Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
Abstract
An ultra-high speed vacuum pump evacuation system includes a first stage ultra-high speed turbofan and a second stage conventional turbomolecular pump. The turbofan is either connected in series to a chamber to be evacuated, or is optionally disposed entirely within the chamber. The turbofan employs large diameter rotor blades operating at high linear blade velocity to impart an ultra-high pumping speed to a fluid. The second stage turbomolecular pump is fluidly connected downstream from the first stage turbofan. In operation, the first stage turbofan operates in a pre-existing vacuum, with the fluid asserting only small axial forces upon the rotor blades. The turbofan imparts a velocity to fluid particles towards an outlet at a high volume rate, but moderate compression ratio. The second stage conventional turbomolecular pump then compresses the fluid to pressures for evacuation by a roughing pump.
- Inventors:
- Issue Date:
- Research Org.:
- Universities Research Association, Inc., Washington, DC (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1175684
- Patent Number(s):
- 7021888
- Application Number:
- 10/737,570
- Assignee:
- Universities Research Association, Inc. (Washington, DC)
- Patent Classifications (CPCs):
-
F - MECHANICAL ENGINEERING F04 - POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS F04D - NON-POSITIVE-DISPLACEMENT PUMPS
- DOE Contract Number:
- AC02-76CH03000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Jostlein, Hans. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump. United States: N. p., 2006.
Web.
Jostlein, Hans. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump. United States.
Jostlein, Hans. Tue .
"Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump". United States. https://www.osti.gov/servlets/purl/1175684.
@article{osti_1175684,
title = {Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump},
author = {Jostlein, Hans},
abstractNote = {An ultra-high speed vacuum pump evacuation system includes a first stage ultra-high speed turbofan and a second stage conventional turbomolecular pump. The turbofan is either connected in series to a chamber to be evacuated, or is optionally disposed entirely within the chamber. The turbofan employs large diameter rotor blades operating at high linear blade velocity to impart an ultra-high pumping speed to a fluid. The second stage turbomolecular pump is fluidly connected downstream from the first stage turbofan. In operation, the first stage turbofan operates in a pre-existing vacuum, with the fluid asserting only small axial forces upon the rotor blades. The turbofan imparts a velocity to fluid particles towards an outlet at a high volume rate, but moderate compression ratio. The second stage conventional turbomolecular pump then compresses the fluid to pressures for evacuation by a roughing pump.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2006},
month = {4}
}