Tunability of indium tin oxide materials for mid-infrared plasmonics applications
Abstract
Transparent conductive oxides (TCOs) have emerged as alternative plasmonic materials in recent years to replace noble metals. The advantages of TCOs include CMOS compatibility, tunability of optical and structural properties, and reduced losses. In this work, we demonstrate how post-deposition annealing of indium tin oxide (ITO) films in oxygen atmosphere allows for tuning their optical dispersion properties to the mid-infrared spectral range while simultaneously reducing their absorption losses. In particular, we show a materials strategy that extends the epsilon-near-zero (ENZ) point of ITO from the near-infrared to the mid-infrared range. This is demonstrated by fabricating periodic arrays of ITO discs of varying diameters and characterizing their plasmonic resonances in the mid-infrared range from λ = 5 to 10 µm. The developed ITO plasmonic structures pave the way to the development of novel infrared active devices for sensing and spectroscopy on a silicon-compatible platform.
- Authors:
-
- Boston Univ., Boston, MA (United States)
- Columbia Univ., New York, NY (United States)
- Publication Date:
- Research Org.:
- Boston Univ., MA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1418639
- Grant/Contract Number:
- SC0012704
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Optical Materials Express
- Additional Journal Information:
- Journal Volume: 7; Journal Issue: 8; Journal ID: ISSN 2159-3930
- Publisher:
- Optical Society of America (OSA)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Wang, Yu, Overvig, Adam C., Shrestha, Sajan, Zhang, Ran, Wang, Ren, Yu, Nanfang, and Dal Negro, Luca. Tunability of indium tin oxide materials for mid-infrared plasmonics applications. United States: N. p., 2017.
Web. doi:10.1364/OME.7.002727.
Wang, Yu, Overvig, Adam C., Shrestha, Sajan, Zhang, Ran, Wang, Ren, Yu, Nanfang, & Dal Negro, Luca. Tunability of indium tin oxide materials for mid-infrared plasmonics applications. United States. https://doi.org/10.1364/OME.7.002727
Wang, Yu, Overvig, Adam C., Shrestha, Sajan, Zhang, Ran, Wang, Ren, Yu, Nanfang, and Dal Negro, Luca. Thu .
"Tunability of indium tin oxide materials for mid-infrared plasmonics applications". United States. https://doi.org/10.1364/OME.7.002727. https://www.osti.gov/servlets/purl/1418639.
@article{osti_1418639,
title = {Tunability of indium tin oxide materials for mid-infrared plasmonics applications},
author = {Wang, Yu and Overvig, Adam C. and Shrestha, Sajan and Zhang, Ran and Wang, Ren and Yu, Nanfang and Dal Negro, Luca},
abstractNote = {Transparent conductive oxides (TCOs) have emerged as alternative plasmonic materials in recent years to replace noble metals. The advantages of TCOs include CMOS compatibility, tunability of optical and structural properties, and reduced losses. In this work, we demonstrate how post-deposition annealing of indium tin oxide (ITO) films in oxygen atmosphere allows for tuning their optical dispersion properties to the mid-infrared spectral range while simultaneously reducing their absorption losses. In particular, we show a materials strategy that extends the epsilon-near-zero (ENZ) point of ITO from the near-infrared to the mid-infrared range. This is demonstrated by fabricating periodic arrays of ITO discs of varying diameters and characterizing their plasmonic resonances in the mid-infrared range from λ = 5 to 10 µm. The developed ITO plasmonic structures pave the way to the development of novel infrared active devices for sensing and spectroscopy on a silicon-compatible platform.},
doi = {10.1364/OME.7.002727},
journal = {Optical Materials Express},
number = 8,
volume = 7,
place = {United States},
year = {Thu Jul 06 00:00:00 EDT 2017},
month = {Thu Jul 06 00:00:00 EDT 2017}
}
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