Pulsed Laser-Assisted Helium Ion Nanomachining of Monolayer Graphene—Direct-Write Kirigami Patterns

Zhang, Cheng; Dyck, Ondrej; Garfinkel, David A.; Stanford, Michael G.; Belianinov, Alex A.; Fowlkes, Jason D.; Jesse, Stephen; Rack, Philip D.

doi:10.3390/nano9101394

Title: Pulsed Laser-Assisted Helium Ion Nanomachining of Monolayer Graphene—Direct-Write Kirigami Patterns

Journal Article · 30 September 2019 · Nanomaterials

DOI: https://doi.org/10.3390/nano9101394 · OSTI ID:1567714

; Dyck, Ondrej; Garfinkel, David A.; Stanford, Michael G.; Belianinov, Alex A.; Fowlkes, Jason D.; Jesse, Stephen;

A helium gas field ion source has been demonstrated to be capable of realizing higher milling resolution relative to liquid gallium ion sources. One drawback, however, is that the helium ion mass is prohibitively low for reasonable sputtering rates of bulk materials, requiring a dosage that may lead to significant subsurface damage. Manipulation of suspended graphene is, therefore, a logical application for He+ milling. We demonstrate that competitive ion beam-induced deposition from residual carbonaceous contamination can be thermally mitigated via a pulsed laser-assisted He+ milling. By optimizing pulsed laser power density, frequency, and pulse width, we reduce the carbonaceous byproducts and mill graphene gaps down to sub 10 nm in highly complex kiragami patterns.

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Sponsoring Organization:: USDOE

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1567714

Journal Information:: Nanomaterials, Journal Name: Nanomaterials Journal Issue: 10 Vol. 9; ISSN NANOKO; ISSN 2079-4991

Publisher:: MDPICopyright Statement

Country of Publication:: Switzerland

Language:: English

References (35)

