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This content will become publicly available on August 17, 2018

Title: Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching

Authors:
; ; ; ; ; ;
Publication Date:
Grant/Contract Number:
AC02-06CH11357
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Volume: 35; Journal Issue: 6; Related Information: CHORUS Timestamp: 2018-02-14 21:17:31; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society/AIP
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1375484