Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry
Abstract
Three-dimensional thin-film solid-state batteries (3D TSSB) were proposed by Long et al. in 2004 as a structure-based approach to simultaneously increase energy and power densities. Here, we report experimental realization of fully conformal 3D TSSBs, demonstrating the simultaneous power-and-energy benefits of 3D structuring. All active battery components—electrodes, solid electrolyte, and current collectors—were deposited by atomic layer deposition (ALD) onto standard CMOS processable silicon wafers microfabricated to form arrays of deep pores with aspect ratios up to approximately 10. The cells utilize an electrochemically prelithiated LiV2O5 cathode, a very thin (40–100 nm) Li2PO2N solid electrolyte, and a SnNx anode. The fabrication process occurs entirely at or below 250 °C, promising compatibility with a variety of substrates as well as integrated circuits. The multilayer battery structure enabled all-ALD solid-state cells to deliver 37 μAh/cm2·μm (normalized to cathode thickness) with only 0.02% per-cycle capacity loss. Conformal fabrication of full cells over 3D substrates increased the areal discharge capacity by an order of magnitude while simulteneously improving power performance, a trend consistent with a finite element model. Furthermore, this work shows that the exceptional conformality of ALD, combined with conventional semiconductor fabrication methods, provides an avenue for the successful realization of long-sought 3D TSSBsmore »
- Authors:
-
[1];
[1];
[4];
[1]
- Univ. of Maryland, College Park, MD (United States)
- American Society for Engineering Education, Washington, D.C. (United States)
- The Johns Hopkins Univ. Applied Physics Lab., Laurel, MD (United States)
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States); Energy Frontier Research Centers (EFRC) (United States). Nanostructures for Electrical Energy Storage (NEES)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1464200
- Report Number(s):
- SAND-2018-8254J
Journal ID: ISSN 1936-0851; 666442
- Grant/Contract Number:
- AC04-94AL85000
- Resource Type:
- Accepted Manuscript
- Journal Name:
- ACS Nano
- Additional Journal Information:
- Journal Volume: 12; Journal Issue: 5; Journal ID: ISSN 1936-0851
- Publisher:
- American Chemical Society (ACS)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 25 ENERGY STORAGE; conformal battery; energy storage; solid-state battery; three-dimensional energy storage; three-dimensional solid-state battery
Citation Formats
Pearse, Alexander, Schmitt, Thomas, Sahadeo, Emily, Stewart, David M., Kozen, Alexander, Gerasopoulos, Konstantinos, Talin, Albert Alec, Lee, Sang Bok, Rubloff, Gary W., and Gregorczyk, Keith E. Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry. United States: N. p., 2018.
Web. doi:10.1021/acsnano.7b08751.
Pearse, Alexander, Schmitt, Thomas, Sahadeo, Emily, Stewart, David M., Kozen, Alexander, Gerasopoulos, Konstantinos, Talin, Albert Alec, Lee, Sang Bok, Rubloff, Gary W., & Gregorczyk, Keith E. Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry. United States. https://doi.org/10.1021/acsnano.7b08751
Pearse, Alexander, Schmitt, Thomas, Sahadeo, Emily, Stewart, David M., Kozen, Alexander, Gerasopoulos, Konstantinos, Talin, Albert Alec, Lee, Sang Bok, Rubloff, Gary W., and Gregorczyk, Keith E. Tue .
"Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry". United States. https://doi.org/10.1021/acsnano.7b08751. https://www.osti.gov/servlets/purl/1464200.
@article{osti_1464200,
title = {Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry},
author = {Pearse, Alexander and Schmitt, Thomas and Sahadeo, Emily and Stewart, David M. and Kozen, Alexander and Gerasopoulos, Konstantinos and Talin, Albert Alec and Lee, Sang Bok and Rubloff, Gary W. and Gregorczyk, Keith E.},
abstractNote = {Three-dimensional thin-film solid-state batteries (3D TSSB) were proposed by Long et al. in 2004 as a structure-based approach to simultaneously increase energy and power densities. Here, we report experimental realization of fully conformal 3D TSSBs, demonstrating the simultaneous power-and-energy benefits of 3D structuring. All active battery components—electrodes, solid electrolyte, and current collectors—were deposited by atomic layer deposition (ALD) onto standard CMOS processable silicon wafers microfabricated to form arrays of deep pores with aspect ratios up to approximately 10. The cells utilize an electrochemically prelithiated LiV2O5 cathode, a very thin (40–100 nm) Li2PO2N solid electrolyte, and a SnNx anode. The fabrication process occurs entirely at or below 250 °C, promising compatibility with a variety of substrates as well as integrated circuits. The multilayer battery structure enabled all-ALD solid-state cells to deliver 37 μAh/cm2·μm (normalized to cathode thickness) with only 0.02% per-cycle capacity loss. Conformal fabrication of full cells over 3D substrates increased the areal discharge capacity by an order of magnitude while simulteneously improving power performance, a trend consistent with a finite element model. Furthermore, this work shows that the exceptional conformality of ALD, combined with conventional semiconductor fabrication methods, provides an avenue for the successful realization of long-sought 3D TSSBs which provide power performance scaling in regimes inaccessible to planar form factor cells.},
doi = {10.1021/acsnano.7b08751},
journal = {ACS Nano},
number = 5,
volume = 12,
place = {United States},
year = {Tue Apr 24 00:00:00 EDT 2018},
month = {Tue Apr 24 00:00:00 EDT 2018}
}
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Figures / Tables:
Figure 1: Methods of improving energy storage metrics for thin film solid state batteries. Increasing the electrode thickness scales energy density at the expense of power density due to the rapid increase in the characteristic diffusion time for ions in the thick electrode. Fabricating TSSBs in a 3D structure bothmore »
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