Graphene in 3-dimensions: Towards graphite origami Ebbesen, Thomas W.; Hiura, Hidefumi Advanced Materials, Vol. 7, Issue 6 https://doi.org/10.1002/adma.19950070618	journal	June 1995
In Situ Mitigation of Subsurface and Peripheral Focused Ion Beam Damage via Simultaneous Pulsed Laser Heating Stanford, Michael G.; Lewis, Brett B.; Iberi, Vighter Small, Vol. 12, Issue 13 https://doi.org/10.1002/smll.201503680	journal	February 2016
Engineering carbon materials with electricity Harris, Peter J. F. Carbon, Vol. 122 https://doi.org/10.1016/j.carbon.2017.06.084	journal	October 2017
Multi-purposed Ar gas cluster ion beam processing for graphene engineering Kim, Songkil; Ievlev, Anton V.; Jakowski, Jacek Carbon, Vol. 131 https://doi.org/10.1016/j.carbon.2018.01.098	journal	May 2018
Graphene milling dynamics during helium ion beam irradiation Kim, Songkil; Dyck, Ondrej; Ievlev, Anton V. Carbon, Vol. 138 https://doi.org/10.1016/j.carbon.2018.06.017	journal	November 2018
Nanomechanical z-shape folding of graphene on flat substrate Yi, Chenglin; Chen, Xiaoming; Zhang, Liuyang Extreme Mechanics Letters, Vol. 9 https://doi.org/10.1016/j.eml.2016.05.008	journal	December 2016
Graphene nano-ribbon electronics Chen, Zhihong; Lin, Yu-Ming; Rooks, Michael J. Physica E: Low-dimensional Systems and Nanostructures, Vol. 40, Issue 2, p. 228-232 https://doi.org/10.1016/j.physe.2007.06.020	journal	December 2007
Quantum corrections to conductivity in graphene with vacancies Araujo, E. N. D.; Brant, J. C.; Archanjo, B. S. Physica E: Low-dimensional Systems and Nanostructures, Vol. 100 https://doi.org/10.1016/j.physe.2018.02.025	journal	June 2018
Graphene Defect Editing, Deposition, and Growth via E-Beam-Induced Organic Reactions in Aberration Corrected STEM Dyck, Ondrej; Kim, Songkil; Kalinin, Sergei V. Microscopy and Microanalysis, Vol. 24, Issue S1 https://doi.org/10.1017/S1431927618010450	journal	August 2018
Superstructured Assembly of Nanocarbons: Fullerenes, Nanotubes, and Graphene Li, Zheng; Liu, Zheng; Sun, Haiyan Chemical Reviews, Vol. 115, Issue 15 https://doi.org/10.1021/acs.chemrev.5b00102	journal	July 2015
Inert Gas Enhanced Laser-Assisted Purification of Platinum Electron-Beam-Induced Deposits Stanford, Michael G.; Lewis, Brett B.; Noh, Joo Hyon ACS Applied Materials & Interfaces, Vol. 7, Issue 35 https://doi.org/10.1021/acsami.5b02488	journal	July 2015
Laser-Assisted Focused He ⁺ Ion Beam Induced Etching with and without XeF ₂ Gas Assist Stanford, Michael G.; Mahady, Kyle; Lewis, Brett B. ACS Applied Materials & Interfaces, Vol. 8, Issue 42 https://doi.org/10.1021/acsami.6b09758	journal	October 2016
Structurally Controlled Large-Area 10 nm Pitch Graphene Nanomesh by Focused Helium Ion Beam Milling Schmidt, Marek Edward; Iwasaki, Takuya; Muruganathan, Manoharan ACS Applied Materials & Interfaces, Vol. 10, Issue 12 https://doi.org/10.1021/acsami.8b00427	journal	February 2018
Purification of Nanoscale Electron-Beam-Induced Platinum Deposits via a Pulsed Laser-Induced Oxidation Reaction Stanford, Michael G.; Lewis, Brett B.; Noh, Joo Hyon ACS Applied Materials & Interfaces, Vol. 6, Issue 23 https://doi.org/10.1021/am506246z	journal	November 2014
Pulsed Laser-Assisted Focused Electron-Beam-Induced Etching of Titanium with XeF ₂ : Enhanced Reaction Rate and Precursor Transport Noh, J. H.; Fowlkes, J. D.; Timilsina, R. ACS Applied Materials & Interfaces, Vol. 7, Issue 7 https://doi.org/10.1021/am508443s	journal	February 2015
The Possibility of Chemically Inert, Graphene-Based All-Carbon Electronic Devices with 0.8 eV Gap Qi, Jing Shan; Huang, Jian Yu; Feng, Ji ACS Nano, Vol. 5, Issue 5 https://doi.org/10.1021/nn102322s	journal	April 2011
Hydrogenation-Assisted Graphene Origami and Its Application in Programmable Molecular Mass Uptake, Storage, and Release Zhu, Shuze; Li, Teng ACS Nano, Vol. 8, Issue 3 https://doi.org/10.1021/nn500025t	journal	March 2014
Etching of Graphene Devices with a Helium Ion Beam Lemme, Max C.; Bell, David C.; Williams, James R. ACS Nano, Vol. 3, Issue 9 https://doi.org/10.1021/nn900744z	journal	August 2009
Graphene kirigami Blees, Melina K.; Barnard, Arthur W.; Rose, Peter A. Nature, Vol. 524, Issue 7564 https://doi.org/10.1038/nature14588	journal	July 2015
Unconventional superconductivity in magic-angle graphene superlattices Cao, Yuan; Fatemi, Valla; Fang, Shiang Nature, Vol. 556, Issue 7699 https://doi.org/10.1038/nature26160	journal	March 2018
Atom-by-atom fabrication with electron beams Dyck, Ondrej; Ziatdinov, Maxim; Lingerfelt, David B. Nature Reviews Materials, Vol. 4, Issue 7 https://doi.org/10.1038/s41578-019-0118-z	journal	June 2019
Quantifying transmission electron microscopy irradiation effects using two-dimensional materials Susi, Toma; Meyer, Jannik C.; Kotakoski, Jani Nature Reviews Physics, Vol. 1, Issue 6 https://doi.org/10.1038/s42254-019-0058-y	journal	May 2019
Maskless Lithography and in situ Visualization of Conductivity of Graphene using Helium Ion Microscopy Iberi, Vighter; Vlassiouk, Ivan; Zhang, X. -G. Scientific Reports, Vol. 5, Issue 1 https://doi.org/10.1038/srep11952	journal	July 2015
Focused helium-ion beam irradiation effects on electrical transport properties of few-layer WSe2: enabling nanoscale direct write homo-junctions Stanford, Michael G.; Pudasaini, Pushpa Raj; Belianinov, Alex Scientific Reports, Vol. 6, Issue 1 https://doi.org/10.1038/srep27276	journal	June 2016
Magnetic field controlled graphene oxide-based origami with enhanced surface area and mechanical properties Park, Ok-Kyung; Tiwary, Chandra Sekhar; Yang, Yang Nanoscale, Vol. 9, Issue 21 https://doi.org/10.1039/C7NR01054K	journal	January 2017
Patterning of graphene Feng, Ji; Li, Wenbin; Qian, Xiaofeng Nanoscale, Vol. 4, Issue 16 https://doi.org/10.1039/c2nr30790a	journal	January 2012
Three-dimensional graphene architectures Li, Chun; Shi, Gaoquan Nanoscale, Vol. 4, Issue 18 https://doi.org/10.1039/c2nr31467c	journal	January 2012
Atomistic simulations of tension-induced large deformation and stretchability in graphene kirigami Qi, Zenan; Campbell, David K.; Park, Harold S. Physical Review B, Vol. 90, Issue 24 https://doi.org/10.1103/PhysRevB.90.245437	journal	December 2014
Bending Rules in Graphene Kirigami Grosso, Bastien F.; Mele, E. J. Physical Review Letters, Vol. 115, Issue 19 https://doi.org/10.1103/PhysRevLett.115.195501	journal	November 2015
FIB-induced damage in graphene electrodes for piezoelectric resonators Saadani, A.; Lavenus, P.; Le Traon, O. 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) https://doi.org/10.1109/DTIP.2018.8394206	conference	May 2018
Engineering the Modal Shape of Graphene Nanoelectromechanical Systems Using Focused Ion Beam Milling Miller, David; Blaikie, Andrew; Carter, Brittany 2018 IEEE 13th Nanotechnology Materials and Devices Conference (NMDC) https://doi.org/10.1109/NMDC.2018.8605924	conference	October 2018
Mitigating e-beam-induced hydrocarbon deposition on graphene for atomic-scale scanning transmission electron microscopy studies Dyck, Ondrej; Kim, Songkil; Kalinin, Sergei V. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 36, Issue 1 https://doi.org/10.1116/1.5003034	journal	January 2018
Origami-inspired active graphene-based paper for programmable instant self-folding walking devices Mu, Jiuke; Hou, Chengyi; Wang, Hongzhi Science Advances, Vol. 1, Issue 10 https://doi.org/10.1126/sciadv.1500533	journal	November 2015
Electric Field Effect in Atomically Thin Carbon Films Novoselov, K. S. Science, Vol. 306, Issue 5696, p. 666-669 https://doi.org/10.1126/science.1102896	journal	October 2004
3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity Lewis, Brett B.; Winkler, Robert; Sang, Xiahan Beilstein Journal of Nanotechnology, Vol. 8 https://doi.org/10.3762/bjnano.8.83	journal	January 2017

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