Review Article: Reactions of fluorine atoms with silicon, revisited, again
Journal Article
·
· Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
- Department of Chemical and Biomolecular Engineering, University of Houston, Engineering Bldg. D, 4800 Calhoun Rd., Houston, Texas 77204
- Sponsoring Organization:
- USDOE
- Grant/Contract Number:
- SC0001319; DESC0001319
- OSTI ID:
- 1361942
- Alternate ID(s):
- OSTI ID: 1420717
- Journal Information:
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Vol. 35 Journal Issue: 5; ISSN 0734-2101
- Publisher:
- American Vacuum SocietyCopyright Statement
- Country of Publication:
- United States
- Language:
- English
Cited by: 36 works
Citation information provided by
Web of Science
Web of Science
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·
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