vinokur, Jane
- Chemistry of Materials, Vol. 28, Issue 8
A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates
journal, May 2011
- Peng, Qing; Tseng, Yu-Chih; Darling, Seth B.
- ACS Nano, Vol. 5, Issue 6, p. 4600-4606
Atmospheric pressure synthesis of photoluminescent hybrid materials by sequential organometallic vapor infiltration into polyethylene terephthalate fibers
journal, January 2015
- Akyildiz, Halil I.; Mousa, Moataz Bellah M.; Jur, Jesse S.
- Journal of Applied Physics, Vol. 117, Issue 4
Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition
journal, January 2012
- Gong, Bo; Parsons, Gregory N.
- Journal of Materials Chemistry, Vol. 22, Issue 31
Thermal UV treatment on SU-8 polymer for integrated optics
journal, January 2014
- Wang, Xi-Bin; Sun, Jian; Chen, Chang-Ming
- Optical Materials Express, Vol. 4, Issue 3
Electrical and structural properties of ZnO synthesized via infiltration of lithographically defined polymer templates
journal, November 2015
- Nam, Chang-Yong; Stein, Aaron; Kisslinger, Kim
- Applied Physics Letters, Vol. 107, Issue 20
Bovine serum albumin adsorption on nano-rough platinum surfaces studied by QCM-D
journal, October 2008
- Dolatshahi-Pirouz, A.; Rechendorff, K.; Hovgaard, M. B.
- Colloids and Surfaces B: Biointerfaces, Vol. 66, Issue 1
Direct fabrication of high aspect-ratio metal oxide nanopatterns via sequential infiltration synthesis in lithographically defined SU-8 templates
journal, November 2015
- Nam, Chang-Yong; Stein, Aaron; Kisslinger, Kim
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 33, Issue 6
Greatly Increased Toughness of Infiltrated Spider Silk
journal, April 2009
- Lee, S. -M.; Pippel, E.; Gosele, U.
- Science, Vol. 324, Issue 5926
Stereoselective organic reactions: catalysts for carbonyl addition processes
journal, April 1988
- Evans, D.
- Science, Vol. 240, Issue 4851
Lewis acid-promoted selective rearrangement of trisubstituted epoxides to aldehydes or ketones
journal, March 1994
- Maruoka, Keiji; Murase, Noriaki; Bureau, Ronan
- Tetrahedron, Vol. 50, Issue 12
SU8 resist for low-cost X-ray patterning of high-resolution, high-aspect-ratio MEMS
journal, January 2002
- Khan Malek, Chantal G.
- Microelectronics Journal, Vol. 33, Issue 1-2
Kinetics for the Sequential Infiltration Synthesis of Alumina in Poly(methyl methacrylate): An Infrared Spectroscopic Study
journal, January 2015
- Biswas, Mahua; Libera, Joseph A.; Darling, Seth B.
- The Journal of Physical Chemistry C, Vol. 119, Issue 26
Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatings
journal, December 2002
- Feng, Ru; Farris, Richard J.
- Journal of Micromechanics and Microengineering, Vol. 13, Issue 1
A greener approach for the synthesis of 1-N-methyl-(spiro[2.3′]oxindolespiro[3.2″]/spiro[2.3′]indan-1,3-dionespiro[2.2″])cyclopentanone-4-aryl pyrrolidines
journal, January 2007
- Sridhar, Gowri; Gunasundari, T.; Raghunathan, R.
- Tetrahedron Letters, Vol. 48, Issue 2
Structural anisotropy in friction-deposited layers of polystyrene
journal, January 2006
- Elzein, Tamara; Kreim, Virginie; Ghorbal, Achraf
- Journal of Polymer Science Part B: Polymer Physics, Vol. 44, Issue 22
Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis
journal, July 2011
- Tseng, Yu-Chih; Peng, Qing; Ocola, Leonidas E.
- The Journal of Physical Chemistry C, Vol. 115, Issue 36, p. 17725-17729
Chemical modification of polymer surfaces for advanced triboelectric nanogenerator development
journal, December 2016
- Yu, Yanhao; Wang, Xudong
- Extreme Mechanics Letters, Vol. 9
Advanced oil sorbents using sequential infiltration synthesis
journal, January 2017
- Barry, Edward; Mane, Anil U.; Libera, Joseph A.
