Purification of Nanoscale Electron-Beam-Induced Platinum Deposits via a Pulsed Laser-Induced Oxidation Reaction
Abstract
Platinum–carbon deposits made via electron-beam-induced deposition were purified in this study via a pulsed laser-induced oxidation reaction and erosion of the amorphous carbon to form pure platinum. Purification proceeds from the top down and is likely catalytically facilitated via the evolving platinum layer. Thermal simulations suggest a temperature threshold of ~485 K, and the purification rate is a function of the PtC5 thickness (80–360 nm) and laser pulse width (1–100 μs) in the ranges studied. The thickness dependence is attributed to the ~235 nm penetration depth of the PtC5 composite at the laser wavelength, and the pulse-width dependence is attributed to the increased temperatures achieved at longer pulse widths. Finally, remarkably fast purification is realized at cumulative laser exposure times of less than 1 s.
- Authors:
-
- Univ. of Tennessee, Knoxville, TN (United States)
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Utah State Univ., Logan, UT (United States)
- Graz Univ. of Technology (Austria)
- Univ. of Tennessee, Knoxville, TN (United States); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Publication Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
- Sponsoring Org.:
- USDOE Office of Science (SC)
- OSTI Identifier:
- 1286840
- Grant/Contract Number:
- AC05-00OR22725
- Resource Type:
- Accepted Manuscript
- Journal Name:
- ACS Applied Materials and Interfaces
- Additional Journal Information:
- Journal Volume: 6; Journal Issue: 23; Journal ID: ISSN 1944-8244
- Publisher:
- American Chemical Society (ACS)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; annealing; focused electron-beam-induced deposition; nanofabrication; platinum; pulsed laser; purificationannealing; purification
Citation Formats
Stanford, Michael G., Lewis, Brett B., Noh, Joo Hyon, Fowlkes, Jason Davidson, Roberts, Nicholas A., Plank, Harald, and Rack, Philip D. Purification of Nanoscale Electron-Beam-Induced Platinum Deposits via a Pulsed Laser-Induced Oxidation Reaction. United States: N. p., 2014.
Web. doi:10.1021/am506246z.
Stanford, Michael G., Lewis, Brett B., Noh, Joo Hyon, Fowlkes, Jason Davidson, Roberts, Nicholas A., Plank, Harald, & Rack, Philip D. Purification of Nanoscale Electron-Beam-Induced Platinum Deposits via a Pulsed Laser-Induced Oxidation Reaction. United States. https://doi.org/10.1021/am506246z
Stanford, Michael G., Lewis, Brett B., Noh, Joo Hyon, Fowlkes, Jason Davidson, Roberts, Nicholas A., Plank, Harald, and Rack, Philip D. Wed .
"Purification of Nanoscale Electron-Beam-Induced Platinum Deposits via a Pulsed Laser-Induced Oxidation Reaction". United States. https://doi.org/10.1021/am506246z. https://www.osti.gov/servlets/purl/1286840.
@article{osti_1286840,
title = {Purification of Nanoscale Electron-Beam-Induced Platinum Deposits via a Pulsed Laser-Induced Oxidation Reaction},
author = {Stanford, Michael G. and Lewis, Brett B. and Noh, Joo Hyon and Fowlkes, Jason Davidson and Roberts, Nicholas A. and Plank, Harald and Rack, Philip D.},
abstractNote = {Platinum–carbon deposits made via electron-beam-induced deposition were purified in this study via a pulsed laser-induced oxidation reaction and erosion of the amorphous carbon to form pure platinum. Purification proceeds from the top down and is likely catalytically facilitated via the evolving platinum layer. Thermal simulations suggest a temperature threshold of ~485 K, and the purification rate is a function of the PtC5 thickness (80–360 nm) and laser pulse width (1–100 μs) in the ranges studied. The thickness dependence is attributed to the ~235 nm penetration depth of the PtC5 composite at the laser wavelength, and the pulse-width dependence is attributed to the increased temperatures achieved at longer pulse widths. Finally, remarkably fast purification is realized at cumulative laser exposure times of less than 1 s.},
doi = {10.1021/am506246z},
journal = {ACS Applied Materials and Interfaces},
number = 23,
volume = 6,
place = {United States},
year = {Wed Nov 05 00:00:00 EST 2014},
month = {Wed Nov 05 00:00:00 EST 2014}
}
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Works referenced in this record:
Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective
journal, August 2009
- Botman, A.; Mulders, J. J. L.; Hagen, C. W.
