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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue 6
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Statistical Modeling and Simulation of Threshold Variation Under Random Dopant Fluctuations and Line-Edge Roughness
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Electrical, optical, and structural properties of indium–tin–oxide thin films for organic light-emitting devices
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Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue 2
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CD characterization of nanostructures in SEM metrology
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Reduction of line edge roughness in the top surface imaging process
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 6, Article No. 3739
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Cyclic trimeric hydroxy, amido, phosphido, and arsenido derivatives of aluminum and gallium. X-ray structures of [tert-Bu2Ga(.mu.-OH)]3 and [tert-Bu2Ga(.mu.-NH2)]3
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Optical Characterization and Process Control of Top Surface Imaging
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Characterization of tin doped indium oxide films prepared by electron beam evaporation
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Enhanced Lithographic Imaging Layer Meets Semiconductor Manufacturing Specification a Decade Early
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High Precision Etching of Si/SiO[sub 2] on a High-Density Helicon Etcher for Nanoscale Devices
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Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers
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Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter
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A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates
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Enhanced polymeric lithography resists via sequential infiltration synthesis
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Etch properties of resists modified by sequential infiltration synthesis
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Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 6, Article No. 06FG01
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Methods Of Utilizing Block Copolymer To Form Patterns
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April 2010 |
Optimized surface silylation of chemically amplified epoxidized photoresists for micromachining applications
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April 2010 |
Hierarchical self-assembly of metal nanostructures on diblock copolymer scaffolds
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December 2001 |
Bilayer silylation process for 193-nm lithography
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June 1999 |
Ordered Nanoscale Domains by Infiltration of Block Copolymers
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February 2012 |
Study on line edge roughness for electron beam acceleration voltages from 50 to 5 kV
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6
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Line edge roughness of sub-100 nm dense and isolated features: Experimental study
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6
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Study of the fundamental contributions to line edge roughness in a 193 nm, top surface imaging system
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 5
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January 2000 |
Temperature-Dependent Subsurface Growth during Atomic Layer Deposition on Polypropylene and Cellulose Fibers
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TRILAYER RESIST SCHEME FOR GATE ETCHING APPLICATIONS
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Accurate vapor pressure equation for trimethylindium in OMVPE
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Toward reliable density functional methods without adjustable parameters: The PBE0 model
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April 1999 |
Hydrolysis of tri-tert-butylaluminum: the first structural characterization of alkylalumoxanes [(R2Al)2O]n and (RAlO)n
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Block Co-Polymer Photoresist
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August 2013 |
Indium Tin Oxide Films: State-of-the-Art In Synthesis and Properties
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Indium tin oxide films prepared by radio frequency magnetron sputtering method at a low processing temperature
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Complementary replacement of material
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Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis
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July 2011 |
High sensitive negative silylation process for 193nm lithography
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June 2000 |
Profile evolution during polysilicon gate etching with low-pressure high-density Cl2/HBr/O2 plasma chemistries
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 19, Issue 3
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May 2001 |
Method of Controlling Orientation of Domains in Block Copolymer Films
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July 2009 |
Method for Forming a Block Copolymer Pattern
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August 2011 |
Method for manufacturing porous structure and method for forming pattern
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October 2006 |
Ab initio molecular simulations with numeric atom-centered orbitals
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Application of Plasmask R resist and the DESIRE process to lithography at 248 nm
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November 1990 |
XPS O 1s binding energies for polymers containing hydroxyl, ether, ketone and ester groups
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Analysis of Poly(methyl methacrylate) (PMMA) by XPS
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SEQUENTIAL INFILTRATION SYNTHESIS FOR ADVANCED LITHOGRAPHY
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September 2012 |
An experimentally validated analytical model for gate line-edge roughness (LER) effects on technology scaling
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June 2001 |
Mobility analysis of surface roughness scattering in FinFET devices
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August 2011 |
Nanoscopic Morphologies in Block Copolymer Nanorods as Templates for Atomic-Layer Deposition of Semiconductors
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April 2009 |
Low-Temperature Al2O3 Atomic Layer Deposition
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February 2004 |
Triple patterning in 10nm node metal lithography
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November 2012 |
Hollow Inorganic Nanospheres and Nanotubes with Tunable Wall Thicknesses by Atomic Layer Deposition on Self-Assembled Polymeric Templates
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January 2007 |
PRIME process for deep UV and E-beam lithography
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April 1990 |
Atomic Layer Deposition of Indium Tin Oxide Thin Films Using Nonhalogenated Precursors
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Ab initio study on the dimer structures of trimethylaluminum and dimethylaluminumhydride
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December 1994 |
Role of oxygen vacancies in the high-temperature thermopower of indium oxide and indium tin oxide films
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Two-Dimensional Liquid Phase and the px.sqroot.3 Phase of Alkanethiol Self-Assembled Monolayers on Au(111)
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October 1994 |
Approaches to deep ultraviolet photolithography utilizing acid hardened resin photoresist systems
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