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Title: Tutorial: Understanding residual stress in polycrystalline thin films through real-time measurements and physical models

Authors:
 [1] ;  [1]
  1. School of Engineering, Brown University, Providence, Rhode Island 02912-9104, USA
Publication Date:
Grant/Contract Number:
SC0008799
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 119; Journal Issue: 19; Related Information: CHORUS Timestamp: 2018-02-14 21:42:16; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
Language:
English
OSTI Identifier:
1421098