Effect of Perforation on the Thermal and Electrical Breakdown of Self-Rolled-Up Nanomembrane Structures
Abstract
Strain-induced self-rolled-up membranes (S-RuM) are structures formed spontaneously by releasing a strained layer or layer stacks from its mechanical support, with unique applications in passive photonics, electronics, and bioengineering. Depending on the thermal properties of the strained layers, these structures can experience various thermally induced deformations. These deformations can be avoided and augmented with the addition of strategically placed perforations in the membrane. This study reports on the use of perforations to modify the thermal effects on strained silicon nitride S-RuM structures. Finally, a programmable fuse with well-defined thermal threshold, ultrasmall footprint, and 2-3 V voltage rating is demonstrated, which can potentially serve as an on-chip sensing device for power electronic circuits.
- Publication Date:
- Research Org.:
- Univ. of Illinois at Urbana-Champaign, IL (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division; National Science Foundation (NSF); USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1607419
- Alternate Identifier(s):
- OSTI ID: 1560747
- Grant/Contract Number:
- FG02-07ER46471; FG02‐07ER46471
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Advanced Materials Interfaces
- Additional Journal Information:
- Journal Volume: 6; Journal Issue: 21; Journal ID: ISSN 2196-7350
- Publisher:
- Wiley-VCH
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; perforation; self-rolled-up membrane; silicon nitride membrane; thermal breakdown
Citation Formats
Michaels, Julian A., Wood, Derek R., Froeter, Paul J., Huang, Wen, Sievers, Dane J., and Li, Xiuling. Effect of Perforation on the Thermal and Electrical Breakdown of Self-Rolled-Up Nanomembrane Structures. United States: N. p., 2019.
Web. doi:10.1002/admi.201901022.
Michaels, Julian A., Wood, Derek R., Froeter, Paul J., Huang, Wen, Sievers, Dane J., & Li, Xiuling. Effect of Perforation on the Thermal and Electrical Breakdown of Self-Rolled-Up Nanomembrane Structures. United States. https://doi.org/10.1002/admi.201901022
Michaels, Julian A., Wood, Derek R., Froeter, Paul J., Huang, Wen, Sievers, Dane J., and Li, Xiuling. Sun .
"Effect of Perforation on the Thermal and Electrical Breakdown of Self-Rolled-Up Nanomembrane Structures". United States. https://doi.org/10.1002/admi.201901022. https://www.osti.gov/servlets/purl/1607419.
@article{osti_1607419,
title = {Effect of Perforation on the Thermal and Electrical Breakdown of Self-Rolled-Up Nanomembrane Structures},
author = {Michaels, Julian A. and Wood, Derek R. and Froeter, Paul J. and Huang, Wen and Sievers, Dane J. and Li, Xiuling},
abstractNote = {Strain-induced self-rolled-up membranes (S-RuM) are structures formed spontaneously by releasing a strained layer or layer stacks from its mechanical support, with unique applications in passive photonics, electronics, and bioengineering. Depending on the thermal properties of the strained layers, these structures can experience various thermally induced deformations. These deformations can be avoided and augmented with the addition of strategically placed perforations in the membrane. This study reports on the use of perforations to modify the thermal effects on strained silicon nitride S-RuM structures. Finally, a programmable fuse with well-defined thermal threshold, ultrasmall footprint, and 2-3 V voltage rating is demonstrated, which can potentially serve as an on-chip sensing device for power electronic circuits.},
doi = {10.1002/admi.201901022},
journal = {Advanced Materials Interfaces},
number = 21,
volume = 6,
place = {United States},
year = {Sun Sep 08 00:00:00 EDT 2019},
month = {Sun Sep 08 00:00:00 EDT 2019}
}
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