- Nanotechnology, Vol. 20, Issue 37
Focused, Nanoscale Electron-Beam-Induced Deposition and Etching
journal, September 2006
- Randolph, S. J.; Fowlkes, J. D.; Rack, P. D.
- Critical Reviews in Solid State and Materials Sciences, Vol. 31, Issue 3
Resolution in focused electron- and ion-beam induced processing
journal, January 2007
- Utke, Ivo; Friedli, Vinzenz; Purrucker, Martin
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6
Understanding the Kinetics and Nanoscale Morphology of Electron-Beam-Induced Deposition via a Three-Dimensional Monte Carlo Simulation: The Effects of the Precursor Molecule and the Deposited Material
journal, September 2008
- Smith, Daryl A.; Fowlkes, Jason D.; Rack, Philip D.
- Small, Vol. 4, Issue 9
Fundamental Electron-Precursor-Solid Interactions Derived from Time-Dependent Electron-Beam-Induced Deposition Simulations and Experiments
journal, March 2010
- Fowlkes, Jason D.; Rack, Philip D.
- ACS Nano, Vol. 4, Issue 3
Analysis of electron beam induced deposition (EBID) of residual hydrocarbons in electron microscopy
journal, March 2007
- Rykaczewski, Konrad; White, William B.; Fedorov, Andrei G.
- Journal of Applied Physics, Vol. 101, Issue 5
Electron flux controlled switching between electron beam induced etching and deposition
journal, March 2007
- Toth, Milos; Lobo, Charlene J.; Hartigan, Gavin
- Journal of Applied Physics, Vol. 101, Issue 5
High-resolution magnetic Co supertips grown by a focused electron beam
journal, June 2002
- Utke, I.; Hoffmann, P.; Berger, R.
- Applied Physics Letters, Vol. 80, Issue 25
Nanofabrication of insulated scanning probes for electromechanical imaging in liquid solutions
journal, August 2010
- Noh, Joo Hyon; Nikiforov, Maxim; Kalinin, Sergei V.
- Nanotechnology, Vol. 21, Issue 36
Ultrasmall Functional Ferromagnetic Nanostructures Grown by Focused Electron-Beam-Induced Deposition
journal, September 2011
- Serrano-Ramón, Luis; Córdoba, Rosa; Rodríguez, Luis Alfredo
- ACS Nano, Vol. 5, Issue 10
Synthesis of Individually Tuned Nanomagnets for Nanomagnet Logic by Direct Write Focused Electron Beam Induced Deposition
journal, December 2012
- Gavagnin, Marco; Wanzenboeck, Heinz D.; Belić, Domagoj
- ACS Nano, Vol. 7, Issue 1
Nanofocusing in a metal–insulator–metal gap plasmon waveguide with a three-dimensional linear taper
journal, November 2012
- Choo, Hyuck; Kim, Myung-Ki; Staffaroni, Matteo
- Nature Photonics, Vol. 6, Issue 12, p. 838-844
Polarisation stabilisation of vertical cavity surface emitting lasers by minimally invasive focused electron beam triggered chemistry
journal, January 2011
- Utke, Ivo; Jenke, Martin G.; Röling, Christian
- Nanoscale, Vol. 3, Issue 7
Conductive dots, wires, and supertips for field electron emitters produced by electron-beam induced deposition on samples having increased temperature
journal, November 1996
- Koops, H. W. P.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 14, Issue 6
Integrated tungsten nanofiber field emission cathodes selectively grown by nanoscale electron beam-induced deposition
journal, May 2005
- Yang, X.; Simpson, M. L.; Randolph, S. J.
- Applied Physics Letters, Vol. 86, Issue 18
Variable tunneling barriers in FEBID based PtC metal-matrix nanocomposites as a transducing element for humidity sensing
journal, July 2013
- Kolb, Florian; Schmoltner, Kerstin; Huth, Michael
- Nanotechnology, Vol. 24, Issue 30
A Tunable Strain Sensor Using Nanogranular Metals
journal, November 2010
- Schwalb, Christian H.; Grimm, Christina; Baranowski, Markus
- Sensors, Vol. 10, Issue 11
Nanoscale lithography via electron beam induced deposition
journal, November 2008
- Guan, Yingfeng; Fowlkes, Jason D.; Retterer, Scott T.
