Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching
- Authors:
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1375484
- Grant/Contract Number:
- AC02-06CH11357
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Journal of Vacuum Science and Technology B
- Additional Journal Information:
- Journal Name: Journal of Vacuum Science and Technology B Journal Volume: 35 Journal Issue: 6; Journal ID: ISSN 2166-2746
- Publisher:
- American Vacuum Society/AIP
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Li, Kenan, Wojcik, Michael J., Divan, Ralu, Ocola, Leonidas E., Shi, Bing, Rosenmann, Daniel, and Jacobsen, Chris. Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching. United States: N. p., 2017.
Web. doi:10.1116/1.4991794.
Li, Kenan, Wojcik, Michael J., Divan, Ralu, Ocola, Leonidas E., Shi, Bing, Rosenmann, Daniel, & Jacobsen, Chris. Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching. United States. https://doi.org/10.1116/1.4991794
Li, Kenan, Wojcik, Michael J., Divan, Ralu, Ocola, Leonidas E., Shi, Bing, Rosenmann, Daniel, and Jacobsen, Chris. Thu .
"Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching". United States. https://doi.org/10.1116/1.4991794.
@article{osti_1375484,
title = {Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching},
author = {Li, Kenan and Wojcik, Michael J. and Divan, Ralu and Ocola, Leonidas E. and Shi, Bing and Rosenmann, Daniel and Jacobsen, Chris},
abstractNote = {},
doi = {10.1116/1.4991794},
journal = {Journal of Vacuum Science and Technology B},
number = 6,
volume = 35,
place = {United States},
year = {Thu Aug 17 00:00:00 EDT 2017},
month = {Thu Aug 17 00:00:00 EDT 2017}
}
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1116/1.4991794
https://doi.org/10.1116/1.4991794
Other availability
Search WorldCat to find libraries that may hold this journal
Cited by: 20 works
Citation information provided by
Web of Science
Web of Science
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Metal-Assisted Chemical Etching of Silicon: A Review
journal, September 2010
- Huang, Zhipeng; Geyer, Nadine; Werner, Peter
- Advanced Materials, Vol. 23, Issue 2, p. 285-308
Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures
journal, July 2005
- Marty, F.; Rousseau, L.; Saadany, B.
- Microelectronics Journal, Vol. 36, Issue 7
Hard x-ray scanning imaging achieved with bonded multilayer Laue lenses
journal, January 2017
- Huang, Xiaojing; Xu, Weihe; Nazaretski, Evgeny
- Optics Express, Vol. 25, Issue 8
Vertical directionality-controlled metal-assisted chemical etching for ultrahigh aspect ratio nanoscale structures
journal, November 2014
- Tiberio, Richard C.; Rooks, Michael J.; Chang, Chieh
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 32, Issue 6
Direct e-beam writing of dense and high aspect ratio nanostructures in thick layers of PMMA for electroplating
journal, July 2010
- Gorelick, Sergey; Guzenko, Vitaliy A.; Vila-Comamala, Joan
- Nanotechnology, Vol. 21, Issue 29
Interlaced zone plate optics for hard X-ray imaging in the 10 nm range
journal, March 2017
- Mohacsi, Istvan; Vartiainen, Ismo; Rösner, Benedikt
- Scientific Reports, Vol. 7, Issue 1
Zone-Doubling Technique to Produce Ultrahigh-Resolution X-Ray Optics
journal, December 2007
- Jefimovs, K.; Vila-Comamala, J.; Pilvi, T.
- Physical Review Letters, Vol. 99, Issue 26
New diamond nanofabrication process for hard x-ray zone plates
journal, November 2011
- Uhlén, Fredrik; Lindqvist, Sandra; Nilsson, Daniel
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 6
Silicon nanostructures from electroless electrochemical etching
journal, February 2005
- Kolasinski, Kurt W.
- Current Opinion in Solid State and Materials Science, Vol. 9, Issue 1-2, p. 73-83
Demonstration of 12 nm Resolution Fresnel Zone Plate Lens based Soft X-ray Microscopy
journal, January 2009
- Chao, Weilun; Kim, Jihoon; Rekawa, Senajith
- Optics Express, Vol. 17, Issue 20
Development characteristics of polymethyl methacrylate in alcohol/water mixtures: a lithography and Raman spectroscopy study
journal, December 2015
- Ocola, Leonidas E.; Costales, Maya; Gosztola, David J.
