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Title: Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates

Abstract

Zone plates are diffractive optics commonly used in X-ray microscopes. Here, we present a wet-chemical approach for fabricating high aspect ratio Pd/Si zone plate optics aimed at the hard X-ray regime. A Si zone plate mold is fabricated via metal-assisted chemical etching (MACE) and further metalized with Pd via electroless deposition (ELD). MACE results in vertical Si zones with high aspect ratios. The observed MACE rate with our zone plate design is 700 nm/min. The ELD metallization yields a Pd density of 10.7 g/cm3, a value slightly lower than the theoretical density of 12 g/cm3. Fabricated zone plates have a grid design, 1:1 line-to-space-ratio, 30 nm outermost zone width, and an aspect ratio of 30:1. At 9 keV X-ray energy, the zone plate device shows a first order diffraction efficiency of 1.9%, measured at the MAX IV NanoMAX beamline. With this work, the possibility is opened to fabricate X-ray zone plates with low-cost etching and metallization methods.

Authors:
ORCiD logo [1];  [1];  [1];  [1];  [2];  [3];  [3]; ORCiD logo [1]
  1. KTH Royal Inst. of Technology, Stockholm (Sweden)
  2. Lund Univ. (Sweden)
  3. SLAC National Accelerator Lab., Menlo Park, CA (United States)
Publication Date:
Research Org.:
SLAC National Accelerator Lab., Menlo Park, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1633950
Grant/Contract Number:  
AC02-76SF00515
Resource Type:
Accepted Manuscript
Journal Name:
Micromachines
Additional Journal Information:
Journal Volume: 11; Journal Issue: 3; Journal ID: ISSN 2072-666X
Publisher:
MDPI
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Akan, Rabia, Frisk, Thomas, Lundberg, Fabian, Ohlin, Hanna, Johansson, Ulf, Li, Kenan, Sakdinawat, Anne, and Vogt, Ulrich. Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates. United States: N. p., 2020. Web. doi:10.3390/mi11030301.
Akan, Rabia, Frisk, Thomas, Lundberg, Fabian, Ohlin, Hanna, Johansson, Ulf, Li, Kenan, Sakdinawat, Anne, & Vogt, Ulrich. Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates. United States. doi:https://doi.org/10.3390/mi11030301
Akan, Rabia, Frisk, Thomas, Lundberg, Fabian, Ohlin, Hanna, Johansson, Ulf, Li, Kenan, Sakdinawat, Anne, and Vogt, Ulrich. Fri . "Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates". United States. doi:https://doi.org/10.3390/mi11030301. https://www.osti.gov/servlets/purl/1633950.
@article{osti_1633950,
title = {Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates},
author = {Akan, Rabia and Frisk, Thomas and Lundberg, Fabian and Ohlin, Hanna and Johansson, Ulf and Li, Kenan and Sakdinawat, Anne and Vogt, Ulrich},
abstractNote = {Zone plates are diffractive optics commonly used in X-ray microscopes. Here, we present a wet-chemical approach for fabricating high aspect ratio Pd/Si zone plate optics aimed at the hard X-ray regime. A Si zone plate mold is fabricated via metal-assisted chemical etching (MACE) and further metalized with Pd via electroless deposition (ELD). MACE results in vertical Si zones with high aspect ratios. The observed MACE rate with our zone plate design is 700 nm/min. The ELD metallization yields a Pd density of 10.7 g/cm3, a value slightly lower than the theoretical density of 12 g/cm3. Fabricated zone plates have a grid design, 1:1 line-to-space-ratio, 30 nm outermost zone width, and an aspect ratio of 30:1. At 9 keV X-ray energy, the zone plate device shows a first order diffraction efficiency of 1.9%, measured at the MAX IV NanoMAX beamline. With this work, the possibility is opened to fabricate X-ray zone plates with low-cost etching and metallization methods.},
doi = {10.3390/mi11030301},
journal = {Micromachines},
number = 3,
volume = 11,
place = {United States},
year = {2020},
month = {3}
}

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