- Nanotechnology, Vol. 19, Issue 50
Direct-Write Atomic Layer Deposition of High-Quality Pt Nanostructures: Selective Growth Conditions and Seed Layer Requirements
journal, May 2013
- Mackus, A. J. M.; Thissen, N. F. W.; Mulders, J. J. L.
- The Journal of Physical Chemistry C, Vol. 117, Issue 20
Maskless and Resist-Free Rapid Prototyping of Three-Dimensional Structures Through Electron Beam Induced Deposition (EBID) of Carbon in Combination with Metal-Assisted Chemical Etching (MaCE) of Silicon
journal, March 2010
- Rykaczewski, Konrad; Hildreth, Owen J.; Kulkarni, Dhaval
- ACS Applied Materials & Interfaces, Vol. 2, Issue 4
Electroplating using high-aspect-ratio microstructures fabricated by proton beam writing
journal, April 2009
- Seki, Y.; Furuta, Y.; Nishikawa, H.
- Microelectronic Engineering, Vol. 86, Issue 4-6
Inhibiting spontaneous etching of nanoscale electron beam induced etching features: Solutions for nanoscale repair of extreme ultraviolet lithography masks
journal, January 2008
- Lassiter, Matthew G.; Liang, Ted; Rack, Philip D.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 3
Advanced photolithographic mask repair using electron beams
journal, January 2005
- Liang, Ted; Frendberg, Eric; Lieberman, Barry
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 6
Nanoscale electron beam-induced deposition and purification of ruthenium for extreme ultraviolet lithography mask repair
journal, August 2014
- Noh, J. H.; Stanford, M. G.; Lewis, B. B.
- Applied Physics A, Vol. 117, Issue 4
Gas assisted focused electron beam induced etching of alumina
journal, January 2009
- Bret, T.; Afra, B.; Becker, R.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6
Microstructural analysis and Transport Properties of MoO and MoC nanostructures prepared by focused electron beam-induced deposition
journal, July 2014
- Makise, Kazumasa; Mitsuishi, Kazutaka; Shimojo, Masayuki
- Scientific Reports, Vol. 4, Issue 1
Superconductivity and metallic behavior in Pb x C y O δ structures prepared by focused electron beam induced deposition
journal, October 2014
- Winhold, M.; Weirich, P. M.; Schwalb, C. H.
- Applied Physics Letters, Vol. 105, Issue 16
Electrodes for carbon nanotube devices by focused electron beam induced deposition of gold
journal, January 2005
- Brintlinger, T.; Fuhrer, M. S.; Melngailis, J.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 6
Improving the conductivity of platinum-containing nano-structures created by electron-beam-induced deposition
journal, May 2008
- Botman, A.; Hesselberth, M.; Mulders, J. J. L.
- Microelectronic Engineering, Vol. 85, Issue 5-6
The influence of beam defocus on volume growth rates for electron beam induced platinum deposition
journal, November 2008
- Plank, H.; Gspan, C.; Dienstleder, M.
- Nanotechnology, Vol. 19, Issue 48
Rapid Prototyping of Site-Specific Nanocontacts by Electron and Ion Beam Assisted Direct-Write Nanolithography
journal, November 2004
- Gopal, Vidyut; Radmilovic, Velimir R.; Daraio, Chiara
- Nano Letters, Vol. 4, Issue 11
Purification of platinum and gold structures after electron-beam-induced deposition
journal, July 2006
- Botman, A.; Mulders, J. J. L.; Weemaes, R.
- Nanotechnology, Vol. 17, Issue 15
Reducing the resistivity of electron and ion beam assisted deposited Pt
journal, May 2007
- Langford, R. M.; Wang, T. -X.; Ozkaya, D.
- Microelectronic Engineering, Vol. 84, Issue 5-8
Formation of complex features using electron-beam direct-write decomposition of palladium acetate
journal, November 1992
- Stark, T. J.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 10, Issue 6
Single-crystal nanowires grown via electron-beam-induced deposition
journal, July 2008
- Klein, K. L.; Randolph, S. J.; Fowlkes, J. D.
