Effects of particle inclusions on cracking in ultrathin barrier films
Abstract
Here, the effects of particle inclusions with different mechanical properties on the development of cracks in ultra-thin barrier films have been studied. Two types of particles, alumina and poly(styrene-b-methyl methacrylate) with large differences in their elastic modulus were used, representing both hard and soft inclusions. Particles were seeded onto polyethylene naphthalate substrates and subsequently coated with atomic layer deposited Al2O3 as a barrier film. Ca corrosion tests used to determine the performance of the barrier films revealed that soft polymer particle inclusions severely affect the development of cracking in barrier films as compared to stiff ceramic particles. Tensile tests also confirmed that the barrier films with polymer particle inclusions have the lowest value of critical onset strain. Parametric simulations, conducted by varying the elastic modulus of the particle inclusions over a wide range, resulted in a larger strain energy release rate near particle inclusions which promotes crack formation and negatively impacts the performance of barrier films with softer particle inclusions. Thus, the combination of high residual stresses in the barrier films with the presence of soft particle inclusions is found the most detrimental for the development of high-performance ultrathin barrier films.
- Authors:
-
- Georgia Institute of Technology, Atlanta, GA (United States)
- Publication Date:
- Research Org.:
- North Carolina State University, Raleigh, NC (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA); US Department of the Navy, Office of Naval Research (ONR); US Air Force Office of Scientific Research (AFOSR)
- OSTI Identifier:
- 1850341
- Alternate Identifier(s):
- OSTI ID: 1776248
- Grant/Contract Number:
- NA0002576; N00014-14-1-0580; N00014-16-1-2520; FA9550-16-1-0168
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Thin Solid Films
- Additional Journal Information:
- Journal Volume: 714; Journal Issue: C; Journal ID: ISSN 0040-6090
- Publisher:
- Elsevier
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; materials science; physics; atomic layer deposition; ultrathin barrier films; cracks; particle inclusion; particle contamination
Citation Formats
Singh, Ankit Kumar, Kim, Kyungjin, Chou, Wen-Fang, Jia, Xiaojia, Fuentes-Hernandez, Canek, Kippelen, Bernard, and Graham, Samuel. Effects of particle inclusions on cracking in ultrathin barrier films. United States: N. p., 2020.
Web. doi:10.1016/j.tsf.2020.138387.
Singh, Ankit Kumar, Kim, Kyungjin, Chou, Wen-Fang, Jia, Xiaojia, Fuentes-Hernandez, Canek, Kippelen, Bernard, & Graham, Samuel. Effects of particle inclusions on cracking in ultrathin barrier films. United States. https://doi.org/10.1016/j.tsf.2020.138387
Singh, Ankit Kumar, Kim, Kyungjin, Chou, Wen-Fang, Jia, Xiaojia, Fuentes-Hernandez, Canek, Kippelen, Bernard, and Graham, Samuel. Mon .
"Effects of particle inclusions on cracking in ultrathin barrier films". United States. https://doi.org/10.1016/j.tsf.2020.138387. https://www.osti.gov/servlets/purl/1850341.
@article{osti_1850341,
title = {Effects of particle inclusions on cracking in ultrathin barrier films},
author = {Singh, Ankit Kumar and Kim, Kyungjin and Chou, Wen-Fang and Jia, Xiaojia and Fuentes-Hernandez, Canek and Kippelen, Bernard and Graham, Samuel},
abstractNote = {Here, the effects of particle inclusions with different mechanical properties on the development of cracks in ultra-thin barrier films have been studied. Two types of particles, alumina and poly(styrene-b-methyl methacrylate) with large differences in their elastic modulus were used, representing both hard and soft inclusions. Particles were seeded onto polyethylene naphthalate substrates and subsequently coated with atomic layer deposited Al2O3 as a barrier film. Ca corrosion tests used to determine the performance of the barrier films revealed that soft polymer particle inclusions severely affect the development of cracking in barrier films as compared to stiff ceramic particles. Tensile tests also confirmed that the barrier films with polymer particle inclusions have the lowest value of critical onset strain. Parametric simulations, conducted by varying the elastic modulus of the particle inclusions over a wide range, resulted in a larger strain energy release rate near particle inclusions which promotes crack formation and negatively impacts the performance of barrier films with softer particle inclusions. Thus, the combination of high residual stresses in the barrier films with the presence of soft particle inclusions is found the most detrimental for the development of high-performance ultrathin barrier films.},
doi = {10.1016/j.tsf.2020.138387},
journal = {Thin Solid Films},
number = C,
volume = 714,
place = {United States},
year = {Mon Oct 12 00:00:00 EDT 2020},
month = {Mon Oct 12 00:00:00 EDT 2020}
}
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