- Nanotechnology, Vol. 27, Issue 3
Advanced thin film technology for ultrahigh resolution X-ray microscopy
journal, October 2009
- Vila-Comamala, Joan; Jefimovs, Konstantins; Raabe, Jörg
- Ultramicroscopy, Vol. 109, Issue 11
Porosity control in metal-assisted chemical etching of degenerately doped silicon nanowires
journal, July 2012
- Balasundaram, Karthik; Sadhu, Jyothi S.; Shin, Jae Cheol
- Nanotechnology, Vol. 23, Issue 30
Nanofabrication of high aspect ratio 24 nm x-ray zone plates for x-ray imaging applications
journal, January 2007
- Feng, Yan; Feser, Michael; Lyon, Alan
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6
High-efficiency multilevel zone plates for keV X-rays
journal, October 1999
- Di Fabrizio, E.; Romanato, F.; Gentili, M.
- Nature, Vol. 401, Issue 6756
Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling
journal, April 2013
- Mayer, Marcel; Keskinbora, Kahraman; Grévent, Corinne
- Journal of Synchrotron Radiation, Vol. 20, Issue 3
Fabrication of Single-Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles
journal, February 2006
- Peng, K. Q.; Hu, J. J.; Yan, Y. J.
- Advanced Functional Materials, Vol. 16, Issue 3, p. 387-394
High aspect ratio silicon etch: A review
journal, September 2010
- Wu, Banqiu; Kumar, Ajay; Pamarthy, Sharma
- Journal of Applied Physics, Vol. 108, Issue 5
Zone plates with high efficiency in high orders of diffraction described by dynamical theory
journal, October 1997
- Schneider, G.
- Applied Physics Letters, Vol. 71, Issue 16
Multilayer on-chip stacked Fresnel zone plates: Hard x-ray fabrication and soft x-ray simulations
journal, November 2015
- Li, Kenan; Wojcik, Michael J.; Ocola, Leonidas E.
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 33, Issue 6
CASINO V2.42—A Fast and Easy-to-use Modeling Tool for Scanning Electron Microscopy and Microanalysis Users
journal, January 2007
- Drouin, Dominique; Couture, Alexandre Réal; Joly, Dany
- Scanning, Vol. 29, Issue 3
Coupled wave description of the diffraction by zone plates with high aspect ratios
journal, May 1992
- Maser, Jörg; Schmahl, Günter
- Optics Communications, Vol. 89, Issue 2-4
Dense high aspect ratio hydrogen silsesquioxane nanostructures by 100 keV electron beam lithography
journal, June 2010
- Vila-Comamala, Joan; Gorelick, Sergey; Guzenko, Vitaliy A.
- Nanotechnology, Vol. 21, Issue 28
Metal-assisted chemical etching in HF/H2O2 produces porous silicon
journal, October 2000
- Li, X.; Bohn, P. W.
- Applied Physics Letters, Vol. 77, Issue 16
Efficient concentration of high-energy x-rays for diffraction-limited imaging resolution
journal, January 2017
- Cesar da Silva, Julio; Pacureanu, Alexandra; Yang, Yang
- Optica, Vol. 4, Issue 5
Ultra-high aspect ratio high-resolution nanofabrication for hard X-ray diffractive optics
journal, June 2014
- Chang, Chieh; Sakdinawat, Anne
- Nature Communications, Vol. 5, Issue 1
Fresnel zone plate stacking in the intermediate field for high efficiency focusing in the hard X-ray regime
journal, January 2014
- Gleber, Sophie-Charlotte; Wojcik, Michael; Liu, Jie
- Optics Express, Vol. 22, Issue 23
Ultra-high resolution zone-doubled
diffractive X-ray optics for the multi-keV regime
journal, December 2010
- Vila-Comamala, Joan; Gorelick, Sergey; Färm, Elina
- Optics Express, Vol. 19, Issue 1