Tunable hard x-ray nanofocusing with Fresnel zone plates fabricated using deep etching

Li, Kenan; Ali, Sajid; Wojcik, Michael; De Andrade, Vincent; Huang, Xiaojing; Yan, Hanfei; Chu, Yong S.; Nazaretski, Evgeny; Pattammattel, Ajith; Jacobsen, Chris

doi:10.1364/OPTICA.387445

Title: Tunable hard x-ray nanofocusing with Fresnel zone plates fabricated using deep etching

Authors:

; Ali, Sajid; Wojcik, Michael; De Andrade, Vincent; Huang, Xiaojing; Yan, Hanfei; Chu, Yong S.; Nazaretski, Evgeny; Pattammattel, Ajith;

Publication Date:: Wed Apr 29 00:00:00 EDT 2020

Research Org.:: Argonne National Laboratory (ANL), Argonne, IL (United States); Brookhaven National Laboratory (BNL), Upton, NY (United States); SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

OSTI Identifier:: 1616218

Alternate Identifier(s):: OSTI ID: 1616271; OSTI ID: 1616942; OSTI ID: 1638148

Report Number(s):: BNL-215880-2020-JAAM
Journal ID: ISSN 2334-2536

Grant/Contract Number:: AC02-06CH11357; SC0012704; R01-MH115265; AC02-76SF00515

Resource Type:: Published Article

Journal Name:: Optica

Additional Journal Information:: Journal Name: Optica Journal Volume: 7 Journal Issue: 5; Journal ID: ISSN 2334-2536

Publisher:: Optical Society of America

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Li, Kenan, Ali, Sajid, Wojcik, Michael, De Andrade, Vincent, Huang, Xiaojing, Yan, Hanfei, Chu, Yong S., Nazaretski, Evgeny, Pattammattel, Ajith, and Jacobsen, Chris. Tunable hard x-ray nanofocusing with Fresnel zone plates fabricated using deep etching.  United States: N. p., 2020. 
Web.  doi:10.1364/OPTICA.387445.

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                    Li, Kenan, Ali, Sajid, Wojcik, Michael, De Andrade, Vincent, Huang, Xiaojing, Yan, Hanfei, Chu, Yong S., Nazaretski, Evgeny, Pattammattel, Ajith, & Jacobsen, Chris. Tunable hard x-ray nanofocusing with Fresnel zone plates fabricated using deep etching.  United States.  https://doi.org/10.1364/OPTICA.387445

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                    Li, Kenan, Ali, Sajid, Wojcik, Michael, De Andrade, Vincent, Huang, Xiaojing, Yan, Hanfei, Chu, Yong S., Nazaretski, Evgeny, Pattammattel, Ajith, and Jacobsen, Chris. Wed .  
"Tunable hard x-ray nanofocusing with Fresnel zone plates fabricated using deep etching".  United States.  https://doi.org/10.1364/OPTICA.387445.

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@article{osti_1616218,

  title        = {Tunable hard x-ray nanofocusing with Fresnel zone plates fabricated using deep etching},

  author       = {Li, Kenan and Ali, Sajid and Wojcik, Michael and De Andrade, Vincent and Huang, Xiaojing and Yan, Hanfei and Chu, Yong S. and Nazaretski, Evgeny and Pattammattel, Ajith and Jacobsen, Chris},

  abstractNote = {},

  doi          = {10.1364/OPTICA.387445},

  journal      = {Optica},

  number       = 5,

  volume       = 7,

  place        = {United States},

  year         = {Wed Apr 29 00:00:00 EDT 2020},

  month        = {Wed Apr 29 00:00:00 EDT 2020}

}

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Title: Tunable hard x-ray nanofocusing with Fresnel zone plates fabricated using deep etching

Citation Formats

Development of scanning x-ray fluorescence microscope with spatial resolution of 30nm using Kirkpatrick-Baez mirror optics journal, October 2006

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Systematic efficiency study of line-doubled zone plates journal, June 2017

Zone plates with high efficiency in high orders of diffraction described by dynamical theory journal, October 1997

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Development of scanning x-ray fluorescence microscope with spatial resolution of 30nm using Kirkpatrick-Baez mirror optics
journal, October 2006

X-ray zone plates with 25 aspect ratio using a 2-μm-thick ultrananocrystalline diamond mold
journal, January 2014

Vertical directionality-controlled metal-assisted chemical etching for ultrahigh aspect ratio nanoscale structures
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Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography
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Real space soft x-ray imaging at 10 nm spatial resolution
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The correction of electron lens aberrations
journal, September 2015

Fabrication of Fresnel zone plates for hard X-rays
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journal, March 2017

Phase zone plates for x rays and the extreme uv
journal, January 1974

Nanofabrication of high aspect ratio 24 nm x-ray zone plates for x-ray imaging applications
journal, January 2007

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journal, June 2017

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journal, October 1997

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journal, July 2008

The Effects of Manufacturing Inaccuracies on the Imaging Properties of Fresnel Zone Plates
journal, October 1983

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journal, May 1999

Unified Approach to Ultrasonic Light Diffraction
journal, July 1967

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conference, August 2017

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journal, September 2014

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conference, September 1999

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journal, November 2017

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conference, March 1982

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journal, October 2000

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journal, December 1985

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journal, March 2009

Ultra-high aspect ratio high-resolution nanofabrication for hard X-ray diffractive optics
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journal, December 2007

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conference, November 2004

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journal, April 2010

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journal, January 2014

X-ray focusing with efficient high-NA multilayer Laue lenses
journal, November 2017

X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
journal, July 1993

Design and performance of a scanning ptychography microscope
journal, March 2014

Hard x-ray nanoprobe based on refractive x-ray lenses
journal, September 2005

Resolution in soft X-ray microscopes
journal, November 1992

Electron ptychography of 2D materials to deep sub-ångström resolution
journal, July 2018

Hard-X-Ray Lensless Imaging of Extended Objects
journal, January 2007

Nanoscale silicon-on-insulator deformation induced by stressed liner structures
journal, April 2011

Coupled wave description of the diffraction by zone plates with high aspect ratios
journal, May 1992

Hard x-ray nanofocusing by multilayer Laue lenses
journal, June 2014

Relative merits and limiting factors for x-ray and electron microscopy of thick, hydrated organic materials
journal, January 2018

Efficient concentration of high-energy x-rays for diffraction-limited imaging resolution
journal, January 2017

Single-nanometer focusing of hard x-rays by Kirkpatrick–Baez mirrors
journal, September 2011

A Study in Diffraction Microscopy with Special Reference to X-Rays
journal, January 1952