Review Article: Reactions of fluorine atoms with silicon, revisited, again

Donnelly, Vincent M.

doi:10.1116/1.4983922

Title: Review Article: Reactions of fluorine atoms with silicon, revisited, again

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Authors:

Donnelly, Vincent M. ^[1]

Department of Chemical and Biomolecular Engineering, University of Houston, Engineering Bldg. D, 4800 Calhoun Rd., Houston, Texas 77204

Publication Date:: Wed May 31 00:00:00 EDT 2017

Sponsoring Org.:: USDOE

OSTI Identifier:: 1361942

Alternate Identifier(s):: OSTI ID: 1420717

Grant/Contract Number:: SC0001319; DESC0001319

Resource Type:: Published Article

Journal Name:: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films

Additional Journal Information:: Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Volume: 35 Journal Issue: 5; Journal ID: ISSN 0734-2101

Publisher:: American Vacuum Society

Country of Publication:: United States

Language:: English

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                    Donnelly, Vincent M. Review Article: Reactions of fluorine atoms with silicon, revisited, again.  United States: N. p., 2017. 
Web.  doi:10.1116/1.4983922.

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                    Donnelly, Vincent M. Review Article: Reactions of fluorine atoms with silicon, revisited, again.  United States.  https://doi.org/10.1116/1.4983922

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                    Donnelly, Vincent M. Wed .  
"Review Article: Reactions of fluorine atoms with silicon, revisited, again".  United States.  https://doi.org/10.1116/1.4983922.

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@article{osti_1361942,

  title        = {Review Article: Reactions of fluorine atoms with silicon, revisited, again},

  author       = {Donnelly, Vincent M.},

  abstractNote = {},

  doi          = {10.1116/1.4983922},

  journal      = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},

  number       = 5,

  volume       = 35,

  place        = {United States},

  year         = {Wed May 31 00:00:00 EDT 2017},

  month        = {Wed May 31 00:00:00 EDT 2017}

}

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