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Title: Ultra high vacuum heating and rotating specimen stage

Abstract

A heating and rotating specimen stage provides for simultaneous specimen heating and rotating. The stage is ideally suited for operation in ultrahigh vacuum (1.times.10.sup.-9 torr or less), but is useful at atmosphere and in pressurized systems as well. A specimen is placed on a specimen holder that is attached to a heater that, in turn, is attached to a top housing. The top housing is rotated relative to a bottom housing and electrically connected thereto by electrically conductive brushes. This stage is made of materials that are compatible with UHV, able to withstand high temperatures, possess low outgassing rates, are gall and seize resistant, and are able to carry substantial electrical loading without overheating.

Inventors:
 [1]
  1. (Patterson, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
869866
Patent Number(s):
5412180
Assignee:
Regents of University of California (Oakland, CA)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
ultra; vacuum; heating; rotating; specimen; stage; provides; simultaneous; ideally; suited; operation; ultrahigh; times; 10; -9; torr; useful; atmosphere; pressurized; systems; placed; holder; attached; heater; top; housing; rotated; relative; bottom; electrically; connected; thereto; conductive; brushes; materials; compatible; uhv; withstand; temperatures; possess; outgassing; rates; gall; seize; resistant; carry; substantial; electrical; loading; overheating; connected thereto; electrically conductive; electrically connected; specimen stage; electrical load; rotated relative; specimen holder; ultrahigh vacuum; ideally suited; rotating specimen; stage provides; simultaneous specimen; specimen heat; /219/118/

Citation Formats

Coombs, III, Arthur W. Ultra high vacuum heating and rotating specimen stage. United States: N. p., 1995. Web.
Coombs, III, Arthur W. Ultra high vacuum heating and rotating specimen stage. United States.
Coombs, III, Arthur W. Sun . "Ultra high vacuum heating and rotating specimen stage". United States. https://www.osti.gov/servlets/purl/869866.
@article{osti_869866,
title = {Ultra high vacuum heating and rotating specimen stage},
author = {Coombs, III, Arthur W.},
abstractNote = {A heating and rotating specimen stage provides for simultaneous specimen heating and rotating. The stage is ideally suited for operation in ultrahigh vacuum (1.times.10.sup.-9 torr or less), but is useful at atmosphere and in pressurized systems as well. A specimen is placed on a specimen holder that is attached to a heater that, in turn, is attached to a top housing. The top housing is rotated relative to a bottom housing and electrically connected thereto by electrically conductive brushes. This stage is made of materials that are compatible with UHV, able to withstand high temperatures, possess low outgassing rates, are gall and seize resistant, and are able to carry substantial electrical loading without overheating.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {1}
}

Patent:

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