skip to main content


This content will become publicly available on March 30, 2019

Title: Tin Oxynitride Anodes by Atomic Layer Deposition for Solid-State Batteries

Major advances in thin-film solid-state batteries (TFSSBs) may capitalize on 3D structuring using high-aspect-ratio substrates such as nanoscale pits, pores, trenches, flexible polymers, and textiles. This will require conformal processes such as atomic layer deposition (ALD) for every active functional component of the battery. In this paper, we explore the deposition and electrochemical properties of SnO 2, SnN y, and SnO xN y thin films as TFSSB anode materials, grown by ALD using tetrakisdimethylamido(tin), H 2O, and N 2 plasma as precursors. By controlling the dose ratio between H 2O and N 2, the N–O fraction can be tuned between 0% N and 95% N. The electrochemical properties of these materials were tested across a composition range varying from pure SnO 2, to SnON intermediates, and pure SnNy. In TFSSBs, the SnNy anodes are found to be more stable during cycling than the SnO 2 or SnO xN y films, with an initial reversible capacity beyond that of Li–Sn alloying, retaining 75% of their capacity over 200 cycles compared to only 50% for SnO 2. Lastly, the performance of the SnO xN y anodes indicates that SnN y anodes should not be negatively impacted by small levels of O contamination.
ORCiD logo [1] ;  [2] ;  [3] ;  [4] ; ORCiD logo [4] ; ORCiD logo [2] ;  [3] ;  [5]
  1. Univ. of Maryland, College Park, MD (United States). Institute for Systems Research
  2. Univ. of Maryland, College Park, MD (United States). Department of Materials Science and Engineering
  3. Univ. of Maryland, College Park, MD (United States). Department of Chemistry
  4. Sandia National Lab. (SNL-CA), Livermore, CA (United States). Materials Physics Department
  5. Univ. of Maryland, College Park, MD (United States). Institute for Systems Research, Department of Materials Science and Engineering and Institute for Research in Electronics and Applied Physics
Publication Date:
Report Number(s):
Journal ID: ISSN 0897-4756; 662738
Grant/Contract Number:
AC04-94AL85000; SC0001160; NA0003525
Accepted Manuscript
Journal Name:
Chemistry of Materials
Additional Journal Information:
Journal Volume: 30; Journal Issue: 8; Journal ID: ISSN 0897-4756
American Chemical Society (ACS)
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22); USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
OSTI Identifier: