Method and apparatus for making diamond-like carbon films
Abstract
Ion-assisted plasma enhanced deposition of diamond-like carbon (DLC) films on the surface of photovoltaic solar cells is accomplished with a method and apparatus for controlling ion energy. The quality of DLC layers is fine-tuned by a properly biased system of special electrodes and by exact control of the feed gas mixture compositions. Uniform (with degree of non-uniformity of optical parameters less than 5%) large area (more than 110 cm.sup.2) DLC films with optical parameters varied within the given range and with stability against harmful effects of the environment are achieved.
- Inventors:
-
- Golden, CO
- Indian Hills, CO
- Yerevan, AM
- Moscow, RU
- Issue Date:
- Research Org.:
- Midwest Research Institute, Kansas City, MO (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 985724
- Patent Number(s):
- 7459188
- Application Number:
- 11/002,611
- Assignee:
- Alliance for Sustainable Energy, LLC (Golden, CO)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC36-99GO10337
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 14 SOLAR ENERGY
Citation Formats
Pern, Fu-Jann, Touryan, Kenell J, Panosyan, Zhozef Retevos, and Gippius, Aleksey Alekseyevich. Method and apparatus for making diamond-like carbon films. United States: N. p., 2008.
Web.
Pern, Fu-Jann, Touryan, Kenell J, Panosyan, Zhozef Retevos, & Gippius, Aleksey Alekseyevich. Method and apparatus for making diamond-like carbon films. United States.
Pern, Fu-Jann, Touryan, Kenell J, Panosyan, Zhozef Retevos, and Gippius, Aleksey Alekseyevich. Tue .
"Method and apparatus for making diamond-like carbon films". United States. https://www.osti.gov/servlets/purl/985724.
@article{osti_985724,
title = {Method and apparatus for making diamond-like carbon films},
author = {Pern, Fu-Jann and Touryan, Kenell J and Panosyan, Zhozef Retevos and Gippius, Aleksey Alekseyevich},
abstractNote = {Ion-assisted plasma enhanced deposition of diamond-like carbon (DLC) films on the surface of photovoltaic solar cells is accomplished with a method and apparatus for controlling ion energy. The quality of DLC layers is fine-tuned by a properly biased system of special electrodes and by exact control of the feed gas mixture compositions. Uniform (with degree of non-uniformity of optical parameters less than 5%) large area (more than 110 cm.sup.2) DLC films with optical parameters varied within the given range and with stability against harmful effects of the environment are achieved.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 02 00:00:00 EST 2008},
month = {Tue Dec 02 00:00:00 EST 2008}
}