- Journal of Materials Chemistry A, Vol. 5, Issue 6
Temperature and Exposure Dependence of Hybrid Organic–Inorganic Layer Formation by Sequential Vapor Infiltration into Polymer Fibers
journal, October 2012
- Akyildiz, Halil I.; Padbury, Richard P.; Parsons, Gregory N.
- Langmuir, Vol. 28, Issue 44
Fast Fourier Transform IR Characterization of Epoxy GY Systems Crosslinked with Aliphatic and Cycloaliphatic EH Polyamine Adducts
journal, January 2010
- Nikolic, Goran; Zlatkovic, Sasa; Cakic, Milorad
- Sensors, Vol. 10, Issue 1
New Insight into the Mechanism of Sequential Infiltration Synthesis from Infrared Spectroscopy
journal, October 2014
- Biswas, Mahua; Libera, Joseph A.; Darling, Seth B.
- Chemistry of Materials, Vol. 26, Issue 21
The influence of hard-baking temperature applied for SU8 sensor layer on the sensitivity of capacitive chemical sensor
journal, November 2008
- Klanjšek Gunde, Marta; Hauptman, Nina; Maček, Marijan
- Applied Physics A, Vol. 95, Issue 3
New Insights into Sequential Infiltration Synthesis
journal, September 2015
- Elam, J. W.; Biswas, M.; Darling, S.
- ECS Transactions, Vol. 69, Issue 7
Photoluminescence of sequential infiltration synthesized ZnO nanostructures
conference, February 2016
- Ocola, Leonidas E.; Gosztola, David J.; Yanguas-Gil, Angel
- SPIE OPTO, SPIE Proceedings
Chemically Enhancing Block Copolymers for Block-Selective Synthesis of Self-Assembled Metal Oxide Nanostructures
journal, December 2012
- Kamcev, Jovan; Germack, David S.; Nykypanchuk, Dmytro
- ACS Nano, Vol. 7, Issue 1
Photoluminescence Mechanism and Photocatalytic Activity of Organic–Inorganic Hybrid Materials Formed by Sequential Vapor Infiltration
journal, April 2016
- Akyildiz, Halil I.; Stano, Kelly L.; Roberts, Adam T.
- Langmuir, Vol. 32, Issue 17
Investigating Sequential Vapor Infiltration Synthesis on Block-Copolymer-Templated Titania Nanoarrays
journal, March 2016
- Ishchenko, Olga M.; Krishnamoorthy, Sivashankar; Valle, Nathalie
- The Journal of Physical Chemistry C, Vol. 120, Issue 13
Molecular Layer Deposition of Hybrid Organic-Inorganic Polymer Films using Diethylzinc and Ethylene Glycol
journal, June 2009
- Yoon, Byunghoon; O'Patchen, Jennifer L.; Seghete, Dragos
- Chemical Vapor Deposition, Vol. 15, Issue 4-6
Organometallic exposure dependence on organic–inorganic hybrid material formation in polyethylene terephthalate and polyamide 6 polymer fibers
journal, March 2015
- Akyildiz, Halil I.; Jur, Jesse S.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 2
Polarization Modulation FT-IR Spectroscopy of Surfaces and Ultra-Thin Films: Experimental Procedure and Quantitative Analysis
journal, March 1991
- Buffeteau, T.; Desbat, B.; Turlet, J. M.
- Applied Spectroscopy, Vol. 45, Issue 3
Processing of thin SU-8 films
journal, November 2008
- Keller, Stephan; Blagoi, Gabriela; Lillemose, Michael
- Journal of Micromechanics and Microengineering, Vol. 18, Issue 12
Asymmetric Addition of Alkylzinc Reagents to Cyclic α,β-Unsaturated Ketones and a Tandem Enantioselective Addition/Diastereoselective Epoxidation with Dioxygen
journal, July 2003
- Jeon, Sang-Jin; Walsh, Patrick J.
- Journal of the American Chemical Society, Vol. 125, Issue 32
Thermal analysis of γ-butyrolactone+1 butyl-3-methyl-imidazolium ionic liquids mixtures
journal, May 2005
- Chagnes, A.; Allouchi, H.; Carré, B.
