Near field optical probe for critical dimension measurements
Abstract
A resonant planar optical waveguide probe for measuring critical dimensions on an object in the range of 100 nm and below. The optical waveguide includes a central resonant cavity flanked by Bragg reflector layers with input and output means at either end. Light is supplied by a narrow bandwidth laser source. Light resonating in the cavity creates an evanescent electrical field. The object with the structures to be measured is translated past the resonant cavity. The refractive index contrasts presented by the structures perturb the field and cause variations in the intensity of the light in the cavity. The topography of the structures is determined from these variations.
- Inventors:
-
- Albuquerque, NM
- Cambridge, MA
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 872293
- Patent Number(s):
- 5905573
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- near; field; optical; probe; critical; dimension; measurements; resonant; planar; waveguide; measuring; dimensions; range; 100; nm; below; central; cavity; flanked; bragg; reflector; layers; input; output; means; light; supplied; narrow; bandwidth; laser; source; resonating; creates; evanescent; electrical; structures; measured; translated; past; refractive; index; contrasts; perturb; variations; intensity; topography; determined; narrow bandwidth; output means; bragg reflector; electrical field; refractive index; optical probe; laser source; resonant cavity; optical waveguide; critical dimension; narrow band; near field; optical wave; bandwidth laser; planar optical; critical dimensions; /356/
Citation Formats
Stallard, Brian R, and Kaushik, Sumanth. Near field optical probe for critical dimension measurements. United States: N. p., 1999.
Web.
Stallard, Brian R, & Kaushik, Sumanth. Near field optical probe for critical dimension measurements. United States.
Stallard, Brian R, and Kaushik, Sumanth. Fri .
"Near field optical probe for critical dimension measurements". United States. https://www.osti.gov/servlets/purl/872293.
@article{osti_872293,
title = {Near field optical probe for critical dimension measurements},
author = {Stallard, Brian R and Kaushik, Sumanth},
abstractNote = {A resonant planar optical waveguide probe for measuring critical dimensions on an object in the range of 100 nm and below. The optical waveguide includes a central resonant cavity flanked by Bragg reflector layers with input and output means at either end. Light is supplied by a narrow bandwidth laser source. Light resonating in the cavity creates an evanescent electrical field. The object with the structures to be measured is translated past the resonant cavity. The refractive index contrasts presented by the structures perturb the field and cause variations in the intensity of the light in the cavity. The topography of the structures is determined from these variations.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Jan 01 00:00:00 EST 1999},
month = {Fri Jan 01 00:00:00 EST 1999}
}
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