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Title: Inert gas enhanced laser-assisted purification of platinum electron-beam-induced deposits

Abstract

Electron-beam-induced deposition patterns, with composition of PtC 5, were purified using a pulsed laser-induced purification reaction to erode the amorphous carbon matrix and form pure platinum deposits. Enhanced mobility of residual H 2O molecules via a localized injection of inert Ar–H 2 (4%) is attributed to be the reactive gas species for purification of the deposits. Surface purification of deposits was realized at laser exposure times as low as 0.1 s. The ex situ purification reaction in the deposit interior was shown to be rate-limited by reactive gas diffusion into the deposit, and deposit contraction associated with the purification process caused some loss of shape retention. To circumvent the intrinsic flaws of the ex situ anneal process, in situ deposition and purification techniques were explored that resemble a direct write atomic layer deposition (ALD) process. First, we explored a laser-assisted electron-beam-induced deposition (LAEBID) process augmented with reactive gas that resulted in a 75% carbon reduction compared to standard EBID. Lastly, a sequential deposition plus purification process was also developed and resulted in deposition of pure platinum deposits with high fidelity and shape retention.

Authors:
 [1];  [1];  [1];  [2];  [2]
  1. Univ. of Tennessee, Knoxville, TN (United States)
  2. Univ. of Tennessee, Knoxville, TN (United States); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
1237631
Grant/Contract Number:  
AC05-00OR22725
Resource Type:
Accepted Manuscript
Journal Name:
ACS Applied Materials and Interfaces
Additional Journal Information:
Journal Volume: 7; Journal Issue: 35; Journal ID: ISSN 1944-8244
Publisher:
American Chemical Society
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; electron-beam-induced deposition; purification; atomic layer deposition; direct write; platinum

Citation Formats

Stanford, Michael G., Lewis, Brett B., Noh, Joo Hyon, Fowlkes, Jason Davidson, and Rack, Philip D. Inert gas enhanced laser-assisted purification of platinum electron-beam-induced deposits. United States: N. p., 2015. Web. doi:10.1021/acsami.5b02488.
Stanford, Michael G., Lewis, Brett B., Noh, Joo Hyon, Fowlkes, Jason Davidson, & Rack, Philip D. Inert gas enhanced laser-assisted purification of platinum electron-beam-induced deposits. United States. doi:10.1021/acsami.5b02488.
Stanford, Michael G., Lewis, Brett B., Noh, Joo Hyon, Fowlkes, Jason Davidson, and Rack, Philip D. Tue . "Inert gas enhanced laser-assisted purification of platinum electron-beam-induced deposits". United States. doi:10.1021/acsami.5b02488. https://www.osti.gov/servlets/purl/1237631.
@article{osti_1237631,
title = {Inert gas enhanced laser-assisted purification of platinum electron-beam-induced deposits},
author = {Stanford, Michael G. and Lewis, Brett B. and Noh, Joo Hyon and Fowlkes, Jason Davidson and Rack, Philip D.},
abstractNote = {Electron-beam-induced deposition patterns, with composition of PtC5, were purified using a pulsed laser-induced purification reaction to erode the amorphous carbon matrix and form pure platinum deposits. Enhanced mobility of residual H2O molecules via a localized injection of inert Ar–H2 (4%) is attributed to be the reactive gas species for purification of the deposits. Surface purification of deposits was realized at laser exposure times as low as 0.1 s. The ex situ purification reaction in the deposit interior was shown to be rate-limited by reactive gas diffusion into the deposit, and deposit contraction associated with the purification process caused some loss of shape retention. To circumvent the intrinsic flaws of the ex situ anneal process, in situ deposition and purification techniques were explored that resemble a direct write atomic layer deposition (ALD) process. First, we explored a laser-assisted electron-beam-induced deposition (LAEBID) process augmented with reactive gas that resulted in a 75% carbon reduction compared to standard EBID. Lastly, a sequential deposition plus purification process was also developed and resulted in deposition of pure platinum deposits with high fidelity and shape retention.},
doi = {10.1021/acsami.5b02488},
journal = {ACS Applied Materials and Interfaces},
number = 35,
volume = 7,
place = {United States},
year = {2015},
month = {6}
}

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Cited by: 8 works
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