- Solid State Ionics, Vol. 176, Issue 15-16
Reactions during Atomic Layer Deposition on Polymer Films and Fibers
journal, July 2010
- Parsons, Gregory N.; Spagnola, Joseph; Gong, Bo
- ECS Meeting Abstracts, Vol. MA2010-02, Issue 20
Atomic Layer Deposition: An Overview
journal, January 2010
- George, Steven M.
- Chemical Reviews, Vol. 110, Issue 1, p. 111-131
Study of atomic layer epitaxy of zinc oxide by in-situ quartz crystal microgravimetry
journal, January 2000
- Yousfi, El Bekkaye; Fouache, Jacques; Lincot, Daniel
- Applied Surface Science, Vol. 153, Issue 4, p. 223-234
Infrared Studies of Ketones: Parameters Affecting the Induced Carbonyl Stretching Vibration by Solute/Solvent Interaction
journal, March 1990
- Nyquist, Richard A.
- Applied Spectroscopy, Vol. 44, Issue 3
Cure Kinetics of Epoxy Nanocomposites Affected by MWCNTs Functionalization: A Review
journal, January 2013
- Saeb, Mohammad Reza; Bakhshandeh, Ehsan; Khonakdar, Hossein Ali
- The Scientific World Journal, Vol. 2013
Thermal Stability of Gold Nanoparticles Embedded within Metal Oxide Frameworks Fabricated by Hybrid Modifications onto Sacrificial Textile Templates
journal, July 2014
- Padbury, Richard P.; Halbur, Jonathan C.; Krommenhoek, Peter J.
- Langmuir, Vol. 31, Issue 3
Infrared spectroscopy of ferrihydrite: evidence for the presence of structural hydroxyl groups
journal, June 1979
- Russell, J. D.
- Clay Minerals, Vol. 14, Issue 2
Characterization by Fourier transform infrared spectroscopy of hydroxyapatite co-doped with zinc and fluoride
journal, September 2013
- Uysal, I.; Severcan, F.; Evis, Z.
- Ceramics International, Vol. 39, Issue 7
Rapid Prototyping of Microstructures with Bell-Shaped Cross-Sections and Its Application to Deformation-Based Microfluidic Valves
journal, August 2004
- Futai, N.; Gu, W.; Takayama, S.
- Advanced Materials, Vol. 16, Issue 15
Catalysis of the epoxy-carboxyl reaction
journal, March 2002
- Blank, Werner J.; He, Z. A.; Picci, Marie
- Journal of Coatings Technology, Vol. 74, Issue 3
Sequential Infiltration Synthesis for the Design of Low Refractive Index Surface Coatings with Controllable Thickness
journal, February 2017
- Berman, Diana; Guha, Supratik; Lee, Byeongdu
- ACS Nano, Vol. 11, Issue 3
Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers
journal, September 2010
- Peng, Qing; Tseng, Yu-Chih; Darling, Seth B.
- Advanced Materials, Vol. 22, Issue 45, p. 5129-5133
Works referencing / citing this record:
The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective
journal, November 2019
- Waldman, Ruben Z.; Mandia, David J.; Yanguas-Gil, Angel
- The Journal of Chemical Physics, Vol. 151, Issue 19
Two Birds with One Stone: Spontaneous Size Separation and Growth Inhibition of Femtosecond Laser-Generated Surfactant-Free Metallic Nanoparticles via ex Situ SU-8 Functionalization
journal, September 2018
- Zhang, Dongshi; Choi, Wonsuk; Yazawa, Kenjiro
- ACS Omega, Vol. 3, Issue 9
Multifunctional UV and Gas Sensors Based on Vertically Nanostructured Zinc Oxide: Volume Versus Surface Effect
journal, May 2019
- Ocola, Leonidas E.; Wang, Yale; Divan, Ralu
- Sensors, Vol. 19, Issue 9
Advancing next generation nanolithography with infiltration synthesis of hybrid nanocomposite resists
journal, January 2019
- Tiwale, Nikhil; Subramanian, Ashwanth; Kisslinger, Kim
- Journal of Materials Chemistry C, Vol. 7, Issue 29
Multifunctional UV and Gas Sensors Based on Vertically Nanostructured Zinc Oxide: Volume Versus Surface Effect
journal, May 2019
- Ocola, Leonidas E.; Wang, Yale; Divan, Ralu
- Sensors, Vol. 19, Issue 9