Vacuum compatible, high-speed, 2-D mirror tilt stage
Abstract
A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.
- Inventors:
-
- Crockett, CA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 916927
- Patent Number(s):
- 7273289
- Assignee:
- Euv LLC (Santa Clara, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Denham,, and Paul, E. Vacuum compatible, high-speed, 2-D mirror tilt stage. United States: N. p., 2007.
Web.
Denham,, & Paul, E. Vacuum compatible, high-speed, 2-D mirror tilt stage. United States.
Denham,, and Paul, E. Tue .
"Vacuum compatible, high-speed, 2-D mirror tilt stage". United States. https://www.osti.gov/servlets/purl/916927.
@article{osti_916927,
title = {Vacuum compatible, high-speed, 2-D mirror tilt stage},
author = {Denham, and Paul, E},
abstractNote = {A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 25 00:00:00 EDT 2007},
month = {Tue Sep 25 00:00:00 EDT 2007}
}
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