Near field optical probe for critical dimension measurements
Abstract
A resonant planar optical waveguide probe for measuring critical dimensions on an object in the range of 100 nm and below is disclosed. The optical waveguide includes a central resonant cavity flanked by Bragg reflector layers with input and output means at either end. Light is supplied by a narrow bandwidth laser source. Light resonating in the cavity creates an evanescent electrical field. The object with the structures to be measured is translated past the resonant cavity. The refractive index contrasts presented by the structures perturb the field and cause variations in the intensity of the light in the cavity. The topography of the structures is determined from these variations. 8 figs.
- Inventors:
- Issue Date:
- Sponsoring Org.:
- USDOE; USDOE, Washington, DC (United States)
- OSTI Identifier:
- 6367206
- Patent Number(s):
- 5905573
- Application Number:
- PPN: US 8-955997
- Assignee:
- Sandia Corp., Albuquerque, NM (United States)
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 22 Oct 1997
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; BRAGG REFLECTION; DESIGN; DIMENSIONS; MEASURING METHODS; OPTICAL SYSTEMS; PROBES; REFLECTION; 440600* - Optical Instrumentation- (1990-)
Citation Formats
Stallard, B R, and Kaushik, S. Near field optical probe for critical dimension measurements. United States: N. p., 1999.
Web.
Stallard, B R, & Kaushik, S. Near field optical probe for critical dimension measurements. United States.
Stallard, B R, and Kaushik, S. Tue .
"Near field optical probe for critical dimension measurements". United States.
@article{osti_6367206,
title = {Near field optical probe for critical dimension measurements},
author = {Stallard, B R and Kaushik, S},
abstractNote = {A resonant planar optical waveguide probe for measuring critical dimensions on an object in the range of 100 nm and below is disclosed. The optical waveguide includes a central resonant cavity flanked by Bragg reflector layers with input and output means at either end. Light is supplied by a narrow bandwidth laser source. Light resonating in the cavity creates an evanescent electrical field. The object with the structures to be measured is translated past the resonant cavity. The refractive index contrasts presented by the structures perturb the field and cause variations in the intensity of the light in the cavity. The topography of the structures is determined from these variations. 8 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 18 00:00:00 EDT 1999},
month = {Tue May 18 00:00:00 EDT 1999}
}
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