- Nanotechnology, Vol. 19, Issue 34
Magnetotransport properties of high-quality cobalt nanowires grown by focused-electron-beam-induced deposition
journal, February 2009
- Fernández-Pacheco, A.; De Teresa, J. M.; Córdoba, R.
- Journal of Physics D: Applied Physics, Vol. 42, Issue 5
Effects of Water Vapour on Electron and Ion Beam Deposited Platinum
journal, August 2004
- Langford, Richard M.; Ozkaya, Dogan; Sheridan, J.
- Microscopy and Microanalysis, Vol. 10, Issue S02
Focused Electron Beam Induced Deposition of Si-Based Materials From SiOxCy to Stoichiometric SiO2: Chemical Compositions, Chemical-Etch Rates, and Deep Ultraviolet Optical Transmissions
journal, April 2007
- Perentes, A.; Hoffmann, P.
- Chemical Vapor Deposition, Vol. 13, Issue 4
A new sequential EBID process for the creation of pure Pt structures from MeCpPtMe 3
journal, March 2013
- Mehendale, S.; Mulders, J. J. L.; Trompenaars, P. H. F.
- Nanotechnology, Vol. 24, Issue 14
Electron-Beam-Assisted Oxygen Purification at Low Temperatures for Electron-Beam-Induced Pt Deposits: Towards Pure and High-Fidelity Nanostructures
journal, December 2013
- Plank, Harald; Noh, Joo Hyon; Fowlkes, Jason D.
- ACS Applied Materials & Interfaces, Vol. 6, Issue 2
Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H 2 O Reactions
journal, June 2014
- Geier, Barbara; Gspan, Christian; Winkler, Robert
- The Journal of Physical Chemistry C, Vol. 118, Issue 25
Post-deposition processes for nanostructures formed by electron beam induced deposition with Pt(PF3)4 precursor
journal, November 2008
- Takeguchi, M.; Shimojo, M.; Furuya, K.
- Applied Physics A, Vol. 93, Issue 2
Tuning the electrical conductivity of Pt-containing granular metals by postgrowth electron irradiation
journal, March 2011
- Porrati, F.; Sachser, R.; Schwalb, C. H.
- Journal of Applied Physics, Vol. 109, Issue 6
Enhanced by-product desorption via laser assisted electron beam induced deposition of W(CO) 6 with improved conductivity and resolution
journal, September 2013
- Roberts, Nicholas A.; Gonzalez, Carlos M.; Fowlkes, Jason D.
- Nanotechnology, Vol. 24, Issue 41
In situ laser processing in a scanning electron microscope
journal, July 2012
- Roberts, Nicholas A.; Magel, Gregory A.; Hartfield, Cheryl D.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 4
Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis
journal, May 2014
- Arnold, Georg; Timilsina, Rajendra; Fowlkes, Jason
- ACS Applied Materials & Interfaces, Vol. 6, Issue 10
Fundamental Proximity Effects in Focused Electron Beam Induced Deposition
journal, December 2011
- Plank, Harald; Smith, Daryl A.; Haber, Thomas
- ACS Nano, Vol. 6, Issue 1
Chemical sputtering of carbon films by simultaneous irradiation with argon ions and molecular oxygen
journal, September 2008
- Hopf, C.; Schlüter, M.; Schwarz-Selinger, T.
- New Journal of Physics, Vol. 10, Issue 9
Platinum Film Growth by Chemical Vapor Deposition Based on Autocatalytic Oxidative Decomposition
journal, January 2001
- Hiratani, Masahiko; Nabatame, Toshihide; Matsui, Yuichi
- Journal of The Electrochemical Society, Vol. 148, Issue 8
A molecular beam study of the adsorption and desorption of oxygen from a Pt(111) surface
journal, May 1981
- Campbell, C. T.; Ertl, G.; Kuipers, H.
- Surface Science, Vol. 107, Issue 1
The reactivity and auger chemical shift of oxygen adsorbed on platinum
journal, October 1977
- Matsushima, T.; Almy, D. B.; White, J. M.
