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Title: Review Article: Reactions of fluorine atoms with silicon, revisited, again

Authors:
 [1]
  1. Department of Chemical and Biomolecular Engineering, University of Houston, Engineering Bldg. D, 4800 Calhoun Rd., Houston, Texas 77204
Publication Date:
Grant/Contract Number:
SC0001319; DESC0001319
Type:
Published Article
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 35; Journal Issue: 5; Related Information: CHORUS Timestamp: 2017-06-08 13:18:10; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1361942
Alternate Identifier(s):
OSTI ID: 1420717