- Surface Science, Vol. 67, Issue 1
Catalytic Purification of Directly Written Nanostructured Pt Microelectrodes
journal, September 2014
- Sachser, Roland; Reith, Heiko; Huzel, Daniel
- ACS Applied Materials & Interfaces, Vol. 6, Issue 18
Works referencing / citing this record:
Three-dimensional core–shell ferromagnetic nanowires grown by focused electron beam induced deposition
journal, June 2016
- Pablo-Navarro, Javier; Magén, César; de Teresa, José María
- Nanotechnology, Vol. 27, Issue 28
The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors
journal, January 2015
- Thorman, Rachel M.; Kumar T. P., Ragesh; Fairbrother, D. Howard
- Beilstein Journal of Nanotechnology, Vol. 6
Dynamics and fragmentation mechanism of (C 5 H 4 CH 3 )Pt(CH 3 ) 3 on SiO 2 surfaces
journal, January 2018
- Muthukumar, Kaliappan; Jeschke, Harald O.; Valentí, Roser
- Beilstein Journal of Nanotechnology, Vol. 9
Focused electron-beam-induced deposition for fabrication of highly durable and sensitive metallic AFM-IR probes
journal, June 2018
- Qian, Wen; Sun, Shuo; Song, Jingfeng
- Nanotechnology, Vol. 29, Issue 33
Pulsed Laser-Assisted Helium Ion Nanomachining of Monolayer Graphene—Direct-Write Kirigami Patterns
journal, September 2019
- Zhang, Cheng; Dyck, Ondrej; Garfinkel, David A.
- Nanomaterials, Vol. 9, Issue 10
Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods
journal, January 2015
- Szkudlarek, Aleksandra; Rodrigues Vaz, Alfredo; Zhang, Yucheng
- Beilstein Journal of Nanotechnology, Vol. 6
Plasmonic gold helices for the visible range fabricated by oxygen plasma purification of electron beam induced deposits
journal, December 2016
- Haverkamp, Caspar; Höflich, Katja; Jäckle, Sara
- Nanotechnology, Vol. 28, Issue 5
Direct-write single electron transistors by focused electron beam induced deposition
journal, April 2019
- Prima, Giorgia Di; Sachser, Roland; Trompenaars, Piet
- Nano Futures, Vol. 3, Issue 2
Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment
journal, January 2017
- Belić, Domagoj; Shawrav, Mostafa M.; Bertagnolli, Emmerich
- Beilstein Journal of Nanotechnology, Vol. 8
Exploring the air stability of PdSe2 via electrical transport measurements and defect calculations
journal, December 2019
- Hoffman, Anna N.; Gu, Yiyi; Liang, Liangbo
- npj 2D Materials and Applications, Vol. 3, Issue 1
Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods
text, January 2015
- Szkudlarek, Aleksandra; Vaz, Alfredo Rodrigues; Zhang, Yucheng
- ETH Zurich
Plasmonic Gold Helices for the visible range fabricated by oxygen plasma purification of electron beam induced deposits
text, January 2016
- Haverkamp, Caspar; Höflich, Katja; Jäckle, Sara
- arXiv
Pulsed Laser-Assisted Helium Ion Nanomachining of Monolayer Graphene—Direct-Write Kirigami Patterns
journal, September 2019
- Zhang, Cheng; Dyck, Ondrej; Garfinkel, David A.
- Nanomaterials, Vol. 9, Issue 10
Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition
journal, January 2017
- Spencer, Julie A.; Barclay, Michael; Gallagher, Miranda J.
- Beilstein Journal of Nanotechnology, Vol. 8
Direct writing of gold nanostructures with an electron beam: On the way to pure nanostructures by combining optimized deposition with oxygen-plasma treatment
journal, January 2017
- Belić, Domagoj; Shawrav, Mostafa M.; Bertagnolli, Emmerich
- Beilstein Journal of Nanotechnology, Vol. 8
Comparative study of post-growth annealing of Cu(hfac)2, Co2(CO)8 and Me2Au(acac) metal precursors deposited by FEBID
journal, January 2018
- Puydinger dos Santos, Marcos Vinicius; Szkudlarek, Aleksandra; Rydosz, Artur
- Beilstein Journal of Nanotechnology, Vol. 9